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    • 51. 发明专利
    • SEMICONDUCTOR MEMORY DEVICE
    • JPH02112274A
    • 1990-04-24
    • JP26394588
    • 1988-10-21
    • HITACHI LTDHITACHI VLSI ENG
    • KIZAKI TAKESHIMURANAKA MASAYA
    • G11C11/401H01L21/822H01L27/02H01L27/04H01L27/10H01L27/105H01L27/108
    • PURPOSE:To make effective a layout by disposing a substrate back-bias voltage generator circuit at the center of a plurality of memory arrays disposed symmetrically on a semiconductor substrate, and providing a predetermined distance between the substrate back-bias voltage generator circuit and each memory array. CONSTITUTION:In a dynamic type RAM, a substrate back-bias voltage generator circuit VBBG disposed at the center of a semiconductor substrate SUB is separated by an about 600-700mum distance d from memory arrays RARY0, MARY2. The substrate back-bias voltage generator circuit VBBG is disposed at the center of the semiconductor substrate SUB together with a peripheral circuit PC that requires a relatively large layout area in such a manner, so that an insignificant space is eliminated and there can be defined the predetermined distance d enough to ignore the amount of minority carriers injected from the substrate back-bias voltage generator circuit VBBG into a memory cell, between the substrate back-bias voltage generator circuit VBBG and each memory array. Hereby, the layout of a dynamic type RAM is made effective with the low cost of manufacture thereof.