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51. 发明专利

JPH09105685A STRESS SENSING METHOD AND APPARATUS USED FOR EXECUTION THEREOF 失效
公开(公告)号：JPH09105685A
公开(公告)日：1997-04-22
申请号：JP963096
申请日：1996-01-23
申请人： MAZDA MOTOR
发明人： OKADA SEIJI , OKAZAKI TOSHIMI
IPC分类号： G01L1/10 , G01B7/16 , G01L1/18 , G01P15/097 , G01P15/10
摘要： PROBLEM TO BE SOLVED: To accurately sense a stress generated by acts of an acceleration on the stress generating part of a semiconductor sensor without influence of the residual stress and air resistance acting on the semiconductor sensor. SOLUTION: Composite vibrations including a plurality of types of vibration components having different frequencies are generated at the both ends-supported beam vibrator 15 of a semiconductor sensor 11, the amplitudes of the composite vibrations are detected, a plurality of types of the amplitude components having different frequencies included in the detected amplitudes are detected as a plurality of vibration spectra, and the respective spectra are squared to obtain a plurality of power spectra. The respective power spectra are standardized by a reference power spectrum obtained in the state that no air resistance is acting on the vibrator 15 or the state that no stress is acting on the vibrator 15 to obtain a plurality of standardized power spectra, the stress values corresponding to the standardized power spectra are obtained, and the stress generated at the vibrator 15 is detected based on the result of these averaging processes.

52. 发明专利

JP2598260B2 失效
公开(公告)号：JP2598260B2
公开(公告)日：1997-04-09
申请号：JP5627787
申请日：1987-03-11
IPC分类号： H01L21/368 , B05D1/20 , G01B17/02 , G01L1/10 , H01L51/00 , H01L51/05 , H03H9/17 , H03H9/19

53. 发明专利

JPH08201424A PIEZOELECTRIC VIBRATION SENSOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH08201424A
公开(公告)日：1996-08-09
申请号：JP1173495
申请日：1995-01-27
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： MITANI TSUTOMU , ASABE MITSUO , SUZUKI SHIGEO , KODAMA KAYOKO
IPC分类号： G01L1/10 , C23C4/12 , G01H11/08 , G01P15/09 , H01L41/08 , H04R17/00 , H04R31/00
摘要： PURPOSE: To provide a piezoelectric vibration sensor having an excellent sensitivity characteristic by forming projections of melt-sprayed films of a conductive material on both surfaces of a piezoelectric substrate in such patterns that the films are extended in both the width and length directions of the substrate in intersecting states. CONSTITUTION: Projections 2 of melt-sprayed films having a thickness of 50μm are formed on both surfaces of a piezoelectric ceramic substrate 1 at one end section of the substrate 1 in such patterns that the films are extended in both the width and length directions of the substrate 1 in intersecting state. The projections 2 are formed by, for example, forming the metallic masks of the opening patterns of the projections 2 on the substrate 1 and plasma spraying Mo powder. The lengths and widths of the projections 2 are decided so that the projections can be supported stably by taking the end vibrating property, impact resistance, etc., of a piezoelectric vibration sensor into consideration and, in addition, by taking the influence of the projections 2 on the characteristics of the substrate 1 into consideration. Since the projections 2 of the sensor have intersecting shapes, the deformation of the substrate 1 is hardly suppressed even when the sensor is held between containers and, therefore, the sensitivity characteristic of the sensor can be improved.

54. 发明专利

JPH08122172A FORCE SENSOR 失效
公开(公告)号：JPH08122172A
公开(公告)日：1996-05-17
申请号：JP25343694
申请日：1994-10-19
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： MIURA MASAYOSHI , IWAZAWA TOSHIYUKI , SAGAWA USHIO , AOKI SHINICHIRO , SATO TAKEO
IPC分类号： G01L1/10 , G01C19/56 , G01C19/5642 , G01P9/04
摘要： PURPOSE: To perform drive in a stable resonant mode by constituting a specific relation between the entire length of a resonator, an excitation piezoelectric element and the length of a receiving piezoelectric element. CONSTITUTION: A dynamic amount sensor comprises an inertia body 100, a support beam 101, vibrator 102, and piezoelectric elements are provided on the both ends of the vibrator 102, which is constituted of exciting part 103, a propagation part 104 and a receiving part 105. And when acceleration is applied, the inertia body 100 moves up and down, a supporting beam 101 bends and the vibrator 102 expands and contracts. Therefore, when a force is applied, a resonant frequency of the vibrator 102 is changed, and the acceleration can be measured by detecting the frequency change. In addition, the vibrator resonates in various vibration mode. Likelihood of occurrence of the vibration mode is closely related with the length (a) of the exciting part 103, the length (b) of the receiving part 105 and the entire length l of the vibrator 102, and the force sensor can be driven in a stable resonant mode by setting them 0.2

