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    • 61. 发明专利
    • Method for producing metal supporting carbon
    • 生产金属支撑碳的方法
    • JP2012218959A
    • 2012-11-12
    • JP2011084547
    • 2011-04-06
    • Toyota Motor CorpNagoya Univトヨタ自動車株式会社国立大学法人名古屋大学
    • MIZUNO MOTOHIROTERADA MAKIHORI MASARUKANO HIROYUKI
    • C01B31/02H01M4/88
    • Y02P20/544
    • PROBLEM TO BE SOLVED: To provide a method for making a carbon material such as a vertically oriented CNT, a carbon nanowall, or the like uniformly support a metal thereon.SOLUTION: The method for producing the metal supporting carbon using a supercritical fluid utilizes an apparatus having a first vessel and a second vessel which is connected with the first vessel via a valve so as to be capable of communicating therewith, and includes (a) a step to seal a metal compound and a supercritical fluid precursor gas in the first vessel and carbon and the supercritical fluid precursor gas in the second vessel respectively, (b) a step to make the supercritical fluid precursor gas undergo a transition to a supercritical state by pressurizing the first vessel and the second vessel respectively in such a way that pressure in the first vessel gets lower than that in the second vessel, and (c) a step to make the first vessel and the second vessel communicate with each other by opening the valve.
    • 待解决的问题:提供一种用于制造碳材料的方法,例如垂直取向的CNT,碳纳米壁等在其上均匀地支撑金属。 解决方案:使用超临界流体制造金属载体碳的方法利用具有第一容器和第二容器的装置,第一容器和第二容器经由阀与第一容器连接以能够与其连通,并且包括( a)分别在第一容器中密封金属化合物和超临界流体前体气体以及第二容器中的碳和超临界流体前体气体的步骤,(b)使超临界流体前体气体经历向 分别以第一容器中的压力低于第二容器中的压力的​​方式分别加压第一容器和第二容器的超临界状态,以及(c)使第一容器和第二容器彼此连通的步骤 通过打开阀门。 版权所有(C)2013,JPO&INPIT
    • 62. 发明专利
    • Plasma generating apparatus, plasma processing apparatus, and plasma processing method
    • 等离子体生成装置,等离子体处理装置和等离子体处理方法
    • JP2012199226A
    • 2012-10-18
    • JP2012028187
    • 2012-02-13
    • Nagoya UnivTokyo Electron Ltd国立大学法人名古屋大学東京エレクトロン株式会社
    • TOYODA HIROTAKAHORI MASARUSEKINE MAKOTOTAKEDA KEIGOMIYOSHI SHUSUKEITO HITOSHIKUBOTA YUSUKE
    • H05H1/24H01L21/3065H05H1/46
    • H05H1/46H05H2001/4622H05H2001/463
    • PROBLEM TO BE SOLVED: To provide an atmospheric-pressure plasma generating apparatus in which uniform line plasma is generated using a long waveguide and uniform processing can be performed to a workpiece.SOLUTION: A plasma generating apparatus 20 includes: a microwave generating apparatus 21 generating microwaves; a rectangular waveguide 22 connected to the microwave generating apparatus 21 and provided with an antenna section 40 as a part of the rectangular waveguide; a gas supply apparatus 23 connected to the rectangular waveguide 22 and supplying processing gas to an inside of the rectangular waveguide; an exhaust apparatus 24 for exhausting the gas in the antenna section 40 and, if necessary, exhausting an inside of a processing container 10; and a phase shift apparatus 25A changing the phase of a standing wave in the rectangular waveguide 22. The antenna section 40 has a slot hole 41, and the processing gas having been supplied to the inside of the rectangular waveguide 22 in an atmospheric pressure state is transformed into plasma using microwaves and is discharged through the slot hole 41 toward an external workpiece.
