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61. 发明专利

JPH04276197A MULTITURBO TYPE VACUUM PUMP 失效
公开(公告)号：JPH04276197A
公开(公告)日：1992-10-01
申请号：JP3854491
申请日：1991-03-05
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , ARAI TAKASHI , OSAWA HARUSHIGE , HATA SATOSHI
IPC分类号： F04D17/16 , F04D19/04 , F04D25/16
摘要： PURPOSE:To improve discharge efficiency by increasing the discharge capacity and compression ratio of a turbo molecular pump and reducing dimension. CONSTITUTION:A plurality of turbo type rotary bodies are built in multishaft form inside a casing 4 having a suction port and a discharge port, and the need of piping is obviated, and the discharge efficiency is improved, and the reduction of dimension is permitted. One edge of the turbo type rotary body is formed to turbo molecular pump (main turbo rotary body 6), and a plurality of turbo type rotary bodies (subturbo rotary body 11) are arranged in circumferential form under the lowermost stage blade, and the installation space is reduced, and the compression ratio is increased. Further, each of the turbo type rotary body consists of a viscous vacuum pump which is formed by combining rotary discs having each groove in the spiral direction, in plural stages, and discharge with high compression ratio is carried out continuously.

62. 发明专利

JPH0440285B2 失效
公开(公告)号：JPH0440285B2
公开(公告)日：1992-07-02
申请号：JP14162482
申请日：1982-08-17
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： ABE TETSUYA , INAGAWA KONOSUKE , OBARA KENJIRO , MURAKAMI YOSHIO
IPC分类号： C01B31/30 , C23C14/00 , C23C14/06 , G21B1/11 , G21B1/17

63. 发明专利

JPH04149952A QUADRUPOLE MASS SPECTROMETER 失效
公开(公告)号：JPH04149952A
公开(公告)日：1992-05-22
申请号：JP27455390
申请日：1990-10-12
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： HIROKI SEIJI , ABE TETSUYA , MURAKAMI YOSHIO
IPC分类号： G01N27/62 , H01J49/42
摘要： PURPOSE:To obtain high resolution by determining a d.c. voltage and a high-frequency voltage applied to a quartet electrode on the basis of a stable area other than the first stable area of Mathieu diagram. CONSTITUTION:A d.c. voltage and a high-frequency voltage applied to a quadrupoles on the basis of a stable area other than the first stable area I of Mathieu diagram according to Mathieu function. That is, stable areas of Mathieu diagram used for a quadrupole mass spectrometer are represented by the areas II, III, IV, V, VI-, I', II', III', IV', IV' V'-, I'', II'', III''-, I'''- other than the area I. However, since a voltage value required for formation of a stable area is larger as apart from the origin (0, 0), practically usable stable area is limited. Thus, m can be stably made very small, so that resolution may be greatly improved.

64. 发明专利

JPH0432149A QUDRUPOLE MASS SPECTROMETER 失效
公开(公告)号：JPH0432149A
公开(公告)日：1992-02-04
申请号：JP13637790
申请日：1990-05-26
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： HIROKI SEIJI , ABE TETSUYA , MURAKAMI YOSHIO
IPC分类号： G01N27/62 , H01J49/42
摘要： PURPOSE:To facilitate drastically high resolution by determining the dc voltage and high frequency voltage to be applied to a qudrupole mass spectrometer based on a second stable region of a Mathieu chart. CONSTITUTION:A ratio lambda of dc voltage U and a maximum amplitude E of high frequency voltage is determined as lambda

65. 发明专利

JPH0371546A QUADRUPOLE MASS SPECTROMETER 失效
公开(公告)号：JPH0371546A
公开(公告)日：1991-03-27
申请号：JP20738789
申请日：1989-08-10
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： HIROKI SEIJI , ABE TETSUYA , MURAKAMI YOSHIO
IPC分类号： G01N27/62 , H01J37/252 , H01J49/42
摘要： PURPOSE:To enable a stable mass spectrometry by detecting a tuned frequency varied without adjusting a high frequency tuning means, and automatically varying the frequency of a high frequency voltage according to the tuned frequency detected so as to make the frequency agree with the tuned frequency varied. CONSTITUTION:The high frequency voltage of a variable high frequency generating circuit 58 is amplitude modulated by an amplitude modulator 62 according to the waveform of a saw tooth wave generating circuit 60 and is applied to a quadrupole bar 10 via a high frequency tuning circuit 32. The high frequency voltage is detected as a full wave rectification voltage by the circuit 32 and is input to the circuit 58 and smoothed. The frequency of the high frequency voltage generated by the circuit 58 according to the full wave rectification voltage smoothed is automatically set so that it agrees with the tuned frequency of the circuit 32. Thereby the tuned frequency is automatically followed by the frequency of the high frequency voltage and the best tuned condition is maintained. A loss of high frequency electric power applied to the quadrupole bar is small and a stable mass spectrometry is enabled.

