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    • 58. 发明专利
    • Capacitance type pressure sensor
    • 电容式压力传感器
    • JP2014126504A
    • 2014-07-07
    • JP2012284704
    • 2012-12-27
    • Azbil Corpアズビル株式会社
    • ISHIHARA TAKUYATOCHIGI ISHIN
    • G01L9/12G01L19/06
    • G01L9/0073G01L19/0627
    • PROBLEM TO BE SOLVED: To reduce the amount of contaminant deposited on a pressure-sensitive diaphragm.SOLUTION: A large diameter hole 50A forming a slit-like space (cavity) 20A between a first pedestal plate 21 and a second pedestal plate 22 is formed in a central part of a support diaphragm 50. An introduction port 21a for fluid to be measured that communicates with the slit-like space (cavity) 20A is formed in a central part of the first pedestal plate 21. The second pedestal plate 22 includes a plurality of delivery ports 22a that communicate with the slit-like space (cavity) 20A and sends the fluid to be measured to a sensor diaphragm 32. The introduction port 21a of the first pedestal plate 21 and the delivery ports 22a of the second pedestal plate 22 are disposed at positions at which they do not overlap each other in the thickness direction of the first pedestal plate 21 and second pedestal plate 22.
    • 要解决的问题:减少沉积在压敏膜上的污染物的量。形成在第一基座板21和第二基座板22之间形成狭缝状空间(空腔)20A的大直径孔50A 在第一基座板21的中央部形成有与狭缝状空间(空腔)20A连通的被测定流体的导入口21a。第二基座板22包括: 与狭缝状空间(空腔)20A连通的多个输送口22a,将被测定流体送到传感器隔膜32.第一基座板21的导入口21a和第二基座的排出口22a 板22设置在第一基座板21和第二基座板22的厚度方向上彼此不重叠的位置。