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61. 发明专利

JPS63103059A APPARATUS FOR PREPARING MULTI-LAYERED THIN FILM 失效
公开(公告)号：JPS63103059A
公开(公告)日：1988-05-07
申请号：JP24553486
申请日：1986-10-17
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , ISHII YOSHIICHI
IPC分类号： C23C14/04 , C23C14/06 , C23C14/34 , C23C14/56
摘要： PURPOSE:To prevent the degradation in the purity of multi-layered thin films by enclosing targets with deposition-proof walls and using a shutter having specific construction at the time of forming the multi-layered thin films by the different targets on the surfaces of substrates while rotating the substrates. CONSTITUTION:The multi-layered thin films are formed on the surfaces of the substrates 3 by the plural targets 4, 4 consisting of different materials while a holder 2 mounted with the plural substrates 3 are rotated in a vacuum vessel 1. The targets are covered with the deposition-proof walls 9 and the shutter 5 for shutting the vapor deposition particles from the targets is opened and closed by the apertures 10 of the deposition-proof walls 9 in order to prevent the intrusion of the vapor deposition particles by the other targets into the respective thin films in this case. The shutter 5 is formed to the geometry which is partly parallel in the width of the direction perpendicular to the opening and closing direction thereof. Said width is made slightly smaller than the width of the apertures 10 so that the part of said width exists in the aperture 10 position of the deposition-proof walls 9 in the stop position after the shutter is opened. In addition, a side face edge 31 is provided to the top end thereof and chimneys 11 are provided above the shutter and the deposition-proof walls, by which the leaking and sticking of the vapor deposition particles from the targets onto the other substrate surfaces are prevented.

62. 发明专利

JPS6360278A APPARATUS FOR PREPARING MULTI-LAYERED THIN FILM 失效
公开(公告)号：JPS6360278A
公开(公告)日：1988-03-16
申请号：JP20361686
申请日：1986-09-01
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , ISHII YOSHIICHI
IPC分类号： C23C14/56 , C23C14/06
摘要： PURPOSE:To suppress mixing of deposition particles of different materials and to form high-quality multi-layered thin films by segmenting respective supply sources for the plural deposition particles by walls to provide independent chambers for each of the supply sources and providing windows to splash the deposition particles only in the substrate direction to these chambers. CONSTITUTION:Targets 5, 6 are segmented by a deposition preventive wall 14 in a vacuum vessel 1 of an apparatus for preparing the multi-layered thin films to form the respectively independent chambers 15, 16 for each of the targets 5, 6. The wall 14 covers the periphery of the targets 5, 6. The windows 17, 18 to splash the deposition particles in the direction of substrates 3, 4 are opened only in the upper part of the wall 14. A substrate holder 2 mounted with the substrates 3, 4 is rotated in the above-mentioned constitution. Shutters 7, 8 are opened and the film formation is successively executed when the substrates 3, 4 come over the targets 5, 6. The multi-layered thin films exhibiting the physical characteristic conforming to designed values are thereby formed on the substrates 3, 4.

63. 发明专利

JPS62133339A LUMINESCENCE MEASURING INSTRUMENT 失效
公开(公告)号：JPS62133339A
公开(公告)日：1987-06-16
申请号：JP27438985
申请日：1985-12-06
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： IKEDA KOSUKE , ISHII YOSHIICHI
IPC分类号： G01N21/62
摘要： PURPOSE:To measure luminescence values independently or at the same by measuring the spectrum and intensity of light generated by irradiating semiconductor crystal with an electron beam and a laser beam. CONSTITUTION:A vacuum container 1 is evacuated to a high degree by using an evacuation system 2. The electron beam emitted by an electron beam 3 is converged through an electron beam optical system 4 and an objective 5 to illuminate a sample 7 placed on a moving cooling base 6. Further, a laser beam generating device 9 arranged in an atmosphere is used to generate the laser beam, which is guided into the container 1 through a laser beam convergence system 10 and an optical window 11 to illuminate the sample 7 after being passed under the lens 5 through a mirror 12. Luminescence generated by the sample 7 irradiated with those electron beam and laser beam is guided out to the atmosphere through a luminescence convergence system 13 and an optical window 14. Then the luminescence is made incident on a spectroscope 16 to detect luminescence of specific wavelength by a detector 17, and a luminescence signal processing system 18 is used to measure its intensity and output data on it.

