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    • 2. 发明专利
    • PIEZOELECTRIC TYPE VIBRATION SENSOR APPARATUS
    • JPH07218332A
    • 1995-08-18
    • JP1070494
    • 1994-02-01
    • FUJIKURA LTD
    • IMAI TAKAYUKITAKAHASHI KATSUHIKOKUNIMURA SATOSHI
    • G01P15/09G01H11/08G01P15/08
    • PURPOSE:To provide a piezoelectric type vibration sensor capable of measuring a wide range of frequency, excellent in temp. characteristics and having waterproofness. CONSTITUTION:In a piezoelectric type vibration sensor apparatus wherein a piezoelectric type vibration sensor 35 constituted by attaching a load member 46 to a detection part 45 wherein electrodes are fixed to both surfaces of a piezoelectric element 43 and supports 44 are fixed on both sides thereof and a signal processing circuit board 36 are received in a package 33, the package 33 is constituted of a housing 31 made of a conductive substance having a recessed part 34 housing the piezoelectric type vibration sensor 35 formed thereto and a housing lid member 32 composed of a conductive substance covering the opening part of the recessed part 34. The load member 46 of the piezoelectric type vibration sensor 35 is bonded to the bottom part of the housing 31 toward the opening part of the recessed part 3 of the housing 31. Further, the signal processing circuit board 36 is stretched over the peripheral edge part 37 of the opening part of the housing 31 to be covered with the housing lid member 32 and the housing lid member 33 is integrated with the housing 31.
    • 5. 发明专利
    • PIEZOELECTRIC TYPE VIBRATION SENSOR
    • JPH06201722A
    • 1994-07-22
    • JP213493
    • 1993-01-08
    • FUJIKURA LTD
    • ABO WATARUKUNIMURA SATOSHITAKAHASHI KATSUHIKOIMAI TAKAYUKI
    • G01P15/09G01P15/18H04R17/00
    • PURPOSE:To improve detecting accuracy in the (z) axis direction. CONSTITUTION:A structure is provided by laminating a film shape piezoelectric body 26 and a load body 25 on a base 21. A (z) axis vibration sensor 24 to detect vibration in the (z) axis direction of a straight line passing through almost the center of the piezoelectric body 26 by crossing at a right angle to one surface of the piezoelectric body 26, an (x) axis vibration sensor 22 to detect vibration in the (x) axis direction for crossing at a right angle to the (z) axis direction and a (y) axis vibration sensor 23 to detect vibration in the (y) axis direction for crossing respectively at right angles to the (z) axis and the (x) axis, are provided. The (z) axis vibration sensor 24 is provided with the (z) axis piezoelectric body 26 to detect displacement in the (z) axis direction, the first electrode arranged respectively over the whole obverse and reverse of the (z) axis piezoelectric body 26 and a (z) axis electrode 33. Thereby, since an area of the (z) axis electrode can be formed larger than when plural divided electrodes are arranged in the piezoelectric body, even if a position of the center of gravity of the load body is dislocated more or less, crosstalk can be restrained in a low value, so that detecting accuracy in the (z) axis direction can be improved.
    • 8. 发明专利
    • GAS SENSOR
    • JPH0634551A
    • 1994-02-08
    • JP21563192
    • 1992-07-21
    • FUJIKURA LTD
    • IMAI TAKAYUKINAKAYAMA SHIROKUNIMURA SATOSHITAKAHASHI KATSUHIKO
    • G01N21/59G01N21/78
    • PURPOSE:To obtain a gas sensor of which the mechanical strength is improved, in particular, relating to the gas sensor using an optical fiber. CONSTITUTION:A gas sensor measures the concentration of gas by detecting a change in the optical properties of a solution containing a dye of which the optical properties change is response to a gas to be measured. A cell 15 formed partially of a gas-permeable film 14 is filled with the solution. At least one optical fiber 11 for projecting and sensing light is led into the cell 15. The cell 15 is made up of a porous transparent rod-shaped body 12 and at least 60% or above of the transparent rod-shaped body 12 is covered with the gas- permeable film 14, while the end face of the optical fiber 11 is bonded to an exposed part of the transparent rod-shaped body 12 not covered with the gas- permeable film, with a bonding layer 16 interlaid. Besides, the area extending from the exposed part of the transparent rod-shaped body 12 including the bonded part over to the outer periphery of the end face of the optical fiber is covered with a sealing material 13.
    • 10. 发明专利
    • JPH05248936A
    • 1993-09-28
    • JP4733592
    • 1992-03-04
    • FUJIKURA LTD
    • KUNIMURA SATOSHINAKAYAMA SHIROTAKAHASHI KATSUHIKOIMAI TAKAYUKI
    • G01H11/08
    • PURPOSE:To provide a piezo electric vibration sensor device which is free from rise of the cutoff frequency even if it is laid in a high humidity atmosphere and which has a wide measurable frequency region. CONSTITUTION:A piezo electric vibration sensor device comprises a pedestal 2, a sensing part 3' which is secured to the measuring surface perpendicular to the sensing axis G of the pedestal 2 and formed by pinching the two surfaces of a film-form piezo electric body by electrodes and pinching the two surfaces thereof by support plates, a piezo type vibration sensor 1 having a load body 4 consisting of a rigid body acting as an inertia mass part fixed onto the sensing part 3', and an impedance converter circuit 10 which processes the electric output from the film-form piezo electric body, wherein the mentioned components are arranged in a hollow package 7. The surface of the sensing part 3' is covered with a polyparaxylilene thin film of a uniform thickness within the range 0.5 to 5mum.