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    • 58. 发明专利
    • Gate valve, vacuum treatment apparatus, and method for producing semiconductor device
    • 门阀,真空处理装置和生产半导体装置的方法
    • JP2011084788A
    • 2011-04-28
    • JP2009239720
    • 2009-10-16
    • Sharp Corpシャープ株式会社
    • NOZAKI JUNICHIKISHIMOTO KATSUSHI
    • C23C16/44B01J3/02C23C16/54H01L21/3065
    • PROBLEM TO BE SOLVED: To surely prevent a leak between a first treatment chamber and a second treatment chamber via a gate valve by an extremely simple structure in which the gate valve has a two-step seal structure. SOLUTION: The gate valve is composed of a valve box 42 provided with a gate opening part and a valve body 45 opening and closing the gate opening part, and has a structure where, when the valve body 45 is moved and the gate opening part of the valve box 42 is closed, the gate opening part is intercepted by a phenomenon that a seal face 51a (51b) as the circumferential edge face of the valve body 45 faces a seal bearing surface 64a (64b) provided along the gate opening part of the valve box 42. A seal member is provided over the whole circumference between the seal face 51a (51b) and the seal bearing surface 64a (64b), and, in the seal member 53, the central part in a direction orthogonal to the moving direction of a slide is formed in a recessed part recessed to the side of the seal face 64a(64b) than both the side parts, thus the seal member 53 itself has a two-step seal structure. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:通过闸阀具有两级密封结构的非常简单的结构,通过闸阀可靠地防止第一处理室和第二处理室之间的泄漏。 解决方案:闸阀由设置有闸门开口部的阀箱42和开闭闸门开口部的阀体45构成,其结构为:当阀体45移动时,闸门 关闭阀箱42的开口部,门开口部被阀体45的周缘部的密封面51a(51b)面向沿着闸门设置的密封承载面64a(64b) 密封构件设置在密封面51a(51b)和密封件支承面64a(64b)之间的整个圆周上,并且在密封构件53中,中心部分沿正交方向 滑动件的移动方向形成在比两侧部分在密封面64a(64b)侧凹入的凹部中,因此密封构件53本身具有两段密封结构。 版权所有(C)2011,JPO&INPIT