    • 要解决的问题:提供一种使用长波导产生均匀的线等离子体并且可以对工件进行均匀处理的大气压等离子体产生装置。 解决方案:等离子体产生装置20包括:产生微波的微波产生装置21; 连接到微波发生装置21的矩形波导22,并且设置有作为矩形波导的一部分的天线部分40; 连接到矩形波导22并将处理气体提供给矩形波导的内部的气体供应装置23; 用于排出天线部40中的气体的排气装置24,如果需要,排出处理容器10的内部; 以及改变矩形波导22中的驻波相位的相移装置25A。天线部40具有槽孔41,并且在大气压状态下被供给到矩形波导管22的内部的处理气体为 使用微波转化成等离子体,并通过槽孔41朝向外部工件排出。 版权所有(C)2013,JPO&INPIT
    • 63. 发明专利
    • Achromatic lens, method for manufacturing the same, and optical device equipped with achromatic lens
    • 高光镜,其制造方法以及配备有紫外线透镜的光学装置
    • JP2011215267A
    • 2011-10-27
    • JP2010081781
    • 2010-03-31
    • Meijo UnivNagoya Univ国立大学法人名古屋大学学校法人 名城大学
    • EBIZUKA NOBORUKONDO HIROMOTOISHIKAWA KENJIITO AKIFUMIHORI MASARU
    • G02B5/18G02B13/14
    • PROBLEM TO BE SOLVED: To provide an achromatic lens having high transmittance in a vacuum ultraviolet ray area.SOLUTION: Provided is the achromatic lens including a refractive lens and a diffraction lens having a plurality of binary shaped gratings. As for the achromatic lens, the refractive lens is made of a refractive lens material being at least one selected from a group consisting of lithium fluoride and magnesium fluoride and the diffraction lens is made of a diffraction lens material being at least one selected from a group consisting of lithium fluoride and magnesium fluoride, wherein the mean square deviation value (rms value) of the surface roughness of the grating of the diffraction lens is 5 nm or less. The achromatic lens corrects the color aberration of the vacuum ultraviolet ray area from 200 nm to an absorption edge wavelength on a short wavelength side, where the refractive indexes of the lithium fluoride and the magnesium fluoride are drastically changed.
    • 要解决的问题:提供在真空紫外线区域中具有高透射率的消色差透镜。解决方案:提供包括折射透镜的消色差透镜和具有多个二进制形状的光栅的衍射透镜。 对于消色差透镜,折射透镜由折射透镜材料制成,所述折射透镜材料是选自氟化锂和氟化镁中的至少一种,衍射透镜由选自组中的至少一种的衍射透镜材料制成 由氟化锂和氟化镁组成,其中衍射透镜的光栅的表面粗糙度的均方根值(rms值)为5nm以下。 消色差透镜将真空紫外线区域的色差从200nm改变到短波长侧的吸收边缘波长,其中氟化锂和氟化镁的折射率急剧变化。
    • 64. 发明专利
    • Method of manufacturing carbon nanotube
    • 制备碳纳米管的方法
    • JP2011132068A
    • 2011-07-07
    • JP2009292952
    • 2009-12-24
    • Nagoya UnivToyota Motor Corpトヨタ自動車株式会社国立大学法人名古屋大学
    • HAMA YUICHIROKATAYAMA YUKIHISAHORI MASARUHIRAMATSU MINEOKANO HIROYUKI
    • C01B31/02B01J23/75
    • PROBLEM TO BE SOLVED: To provide a method of mass-producing a quality carbon nanotube with little bending by using a substrate comprising cheaper materials such as aluminum, and magnesium. SOLUTION: The method of manufacturing a carbon nanotube including: a process which covers a coating film 12 comprising a metal or a metal compound on the surface of a substrate 11 including aluminum, magnesium, or zinc; a process which arranges a metal catalyst 15 on the surface of the coating film 12; and a process in which a carbon containing gas is supplied to the substrate 11 in which the metal catalyst 15 has been arranged, and which makes the metal catalyst 15 grow up a carbon nanotube 18, wherein the metal or metal compound has a melting point higher than that of the material composing the substrate 11, and consists of a material which is not alloyed with the metal catalyst 15 in the growth process of the carbon nanotube 18. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种通过使用包含廉价材料如铝和镁的基板来大量生产质量好的碳纳米管的方法。 解决方案:制造碳纳米管的方法包括:在包括铝,镁或锌的基板11的表面上覆盖包含金属或金属化合物的涂膜12的工艺; 将金属催化剂15配置在涂膜12的表面上的工序; 并且向其中排列有金属催化剂15的基板11供给含碳气体的方法,使金属催化剂15长大成为碳纳米管18,其中金属或金属化合物的熔点较高 比构成基板11的材料的材料组成,并且在碳纳米管18的生长过程中由不与金属催化剂15合金的材料组成。版权所有(C)2011,JPO&INPIT
    • 67. 发明专利
    • Atomic analyzing apparatus
    • 原子分析装置
    • JP2008241293A
    • 2008-10-09
    • JP2007078481
    • 2007-03-26
    • Nu Eco Engineering KkNuエコ・エンジニアリング株式会社Univ NagoyaWakayama Univ国立大学法人 和歌山大学国立大学法人名古屋大学
    • HORI MASARUITO AKIFUMIKANO HIROYUKI
    • G01N21/73
    • G01J3/443G01N21/73
    • PROBLEM TO BE SOLVED: To identify and quantitatively determine an atom of a solid element contained in sludge, waste fluid, and soil.
