专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPH04188609A LIGHT-EXPOSING DEVICE 失效
公开(公告)号：JPH04188609A
公开(公告)日：1992-07-07
申请号：JP31328490
申请日：1990-11-19
申请人： TOSHIBA CORP
发明人： UCHIDA NORIO , KIKUIRI NOBUTAKA , NISHIDA JUN
IPC分类号： G03F7/20 , H01L21/027
摘要： PURPOSE:To easily and quickly exchange the substrate to be exposed such as a semiconductor wafer and the like, a mask and the like by a method wherein the chuck, with which the substrate is mounted on a positioning table and retained in a freely detachable manner, is constituted in such a manner that it is separately constructed in a freely movable manner against the table. CONSTITUTION:A wafer chuck 8, with which a semiconductor wafer 7 is detachably supported by vacuum suction, is provided on a wafer table 6 relatively to the wafer table in the direction of a mask 9 in a freely movable manner. Besides, the wafer chuck 8 is moved in the direction closer to a mask 9, and the gap (g) between the mask 9 and the surface of the semiconductor 7 is set in a microscopic interval of about 30mum, for example. A light-exposing operation can be conducted by maintaining the gap (g) of very small interval between the substrate 7, the mask 9 and the like. As a result, the exchange of the substrate 7 such as the semiconductor wafer and the like, the mask 9 and the like can be exchanged easily and quickly.

2. 发明专利

JP2001118201A METHOD AND DEVICE FOR EXAMING DISK DEFORMATION, AND MAGNETIC DISK DEVICE 失效
公开(公告)号：JP2001118201A
公开(公告)日：2001-04-27
申请号：JP29701899
申请日：1999-10-19
申请人： TOSHIBA CORP
发明人： HOSHINA SHIGERU , NISHIDA JUN , ITO ATSUSHI
IPC分类号： G11B5/00 , G01B11/16 , G01B21/32 , G11B5/84
摘要： PROBLEM TO BE SOLVED: To make the deformation of two disks loaded in a magnetic disk device examinable well at a speed. SOLUTION: A disk in a magnetic disk device 10 is rotated by a spindle motor 12 provided in the magnetic disk device itself, and the surface deformation of the disk is measured by displacement gauges 22a and 22b. In addition, when the magnetic disk device 10 having two disks is examined, an upper lid 7 is removed to expose the surface of an upper disk 1a, and the surface deformation of the disk 1a is measured by the upper displacement gauge 22a. On the other hand, an examination hole 9 is provided in the bottom plate part of the housing case 6 of the magnetic disk device, and a surface deformation of the lower disk 1b exposed through the examination hole 9 is measured.

3. 发明专利

JPH09190651A OPTICAL ORIGINAL DISK EXPOSING DEVICE AND ASYNCHRONOUS DEFLECTION AMOUNT CORRECTING DEVICE 失效
公开(公告)号：JPH09190651A
公开(公告)日：1997-07-22
申请号：JP5113896
申请日：1996-03-08
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , TACHIKAWA YUICHI , NISHIDA JUN
IPC分类号： B82B1/00 , G05B19/042 , G11B7/095 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To make the track pith of an optical original disk minute by enabling high precision positioning and preventing accuracy of the track pitch from deterioration due to asynchronous deflection generated at random in the radial direction of a turntable. SOLUTION: Deflection amt. of the turntable 1 at each rotational angular position is previously measured, and an average value obtained by averaging such deflecting amts. at every rotational angular position is stored in a memory 9. At the time of exposure, the average value corresponding to each rotational angular position is subtracted from the measured deflection amt. to output an asynchronous deflection amt. only. By this output value, a position to be irradiated with exposing light is corrected by an adjusting means 13. In this optical original disk exposing constituted in such a manner, the asynchronous deflection irrespective of any rotational angular position of the turntable 1 can be outputted in real time, so that the asynchronous deflection to affect an serious adverse effect upon the accuracy of a track pitch can immediately be grasped during work even in the midst of the exposure, and hence the exposing work can be stopped. Then, by correcting the position to be irradiated with the exposing light, the high precision optical original disk exposing device without being influenced by the asynchronous deflection of the turntable 1 is realized.

4. 发明专利

JPH09161384A OPTICAL DISK MASTER DISK EXPOSURE DEVICE 失效
公开(公告)号：JPH09161384A
公开(公告)日：1997-06-20
申请号：JP32152895
申请日：1995-12-11
申请人： TOSHIBA CORP
发明人： KIKUIRI NOBUTAKA , NISHIDA JUN
IPC分类号： G11B7/08 , G11B7/12 , G11B7/26 , G11B19/02 , G11B19/04
摘要： PROBLEM TO BE SOLVED: To prevent track pitch precision from being deteriorated due to vibration caused by circulation of cooling water of a recording laser light source and the vibration caused when a slider is moved by fixing the slider to a table with vacuum suck. SOLUTION: An adjusting table 9 movable in the direction perpendicular to the movement direction of the slider 5 is provided on the slider 5, and a fine adjusting table 18 movable in the same direction as the moving direction of the slider 5 is provided on the coarse adjusting table 9. An objective lens fine adjusting table 19 capable of moving an objective lens 6 in the direction perpendicular to the movement direction of the slider 5 is connected to the fine adjusting table 18. The coarse adjusting table 9, the fine adjusting table 18 and the objective lens fine adjusting table 19 adjust an irradiation position of exposure light with which an optical disk master disk 2 is irradiated, and air is exhausted from a fixing surface 10 between the slider 5 and the coarse adjusting table 9 through a vacuum piping 11, and the slider 5 is fixed to the fine adjusting table 18 with vacuum suction.