64. 发明专利

JPS6220868A THIN FILM PREPARING DEVICE 失效
公开(公告)号：JPS6220868A
公开(公告)日：1987-01-29
申请号：JP16013985
申请日：1985-07-22
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , ISHII YOSHIICHI
IPC分类号： C23C14/50 , C30B23/06 , H01L21/203
摘要： PURPOSE:To simultaneously perform continuous rotation of a substrate and the heating by providing independently both a substrate heating mechanism part and a substrate rotating mechanism part and using the heating mechanism due to the line of magnetic force in a substrate heater. CONSTITUTION:In the inside of a vacuum vessel 5, the targets 13, 14 are sputtered to form the thin films on the substrates 7 set on a holder 8. In this time, the substrate 8 is rotated with a motor 9 and a substrate heater 10 generating the alternating magnetic field is spacially separated in an upper part of the holder 8 and provided. When conducting the changeable line of magnetic force to a heating coil 11 of the heater 10, current is generated with an electromagnetic induction phenomenon and changed into heat and the substrates 7 are heated. Thereby, the substrates 7 can be heated at optional temp. in a period of continuous rotation of the substrates 7 and the thin films having a uniform film thickness are formed.

65. 发明专利

JPS58103112A ADDITIONING METHOD OF DIFFERENT ELEMENT ON OXIDE MAGNETIC THIN FILM 失效
公开(公告)号：JPS58103112A
公开(公告)日：1983-06-20
申请号：JP20284081
申请日：1981-12-15
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： OOTA SATOSHI , ISHII OSAMU , ISHII YOSHIICHI , HATSUTORI SEIJI
IPC分类号： C23C14/34 , H01F41/14 , H01F41/18
摘要： PURPOSE:To permit low price, easy operational, and uniform addition by a method wherein quadrilateral metal plates for adding elements are buried in a matrix and the plates are fixed by fixtures made of the same kind of material as the matrix and screws, and the element is added from the metal plates adding element while rotating a substrate. CONSTITUTION:Quadrilateral metal plates 51, 52, 53 are buried in a matrix 4 along the radius vector direction. The number of metal plates is arbitrarily adjusted in accordance with the amount of desired adding elements. Replacement of the matrix 4 is not required. The metal plate 5 for adding elements is held by fixtures 6, 7 made of the same material as the matrix 4. The uniformity of circumferential direction is secured as the substrate 1 is rotated.

66. 发明专利

JPS58114A MANUFACTURE OF OXIDE MAGNETIC THIN-FILM 失效
公开(公告)号：JPS58114A
公开(公告)日：1983-01-05
申请号：JP9883681
申请日：1981-06-25
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： OOTA SATOSHI , ISHII YOSHIICHI , HATSUTORI SEIJI , ISHII OSAMU
IPC分类号： C01G49/08 , C01G49/02 , H01F41/18
摘要： PURPOSE:To form Fe3O4 films, and to shape the oxide thin-film having excellent magnetic characteristics easily by intermittently attaching Fe atoms onto a substrate, controlling the thickness of the Fe atom layers and alternately laminating oxygen atom layers and the atom layers with predetermined thickness. CONSTITUTION:A static shielding mask 2 to which an opening is formed is mounted between an Fe target 1 and the rotary substrate 3 set up to a shaft 4, the substrate 3 is turned and the speed of revolution is controlled, the Fe atoms are attached intermittently onto the substrate 3 and the thickness of the Fe atom layers is controlled. Sputtering is conducted between the target and the substrate 3 while using Fe as the target 1 in the oxidizing atmosphere of the mixed gas of argon Ar and oxygen O2. The oxygen atom layers and the Fe atom layers with the thickness of 1Angstrom -10Angstrom value are alternately laminated at that time, the Fe3O4 films are shaped, and the oxide thin-film having excellent magnetic characteristics is obtained.

67. 发明专利

JPS56127771A MAGNETRON SPUTTERING ELECTRODE 失效
公开(公告)号：JPS56127771A
公开(公告)日：1981-10-06
申请号：JP3008980
申请日：1980-03-10
申请人： FUJITSU LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： KAWAKAMI SUSUMU , MAKINO KOUICHI , TANI KAZUNORI , ISHII YOSHIICHI
IPC分类号： H01J37/32 , C23C14/35 , C23C14/36 , H01F41/18 , H01J37/34
摘要： PURPOSE:To produce a film of a highly magnetic material rapidly by a method wherein a magnetic field is generated at the surface of a target and a plasma can be focused even when a ferromagnetic body is used as the target. CONSTITUTION:In the magnetron sputtering electrode provided with the target of the ferromagnetic body and an electromagnet placed below the target, the thickness W11 of a central magnetic core and the thickness W21 of a lateral magnetic core are so designed as to satisfy the formulas, where (t) is the thickness of the target, BTS is the saturation flux density of the target and BMS is the saturation flux density of a yoke. Accordingly, a leakage magnetic field is generated at the target surface and the plasma can be focused, the film of ferromagnetic material is produced. This applies also to a magnetron sputtering electrode provided with a permanent magnet in place of the electromagnet.

