PROBLEM TO BE SOLVED: To provide a negative electrode that does not degrade charge and discharge characteristics, by forming a silicon oxide which is a high-capacity active material for the negative electrode, through a vacuum deposition process of a high productivity. SOLUTION: In a vacuum vapor-deposition apparatus, a substrate 4 which passes through between a first can 12 and a second can 13, and the substrate 4 which passes through between a third can 14 and a fourth can 15 are arranged so that the substrates can be bilaterally symmetric with respect to an evaporation source 9, and a growth direction of a first active material layer 21 and a growth direction of a second active material layer 23 which are formed on the front and back side of the substrate 4 respectively can be approximately symmetric. An exhaust pump 1 and a supporting exhaust pump 31 which communicates with a supporting exhaust port 30 that is installed around the second can 13 and the fourth can 15 evacuate the inside of a vacuum tank 2. COPYRIGHT: (C)2008,JPO&INPIT