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51. 发明专利

JPS62287952A POSITIONING DEVICE 失效
公开(公告)号：JPS62287952A
公开(公告)日：1987-12-14
申请号：JP12808686
申请日：1986-06-04
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , NAGATOMO SHIRO
IPC分类号： H01L21/68 , B23Q1/00 , B23Q1/34 , B23Q1/36 , B23Q1/44 , B23Q5/34 , H01L21/67
摘要： PURPOSE:To enable positioning to be performed receiving no influence of external vibration by connecting a moving table with a fixed mounting bed and giving resilient force to a driving mechanism in its driving shaft direction while providing a spring system in a direction crossing at a right angle with the driving shaft direction. CONSTITUTION:A moving table 1 forms its section into a reverse U-shape having a side wall 1a, and a pillar-shaped fixed mounting bed 3 is protrusively provided or the center axis of the moving table 1 from the side of a fixed bed 5. Leaf springs 2 are transversely provided in the periphery of the fixed mounting bed 3, and one end of the leaf spring 2 is fixed to the fixed mounting bed 3 by screws 6 or the like. The moving table 1, whose side wall 1a is adapted to driving mechanisms 4 provided protruding from the side of the fixed bed 5, is moved by actuating the driving mechanisms 4. And positioning of the moving table 1 is performed by measuring its displacement by displacement measuring devices 8 to be fed back to the driving mechanisms 4.

52. 发明专利

JP2004006010A INFORMATION RECORDING AND REPRODUCING DEVICE 审中-公开
公开(公告)号：JP2004006010A
公开(公告)日：2004-01-08
申请号：JP2003178516
申请日：2003-06-23
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , HIRONO MASATOSHI
IPC分类号： G11B7/0045 , G11B7/125 , G11B7/135
摘要： PROBLEM TO BE SOLVED: To provide an information recording and reproducing device for performing excellent recording and reproduction with high density by minimizing variation of distance between a lens for evanescent light generation and a recording medium. SOLUTION: The lens for evanescent light production (SIL) 21 for receiving light that transmits an objective lens 20 for focusing light emitted from a semiconductor laser 14 and generating evanescent light is provided opposedly to the recording medium 11. The intensity of returning light reflected from a surface of the lens for evanescent light generation 21 facing the recording medium 11 is detected through a photodetector 27. The intensity of light that is incident on a lens for evanescent light is controlled such that the intensity of light tunneling through the recording medium 11 in evanescent light becomes almost constant through an analog operating circuit 28, a servo circuit 29 and an acousto-optical element (AOM) 31 so as to make the intensity of the returning light almost constant. COPYRIGHT: (C)2004,JPO

53. 发明专利

JPH10289457A OPTICAL HEAD DEVICE AND MASTER DISK RECORDER 失效
公开(公告)号：JPH10289457A
公开(公告)日：1998-10-27
申请号：JP9596997
申请日：1997-04-14
申请人： TOSHIBA CORP
发明人： SAKUTA SHIGERU , FUKUSHIMA TORU , KIKUIRI NOBUTAKA
IPC分类号： G02B7/28 , G11B7/09
摘要： PROBLEM TO BE SOLVED: To simplify the positioning of a recording unit and a focus control mechanism by providing an actuator which minutely displaces three- dimensionally at the top end part of an optical head device at whose top end part a recording unit is provided. SOLUTION: In a piezoelectric tube 6, a top end part in which a recording unit 4 is providing minutely displaces three-dimensionally to perform operation of extension and contraction or bending according to regions of a voltage impression. In a table 5, a composite spring mechanism 9 as a recording attitude control means is provided. The composite spring mechanism 9 controls the attitude of the recording unit, that is, maintains the attitude of the recording unit 4 parallel so that a laser beam Q to be emitted from the recording unit 4 is projected at a prescribed angel with respect to the surface of an optical master plate 2. A total control device 17 transmits coarse motion setting signals in step shapes to an adder 16 every prescribed coarse motion stroke of a corse adjusting mechanism 3 and, besides, transmits minute motion setting signals minutely displacing the piezoelectric tube 6 to an adder 21 every minute motion stroke which is shorter than the coarse motion stroke.