68. 发明专利

JPH09314150A MAGNETIC TREATMENT APPARATUS 失效
公开(公告)号：JPH09314150A
公开(公告)日：1997-12-09
申请号：JP13671196
申请日：1996-05-30
申请人： TOKIN CORP , SHOWA NETSUGAKU KOGYO KK , NTT ADVANCED TECH KK , NIPPON TELEGRAPH & TELEPHONE , ISHIBASHI SHINICHIRO
发明人： YOKOI TETSUO , ENDO TATSUYA , ISHIBASHI SHINICHIRO , SEKI MASAHIRO , MIYATA SHIGEMORI , ISHII YOSHIICHI , MIYAGAWA SUMIO
IPC分类号： C02F5/00 , C02F1/48
摘要： PROBLEM TO BE SOLVED: To effectively prevent the generation of scale in piping by a method in which between opposite hollow magnets, the magnetic poles are same or different, and spiral rotational force is applied to ions or ionic compounds flowing in a space. SOLUTION: In a magnetic treatment apparatus, hollow cylindrical magnets 1 are arranged to sandwich a hollow cylindrical yoke 2. In each magnet 1, the magnetic poles facing each other with the yoke 2 between them are different in polarity. The magnets 1 are arranged so that the magnetic poles are N pole, S pole, N pole, S pole.... When ions having a prescribed flow move in an apparatus, since the magnetic field (direction of magnetic flux 5) is formed continuously in the flow direction, the ions are attracted to the center by the force of the magnetic field and collected to the center of the magnets 1 where magnetic flux density is minimum. The ions flow depicting a spiral orbit by Lorenz force (orbit of ions 6).

69. 发明专利

JPH09302992A TELEPHONE BOX SNOW-MELTING DEVICE 失效
公开(公告)号：JPH09302992A
公开(公告)日：1997-11-25
申请号：JP14675696
申请日：1996-05-15
申请人： TERAX KK , NIPPON TELEGRAPH & TELEPHONE
发明人： SUZUKI TETSUO , SHIMO YUKIO , ISHII YOSHIICHI
IPC分类号： E04H1/14 , E04H9/16
摘要： PROBLEM TO BE SOLVED: To provide a telephone box snow-melting device capable of melting snow on the outside ground of the door of a telephone box, keeping the inside heating, simplifying construction of the device with a low construction cost as well as a low maintenance cost. SOLUTION: A plate heater 100 is laid on the ground located at just under the part projected from an opening and closing door 13 to the outside of a telephone box 10 when the opening and closing door 13 is opened. At the same time, a plate heater 100-2 is also laid on the ground located at just under the inside of the telephone box 10. The plate heaters 100 and 100-2 are plate bodies having specific thickness with a large number of approximately cone-shaped holes on the upper and lower surfaces, and the holes on both up and down surfaces are equipped with a honeycomb structural body having construction alternately arranged so as to have one side wall for common use, the honeycomb structural body is directly laminated to the upper surface or the lower surface or both surfaces of a plate-like heater or indirectly through another member, and they are formed together as a unit.

70. 发明专利

JPH09302624A BRIDGE FREEZE PREVENTING STRUCTURE 失效
公开(公告)号：JPH09302624A
公开(公告)日：1997-11-25
申请号：JP14675596
申请日：1996-05-15
申请人： TERAX KK , NIPPON TELEGRAPH & TELEPHONE
发明人： SUZUKI TETSUO , SHIMO YUKIO , ISHII YOSHIICHI
IPC分类号： E01C11/26 , E01D19/08 , E01D101/00
摘要： PROBLEM TO BE SOLVED: To provide a freeze preventing structure which can prevent occurrence of a traffic accident due to different road surface condition between a bridge and roads on opposite sides thereof, and which has a simple structure, having a high strength and a high degree of thermal efficiency. SOLUTION: A preheater is composed of a honeycomb structure in which several conical holes are formed in the upper and lower surfaces of a panel having a predetermined thickness, these holes are alternately arranged so as to commonly use one side wall, and a plate-like heater an upper and/or lower surface of which is laminated with the honeycomb structure in directly through another member. Several preheaters 100 are laid in the road surface of a bridge 200 and the road surfaces on the ground on opposite sides of the bridge, and are connected thereto with a power source for heating. With this arrangement, freeze or snow covering on the load surface on the bridge 200 can be effectively prevented.

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