55. 发明专利

JPH08116101A PIEZOELECTRIC ELEMENT AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH08116101A
公开(公告)日：1996-05-07
申请号：JP25053794
申请日：1994-10-17
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： KAMATA TAKESHI , HAYASHI SHIGENORI , JINNO ISAKU , TORII HIDEO , TAKAYAMA RYOICHI , HIRAO TAKASHI
IPC分类号： G01L1/10 , B81B1/00 , B81C1/00 , G01P15/09 , H01L29/84 , H01L41/08 , H01L41/22
摘要： PURPOSE: To provide a small-sized light-weight piezoelectric element, which uses a lead zirco-titanate(PZT) film and has excellent accuracy and cost of which is reduced, and manufacture, in which the piezoelectric element can be manufactured without employing a precision micromachining technique. CONSTITUTION: A connecting electrode 4 is formed to an element holding substrate 1, in which there is a penetrated space section and which is made of alumina. An element substrate, in which KBr powder 2 is melted in the space section of the substrate 1 and the space section is filled with the powder, is prepared. A KBr filled section is polished and smoothed, and a Pt lower electrode grown in an epitaxial manner in the direction to a film surface is formed onto the surface of the KBr filled section by using a mask having a cantilever type pattern. PZT films 5 crystal-oriented in an axis (c) are formed through an rf magnetron sputtering method, and Al leading-out electrode films 6 are formed onto the surfaces of the films 5. Accordingly, a manufactured structure is washed by water and treated, and the KBr filled section 2 is removed, thus preparing a piezoelectric element 9.

56. 发明专利

JPH07101749B2 失效
公开(公告)号：JPH07101749B2
公开(公告)日：1995-11-01
申请号：JP10656788
申请日：1988-04-28
IPC分类号： G01L9/00 , G01L1/10 , H01L29/84

57. 发明专利

JPH0756466B2 失效
公开(公告)号：JPH0756466B2
公开(公告)日：1995-06-14
申请号：JP27265387
申请日：1987-10-28
IPC分类号： G01L1/10 , G01L9/00

58. 发明专利

JPH0763625A STRING FOR POWER MEASUREMENT 失效
公开(公告)号：JPH0763625A
公开(公告)日：1995-03-10
申请号：JP16950294
申请日：1994-07-21
申请人： METTLER TOLEDO AG
发明人： OIGEN MAIYAA
IPC分类号： G01G3/16 , G01L1/10
摘要： PURPOSE: To provide a force measuring string manufactured at a low cost and having a means for preventing surely the transmission of vibration of a resonance part to the outside. CONSTITUTION: The force measuring string 1 is formed out of a united sheet metal. This sheet metal has a resonance part 15, and the magnitude of a tension acting on the measuring string can be measured by calculating the number of vibration of the resonance part 15. Both ends of the resonance part are connected to a mounting tab 3 through a connecting part 9. Both ends of the resonance part 15 are respectively formed unitedly with a pair of elastic flaps 13. Since the elastic flaps 13 vibrate in the reverse phase to the resonance part 15, the vibrations of the elastic flaps 13 and resonance part 15 cancel each other at both ends of the resonance part, so that the vibration of the resonance part is not transmitted to the outside.

59. 发明专利

JPH06294689A TACTILE SENSOR 失效
公开(公告)号：JPH06294689A
公开(公告)日：1994-10-21
申请号：JP14460191
申请日：1991-06-17
申请人： JAPAN RES DEV CORP
发明人： SHINODA HIROYUKI , ANDO SHIGERU
IPC分类号： B25J13/08 , G01L1/10
摘要： PURPOSE:To provide a tactile sensor which can extracts information relevant to the surface of an object by lightly sliding the sensor on the surface of the object. CONSTITUTION:A plurality of means 2-1, 2-2, 3-1, 3-2, 4-1, 4-2 for detecting the internal distortions of an elastic member 1 touching an object to be measured are disposed at different depths from the surface of the elastic member 1. A signal processing means 6 processes the detection signals of the plurality of detecting means 2-1, 2-2, 3-1, 3-2, 4-1, 4-2 to obtain tactile information of the object. This constitution allows detection of surface deformation at different depths in the elastic member 1 when the elastic member 1 is slid. The surface deformations thus detected are then processed to determine the surface deformation thus obtaining tactile information relevant to the object.

60. 发明专利

JPH06249721A PIEZOELECTRIC OSCILLATION SENSOR 失效
公开(公告)号：JPH06249721A
公开(公告)日：1994-09-09
申请号：JP4031093
申请日：1993-03-01
申请人： FUJIKURA LTD
发明人： KUNIMURA SATOSHI , TAKAHASHI KATSUHIKO
IPC分类号： G01L1/10 , H01L41/09
摘要： PURPOSE:To provide a piezoelectric oscillation sensor having good frequency characteristics and good temperature characteristics in which the sensitivity does not deteriorate due to ambient temperature variation. CONSTITUTION:The piezoelectric oscillation sensor comprises a detecting section 2, where a film-like piezoelectric 8 is sandwiched by supporting plates 10, 10, having one face 2a secured with a load body 3 and the other face 2b secured to a circuit board 4 having larger area than the other face 2b. The detecting section 2 and the load body 3 are contained in a recess 6 made in the surface 5a of a base 5 and the circuit board 4 is supported on the surface 5a of the base 5. The circuit board 4 is bonded to the surface 5a of the base 5 by an adhesive 20.

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