      SOLUTION: The atomic analyzing apparatus comprises a plasma generating device 10 for generating non-equilibrium atmospheric pressure plasma by making discharge gas between a pair of micro-electrodes, a plasma induction electrode 21 that has an irradiation object 22 for radiating the non-equilibrium atmospheric pressure plasma and guides the non-equilibrium atmospheric pressure plasma generated by a plasma generating device to the irradiation object, a bias voltage applying device for applying bias voltage between the electrode of the plasma generating device and the plasma induction electrode and irradiating the irradiation object with the non-equilibrium atmospheric pressure plasma, and a spectrometer for atomizing material constituting the irradiation object by irradiation of the non-equilibrium atmospheric pressure plasma and analyzing the atom by light absorption.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:确定和定量确定污泥,废水和土壤中含有的固体元素的原子。 解决方案:原子分析装置包括:等离子体产生装置10,用于通过在一对微电极之间制造放电气体来产生非平衡大气压等离子体;等离子体感应电极21,其具有用于辐射非电离辐射的照射物体22; 平衡大气压等离子体,将由等离子体发生装置产生的非平衡大气压等离子体引导到照射物体;偏置电压施加装置,用于在等离子体发生装置的电极与等离子体感应电极之间施加偏置电压, 具有非平衡大气压等离子体的照射物体和通过照射非平衡大气压等离子体并且通过光吸收分析原子而构成照射物体的雾化材料的光谱仪。 版权所有(C)2009,JPO&INPIT
    • 68. 发明专利
    • Production method and production device for carbon nanostructure
    • 碳纳米管的生产方法和生产装置
    • JP2008063196A
    • 2008-03-21
    • JP2006244057
    • 2006-09-08
    • Furukawa Electric Co Ltd:TheUniv Nagoya古河電気工業株式会社国立大学法人名古屋大学
    • HORI MASARUSHIBAYAMA SATOHISAKOAIZAWA HISASHITODA SADAYUKI
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a production method and a production device for carbon nanostructures where base materials forming carbon nanostructures can be continuously fed, thus mass-production is facilitated.
      SOLUTION: The production device 100 is composed of: a plasma treatment chamber 101 for forming each carbon nanostructure as the main constitution; a base material feeding part 102 for feeding a base material 104 into the plasma treatment chamber 101; and a base material recovering part 103 for recovering the base material 104 with the carbon nanostructure formed. The base material 104 has a belt-like shape, and is continuously transferred from the base material feeding part 102 to the base material recovering part 103 through the plasma treatment chamber 101. In the production device 100, carbon nanowalls are produced as carbon nanostructures.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供可以连续供给形成碳纳米结构的基材的碳纳米结构的制造方法和制造装置,因此容易进行批量生产。 解决方案:生产装置100包括:用于形成每个碳纳米结构作为主要构造的等离子体处理室101; 用于将基材104供给到等离子体处理室101中的基材供给部102; 以及用于回收具有形成的碳纳米结构的基材104的基材回收部103。 基材104具有带状,通过等离子体处理室101从基材供给部102向基材回收部103连续输送。在制造装置100中,作为碳纳米结构体制造碳纳米管。 版权所有(C)2008,JPO&INPIT
    • 69. 发明专利
    • Electron emission source and manufacturing method therefor
    • 电子发射源及其制造方法
    • JP2007165193A
    • 2007-06-28
    • JP2005362155
    • 2005-12-15
    • Tokyo Electron LtdUniv Nagoya国立大学法人名古屋大学東京エレクトロン株式会社
    • HONGO TOSHIAKIHORI MASARU
    • H01J1/304H01J9/02H01J37/073
    • PROBLEM TO BE SOLVED: To enlarge emission capability of electrons to power supplied to a carbon nanotube layer in an electron emission source, made of a metal plate equipped with a carbon nanotube layer on the surface layer part.