66. 发明专利

JPH11287187A RECIPROCATING VACUUM PUMP 失效
公开(公告)号：JPH11287187A
公开(公告)日：1999-10-19
申请号：JP10383998
申请日：1998-03-31
申请人： ULVAC CORP
发明人： MURAKAMI YOSHIO , AIKAWA JUNICHI , YUYAMA JUNPEI
IPC分类号： F04B37/14 , F04B45/04
摘要： PROBLEM TO BE SOLVED: To provide a dry type reciprocating vacuum pump, having a small size and reduced a cost, equipped with a valve surely opens/closes even at a low pressure of several hundred Pa or less, to be substituted for an oil-sealed rotary pump. SOLUTION: In this vacuum pump, opening/closing of an intake valve 20 of a pump chamber 10 and an exhaust valve are performed by changing a direction of a direct current passed through a moving coil 46 in such a manner that for instance, in the intake valve 20, a valve plate 42 of a valve main unit 41 is opened/closed by combining the moving coil 46 wound to a bobbin 44 in a lower end of a shaft 43 of the valve plate 42 with a permanent magnet 47 and yokes 48, 49 generating magnetic flux crossing with this moving coil, so as to move the valve plate 42 in a direction opened/closed by synchronizing with enlarging/contracting of an internal capacity of the pump chamber 10. The intake valve 20 and the exhaust valve are surely opened/closed in a pressure range of 10 Pa to 1 Pa by manufacturing a movable part in several grams or less.

67. 发明专利

JP2001304114A RECIPROCATION TYPE VACUUM PUMP 失效
公开(公告)号：JP2001304114A
公开(公告)日：2001-10-31
申请号：JP2000120995
申请日：2000-04-21
申请人： ULVAC CORP
发明人： MURAKAMI YOSHIO , YUYAMA JUNPEI
IPC分类号： F04B37/14 , F04B45/04
摘要： PROBLEM TO BE SOLVED: To provide a dry type vacuum pump formed that a valve disc is provided for reliably opening and closing even when a differential pressure between pressures on both sides of a valve plate is below approximate hundreds Pa and further, an actuator for a rod elevating to open and close the valve disc is situated outside a flow passage for gas and prevented from resistance against exhaust gas. SOLUTION: This reciprocation type vacuum pump comprises a coil spring 36 to press a valve disc 40 against a valve seat 38 by a low given force during closing of a suction valve 20; a rod 22 to forcibly lower the valve disc 40 against energization of the coil spring 36 during opening and separate it from the valve seat 38; and an actuator 30 to loosely fit in a cylindrical guide 23 in which the upper end part of the rod 22 is inserted and displace an annular permanent magnet 24 on the atmosphere side magnetically coupled to a soft iron piece 21 at the tip end part of the rod 22 through the wall of the guide 23 together with an annular disc 25. A direct current flowing to a solenoid coil 28 is brought into an ON and Off state to elevate the rod 22.

68. 发明专利

JPH11159463A BELLOWS PUMP 失效
公开(公告)号：JPH11159463A
公开(公告)日：1999-06-15
申请号：JP34405797
申请日：1997-11-28
申请人： ULVAC CORP
发明人： MURAKAMI YOSHIO , AIKAWA JUNICHI , KANEDA TOSHINOBU , YUYAMA JUNPEI
IPC分类号： F04B43/08
摘要： PROBLEM TO BE SOLVED: To provide a dry pump which is small-sized, light in weight, has low noise, and is capable of operating for a long time and can be changed to an oil-sealed rotary vacuum pump. SOLUTION: A pump unit is made by mounting an intake valve and an exhaust valve which are opened and closed by synchronizing with enlargement/ reduction of content volume on a urethane rubber bellows 10 capable of enlarging/reducing content volume by a dodecahedron structure formed by a four-angle cylindrical main body 11 having both-side surfaces and a bottom surface which is bent into an angle to the inside and four-angle conical tip parts 21a, 21b which close both the ends and a bellows type vacuum pump is made by serially connecting the 4 units. When a bellows on an upstream side 101 is in an enlarging period of content volume and the exhaust valve 171 is open, a bellows on a downstream side 102 is in a reducing period of content volume and the intake valve 162 is open. When the bellows on the upstream side 101 is in the reducing period of content volume, the bellows 102 is driven so as to be reverse.

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