54. 发明专利

JPH0874909A VIBRATION CONTROL DEVICE 失效
公开(公告)号：JPH0874909A
公开(公告)日：1996-03-19
申请号：JP21441894
申请日：1994-09-08
申请人： TOSHIBA CORP
发明人： NISHIDA JUN , UCHIDA NORIO , KIKUIRI NOBUTAKA , NAGAI HIDEO
IPC分类号： F16F15/02 , F16F9/02 , F16F15/023 , G11B7/26 , G11B33/08
摘要： PURPOSE: To provide a vibration control device which is clean and which can provide sufficient vibration control force. CONSTITUTION: A piston 17 fixed to a movable table 11 by a rod 16 is formed so as to move axially within a cylinder 13 fixed to a surface plate 12 and at this time, air is made to flow in and out between an interior and an exterior of a closed space 19 formed at an end part of the cylinder 13 by the pistion 17 and an end plate 14 through a fine clearance 18. Whereby, vibration control force which is in inverse proporion to a size of the fine clearance cubed is caused in a direction opposite to a moving direction of the piston 17 by viscosity of the air passing through the fine clearance 18, so that vibration and the like of the movable table 11 is sufficiently restrained and a clean atmoshere can be kept as the device has no pollutant source.

55. 发明专利

JPH06163367A SUBSTRATE CARRIER DEVICE 失效
公开(公告)号：JPH06163367A
公开(公告)日：1994-06-10
申请号：JP31868492
申请日：1992-11-27
申请人： TOSHIBA CORP
发明人： YOSHITAKE HIDESUKE , KIKUIRI NOBUTAKA
IPC分类号： H01L21/027 , H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a compact substrate carrier device which enables installation to be contained inside a breadth of an exposure device. CONSTITUTION:The title device is provided with a carrier arm 9 whereto a chuck part 10 is attached on one end side, a first double acting cylinder 11 for rotating and moving the carrier arm 9 in a plane approximately parallel with a chuck surface 3a of a longitudinal table 3 and a second double acting cylinder 12 for rotating and driving the carrier arm 9 around its axis. They are contained within the width of an exposure device 4 under the longitudinal table 2 of the exposure device 4. A third double acting cylinder 15 of linearly moving the carrier arm 9 perpendicularly to the chuck surface 3a of the longitudinal table 3, a stage 17 which moves freely on a uniaxial stage 16 installed parallel with the exposure light beam A, positioning pins 18, 19, 23 for positioning a substrate 2 mounted on a chuck surface 17a of the stage 17 and a pressing arm 21 are installed in the device.

56. 发明专利

JPH04328821A X-RAY ALIGNER 失效
公开(公告)号：JPH04328821A
公开(公告)日：1992-11-17
申请号：JP9918891
申请日：1991-04-30
申请人： TOSHIBA CORP , TOPCON CORP
发明人： ISHIBASHI YORIYUKI , HIRANO RYOICHI , KIKUIRI NOBUTAKA , NAGAI HIDEO , MURATA TAKAHIRO , YOSHINO TOSHIKAZU
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
摘要： PURPOSE:To facilitate the optical axial adjustment of an alignment optical system without repeating the needless disconnecting steps of an X-ray mask itself while enabling the reproducibility of the net alignment precision to be evaluated. CONSTITUTION:Within the title X-ray exposure device, a mask chuck 9 free disconnectably holding an X-ray mask provided with a free disconnectable adjusting dammy mask 16 with an alignment mask made inside adjusts the optical axis of an alignment optical system while holding said dammy mask or optical elements 17, 18 adjusting the incident position of alignment light incident on a mark 14a for alignment are arranged on the optical path of the alignment light.

57. 发明专利

JPH04242917A X-RAYS EXPOSURE DEVICE 失效
公开(公告)号：JPH04242917A
公开(公告)日：1992-08-31
申请号：JP68091
申请日：1991-01-08
申请人： TOSHIBA CORP
发明人： ISHIBASHI YORIYUKI , HIRANO RYOICHI , KIKUIRI NOBUTAKA , UCHIDA NORIO
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
摘要： PURPOSE:To enable an optical axis of each optical parts constituting an alignment optical system to be adjusted from a mask surface side and this optical system to be moved in mutually crossing directions without providing a hole for adjusting the optical axis at an optical base. CONSTITUTION:Each optical parts constituting an alignment optical system 1a are placed on an optical base 22 at a surface side of a mask 5 so that the optical parts can be touched and adjusted from a surface side of the mask 5 and at the same time the alignment optical system 1a is installed on traveling mechanisms 20 and 21 through the optical base 22.