      SOLUTION: A surface part of the carbon nanotube layer is nitrided. The carbon nanotube layer is structured by a carbon six-membered ring and a carbon five-membered ring in a standing status on a perpendicular direction. As carbon atoms of the tip parts of the carbon six-membered ring and the carbon five-membered ring are substituted by nitrogen atoms with nitrogen plasma, the length of a coupling hand, coupling the substituted nitrogen atom and the carbon atom, is larger than the length of a coupling hand coupling the carbon atoms themselves, so that C-N-C angle is more acute than the C-C-C angle of the carbon six-membered ring or the carbon five-membered ring. Electric field is concentrated on the nitrogen atom positioned at the top of the acute angle.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:为了扩大电子在电子发射源中提供给碳纳米管层的能量的发射能力,由在表层部分上配备有碳纳米管层的金属板制成。 解决方案:将碳纳米管层的表面部分氮化。 碳纳米管层由垂直方向上的立体状态的碳六元环和碳五元环构成。 由于碳六元环和碳五元环的末端部分的碳原子被氮等离子体所取代,所以与取代的氮原子和碳原子连接的偶联手的长度大于 耦合手的长度偶联碳原子本身,使得CNC角度比碳六元环或碳五元环的CCC角更尖锐。 电场集中在位于锐角顶部的氮原子上。 版权所有(C)2007,JPO&INPIT
    • 70. 发明专利
    • Radical generator
    • 发电机
    • JP2007095536A
    • 2007-04-12
    • JP2005284381
    • 2005-09-29
    • Katagiri Engineering:KkNu Eco Engineering KkNuエコ・エンジニアリング株式会社Univ Nagoya国立大学法人名古屋大学株式会社片桐エンジニアリング
    • HORI MASARUKANO HIROYUKIDEN SHOJI
    • H05H1/24C23C16/452H01L21/3065
    • PROBLEM TO BE SOLVED: To selectively generate various kinds of radicals, and enable those concentrations to be controllable. SOLUTION: Numerous first through holes 31a, 31b, 31c are formed at a first flat plate 11, numerous second through holes 32a, 32b, 32c are formed at a second flat plate 12, and numerous third through holes are formed on a third flat plate 13. At the inner peripheral face of the first penetrating holes 31a, 31b, 31c, ring-like anodes 41a, 41b, 41c are respectively arranged and installed, at the inner peripheral face of the second through holes 32a, 32b, 32c, ring-like cathodes 42a, 42b, 42c are respectively arranged and installed, and at the inner peripheral face of the third through holes 33a, 33b, 33c, ring-like neutralized electrodes 43a, 43b, 43c are respectively arranged and installed. Moreover, wiring layers 51a, 51b, 51c are formed by contacting with the end faces of the anodes 41a, 41b, 41c of the first flat plate 11. These wiring layers are drawn out at the side face of the first flat plate 11, and constituted so that the voltage from their terminals can be applied thereto independently. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:选择性地产生各种自由基,并且使得这些浓度是可控的。 解决方案:在第一平板11处形成有多个第一通孔31a,31b,31c,在第二平板12上形成许多第二通孔32a,32b,32c,并且在第一平板11上形成许多第三通孔 在第一贯通孔31a,31b,31c的内周面,在第二通孔32a,32b的内周面分别配置有环状阳极41a,41b,41c, 32c,环状阴极42a,42b,42c分别配置并安装,并且在第三通孔33a,33b,33c的内周面分别设置并安装环状中和电极43a,43b,43c。 此外,布线层51a,51b,51c通过与第一平板11的阳极41a,41b,41c的端面接触形成。这些布线层在第一平板11的侧面被拉出, 构成为能够独立地对来自其端子的电压进行施加。 版权所有(C)2007,JPO&INPIT