5. 发明专利

JPH05150838A METHOD AND DEVICE FOR CONTROLLING MOBILE TABLE 失效
公开(公告)号：JPH05150838A
公开(公告)日：1993-06-18
申请号：JP31089291
申请日：1991-11-26
申请人： TOSHIBA CORP
发明人： UCHIDA NORIO , NISHIDA JUN
IPC分类号： G05B19/19 , G05D3/12
摘要： PURPOSE:To provide the method and device for mobile table control which quickly control a mobile table by feedback and position it with a high precision. CONSTITUTION:A feedback control loop is provided which controls a mobile table 21 to eliminate a deviation DELTAx=(x0-x) between a target position x0 and a present position (x) of the mobile table. In the controller of this mobile table, an average value of ¦x0-x¦ or (x0-x) in a period DELTAt is obtained at intervals of the certain period DELTAt by a CPU 24, and the gain of an attenuator 26 inserted to the feedback control loop is increased by one rank if the obtained average value is smaller than a preliminarily determined value.

6. 发明专利

JPH04226012A SPACE SETTING METHOD 失效
公开(公告)号：JPH04226012A
公开(公告)日：1992-08-14
申请号：JP10702191
申请日：1991-05-13
申请人： TOSHIBA CORP
发明人： NISHIDA JUN , ISHIBASHI YORIYUKI , HIRANO RYOICHI , NAGATOMO SHIRO
IPC分类号： G03F9/00 , H01L21/027
摘要： PURPOSE:To provide a space setting method which is capable of accurately adjusting the space to a set value without involving collisions between a 1st object (mask) and a 2nd object (wafer). CONSTITUTION:A supplementary spacing sensor 12 which measures the space between a mask 1 and a wafer 2 and is independent of the optical system for space measurement is used and a rough alignment is conducted based on output data from the optical system and the supplementary spacing sensor 12. After that, either the mask 1 or the wafer 2 is moved very slightly, the output from the optical system and the supplementary spacing sensor 12 at that time is stored, straight line regression and other calculations are made, and these calculations are used to move either the mask 1 or the wafer 2 and accurately set the objects at a specified spacing.

7. 发明专利

JPH03229105A METHOD AND DEVICE OF RELATIVE POSITIONING 失效
公开(公告)号：JPH03229105A
公开(公告)日：1991-10-11
申请号：JP2583690
申请日：1990-02-05
申请人： TOSHIBA CORP
发明人： HIRANO RYOICHI , ISHIBASHI YORIYUKI , NISHIDA JUN
IPC分类号： G01B11/00 , G01B11/14 , G02B27/42 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To separate and select detected diffracted interference light independently by providing at least diffraction grating in each couple of mutually opposite areas of two bodies so that light which is projected after traveling through the couple of areas becomes diffracted light having a two-dimensional distribution. CONSTITUTION:A mask 34 is arranged at a specific Z-directional interval with a wafer 33, areas 11, 12, and 13 are prescribed at specific positions of the mask 34, and areas 21, 22, and 23 are prescribed at specific positions of the wafer 33 opposite those areas. Stripped or checked diffraction gratings are arranged in those areas and when the gratings are irradiated with two beams f1 and f2, the diffraction gratings project three diffracted interference light beams IG, IW, and IW having the two-dimensional distribution. The two light beams IW and IM which have specific degrees and are used for positioning are separated and detected independently of other diffracted light beams and detected, and consequently, the mask 34 and wafer 33 can be positioned with high accuracy irrelevantly to their interval.

8. 发明专利

JPH03203220A ALIGNMENT METHOD AND DEVICE 失效
公开(公告)号：JPH03203220A
公开(公告)日：1991-09-04
申请号：JP34435189
申请日：1989-12-28
申请人： TOSHIBA CORP
发明人： NISHIDA JUN , TOUKI TATSUHIKO , KOBAYASHI NOBORU , NAGATOMO SHIRO
IPC分类号： H01L21/30 , H01L21/027
摘要： PURPOSE:To enable alignment time to be reduced by entering coordinate values in a first direction of a first table into a control means by a coordinate measuring means. CONSTITUTION:A laser interferometer 13 for measuring a y-directional coordinate of a (y) table extremely accurately is provided. Further, a laser interferometer laser data read interface 15 which is introduced between the laser interferometer 13 and a HOST CPU 10 is provided. then, the coordinate value of the y table 1 is entered into the HOST CPU 10 from the laser interferometer 13. Thus, at the same time when alignment marks 4 and 5 of y and theta are detected, the y-directional coordinate values of the alignment marks 4 and 5 of y and thetaare read into the HOST CPU 10, thus enabling mark search time to be reduced.