58. 发明专利

JPH03253917A METHOD AND DEVICE FOR SETTING INTERVAL OF FIRST AND SECOND OBJECTS 失效
公开(公告)号：JPH03253917A
公开(公告)日：1991-11-13
申请号：JP5168190
申请日：1990-03-05
申请人： TOSHIBA CORP
发明人： UCHIDA NORIO , KIKUIRI NOBUTAKA
IPC分类号： G05D3/00 , B23Q15/22 , G05D3/12 , H01L21/027
摘要： PURPOSE:To exactly execute the setting of an interval by a simple structure by setting the sample surface of a second object (mask) in parallel to the reference surface in the beginning, and subsequently, setting the sample surface of a first object (wafer) in parallel and at a prescribed interval to the sample surface of a second object. CONSTITUTION:In a first process, an error thetaY of the parallelism of the upper face of a mask to the reference surface 11 is measured. Subsequently, in a second process, the mask is tilted by a thetaY table 32 so that this thetaY error is eliminated, and the upper face of the mask is maintained in parallel to the reference surface 11. Also, in a third process, an interval between each second sensor 52A, 52B and the upper face of the mask is detected. Next, in a fourth process, the error thetaY of the parallelism of the upper face of a wafer to the upper face of the mask, and an interval Z between the upper face of the mask and the upper face of the wafer are measured. Moreover, in a fifth process, based on these errors thetaY of the parallelism and the interval Z, a thetaY table 22 and a Z table 23 of the wafer side are adjusted. In such a way, the mask and the wafer can be set exactly in parallel to each other and at a prescribed interval.

59. 发明专利

JPH02262091A POSITIONING APPARATUS 失效
公开(公告)号：JPH02262091A
公开(公告)日：1990-10-24
申请号：JP8140189
申请日：1989-04-03
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , KOBAYASHI NOBORU
IPC分类号： G12B5/00 , G03F7/20 , G05D3/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To precisely perform positioning at a high speed by providing a chamber whose interior is held under a predetermined atmosphere or vacuum and the main moving means arranged outside the chamber and made movable in a predetermined direction. CONSTITUTION:A vacuum chamber 3 is provided on a base stand 14 and the wafer table 20 freely movable within an XY plane guided by a magnetic bearing 11 is provided in said chamber 3 and the fixed element 2 of a linear pulse motor is arranged under the wafer table 20 in opposed relation to a movable element 1 so as to hold hard glass 21 between both elements 1, 2 and the position of the wafer 8 placed on the wafer table 20 is measured by a laser interferometer 15. At first, control is performed so as to hold the fixed element 2 and movable element 1 of the linear pulse motor. By this method, the movement of the movable element 1 accompanied by the movement of the X- and Y- tables 4, 5 in the atmosphere is transmitted to the fixed element 2 supported by the magnetic bearing 11 and, as a result, the wafer table 20 can be positioned.

60. 发明专利

JPH01295737A MOVING MECHANISM DEVICE 失效
公开(公告)号：JPH01295737A
公开(公告)日：1989-11-29
申请号：JP12592388
申请日：1988-05-25
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA
IPC分类号： B23Q5/34 , B23Q1/58 , B23Q1/60 , B65G25/04 , B65G47/82
摘要： PURPOSE:To permit a moving table to easily perform its coarse movement and fine movement by providing an eccentric cam mechanism in the moving table and moving a moving truck, provided with a tilt surface adapted to the eccentric cam mechanism in a base side, in a direction orthogonal with the moving direction of the table. CONSTITUTION:A moving table 3 provides a rotary shaft 5 to be arranged, and its peripheral surface turnably fits by a ball bearing 6 a disk-shaped eccentric cam 7 of large eccentric amount. A base 1 fits by a thread a moving truck 11, moved in a direction orthogonal with the moving direction of the moving table 3 by turning a thread 9, being adapted to a peripheral ring 6b of the ball bearing 6. An adapted surface 11a forms a slope. In the time of operation, the peripheral ring 6b is adapted to the slope 11a and moved roughly to right and left in accordance with the eccentric amount by turning the rotary shaft 5. The rotary shaft 5 is stopped, when the moving truck 11 is vertically moved, the peripheral ring 6b is rotated by the slope 11a, and the moving table 3 is fine moved to right and left.

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