9. 发明专利

JP2005293804A Disk unit 有权
标题翻译：光盘单元
公开(公告)号：JP2005293804A
公开(公告)日：2005-10-20
申请号：JP2004111296
申请日：2004-04-05
申请人： Toshiba Corp , 株式会社東芝
发明人： HOSONO TETSUYA , TODA AKIO , NISHIDA JUN
IPC分类号： G11B21/22 , G11B5/54 , G11B21/02 , G11B21/12
CPC分类号： G11B5/54
摘要： PROBLEM TO BE SOLVED: To provide a disk unit wherein an inertia latch mechanism can efficiently be operated even when a VCM is made thin.
SOLUTION: The inertia latch mechanism includes: a latch arm for latching a head actuator at an retracting position; and an inertia arm 52 supported turnably around a second pivotal axis 54 extended almost perpendicularly to a base and turned around the second pivotal axis when an external force is exerted to the inertia arm to turn the latch arm to a latch position. The voice coil motor (VCM) 16 includes: a lower yoke 41; a top yoke 43; a voice coil 36 fitted to the head actuator and located between the lower yoke and the top yoke; and a permanent magnet provided to at least either of the lower yoke and the top yoke. The top yoke has an arm retaining section 48 extended by being overlapped with the second pivotal axis and a part in the vicinity of the second pivotal axis of the inertia arm so as to restrict the inertia arm from coming off from the second pivotal axis, and the arm retaining section is formed to be integrally extended from the top yoke and have a stepwise shape higher than the top yoke by one step.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种盘单元，其中惯性锁定机构即使当VCM变薄时也能有效地操作。解决方案：惯性锁定机构包括：用于在缩回位置处锁定头致动器的闩锁臂; 以及惯性臂52，其可旋转地围绕第二枢转轴线54延伸，第二枢转轴线54几乎垂直于基部延伸并且当外力施加到惯性臂时转动围绕第二枢转轴线，以将闩锁臂转动到闩锁位置。音圈马达（VCM）16包括：下轭41; 顶轭43; 安装在头部致动器上且位于下轭和顶轭之间的音圈36; 以及设置在下轭和顶轭中的至少一个的永久磁铁。顶部轭具有通过与第二枢转轴线重叠而延伸的臂保持部分48和惯性臂的第二枢转轴线附近的一部分，以便限制惯性臂从第二枢转轴线脱离，并且臂保持部形成为从顶部磁轭一体地延伸，并且具有比顶部磁轭高一级的逐步形状。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005293717A Insulated sheet and disc device equipped with this 审中-公开
标题翻译：绝缘片和与此相关的碟片设备
公开(公告)号：JP2005293717A
公开(公告)日：2005-10-20
申请号：JP2004107343
申请日：2004-03-31
申请人： Toshiba Corp , 株式会社東芝
发明人： IIDA YUKIO , NISHIDA JUN , TODA AKIO , OKAMURA HIROSHI
IPC分类号： G11B33/08 , G11B17/00 , G11B25/04 , G11B33/12 , H05K1/02 , H05K3/28
CPC分类号： G11B33/121 , G11B25/043 , H05K1/0256 , H05K1/0271 , H05K3/284 , H05K2201/2045 , H05K2203/1311
摘要： PROBLEM TO BE SOLVED: To provide an insulated sheet, which efficiently reduces vibration transmitted from a disc device drive part to a PCB while preventing warpage of the PCB, and a disc device equipped with this.
SOLUTION: The disc device has a motor arranged on a bottom wall of a case. A PCB 40 is arranged facing an external surface of the bottom wall, and the insulated sheet 50 is securely held between the external surface of the bottom wall and the PCB. The insulated sheet has a sheet main part 56 formed with an insulator and arranged facing the external surface of the bottom wall, multiple damping members 60a, 60b arranged independently on the sheet main part. The damping members are positioned near the motor, and includes a first damping members in contact with the PCB and a second damping members in contact with electronic parts mounted on the PCB.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种绝缘片，其有效地减少从盘装置驱动部向PCB发出的振动，同时防止PCB的翘曲以及配备有该PCB的盘装置。解决方案：盘装置具有布置在壳体的底壁上的马达。 PCB40被布置成面向底壁的外表面，并且绝缘片50牢固地保持在底壁的外表面和PCB之间。绝缘片具有形成有绝缘体并且面向底壁的外表面布置的片状主体部56，独立地设置在片材主体上的多个阻尼部件60a，60b。阻尼构件位于电动机附近，并且包括与PCB接触的第一阻尼构件和与安装在PCB上的电子部件接触的第二阻尼构件。版权所有（C）2006，JPO＆NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式