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    • 41. 发明专利
    • METHOD OF PREVENTING THERMAL FATIGUE OF NOZZLE
    • JP2000193200A
    • 2000-07-14
    • JP36894698
    • 1998-12-25
    • HITACHI LTDHITACHI ENGINEERING CONSULTING
    • HIRANO AKIHIKOKOJIMA NAOKIENOMOTO KUNIO
    • G21C15/02F17D3/12G21C17/003
    • PROBLEM TO BE SOLVED: To prevent the generation of thermal fatigue by detecting the high temperature fluid pool on a slightly upstream part of a low temperature fluid side of a mixing point of low temperature fluid and high temperature fluid, and discharging the high temperature fluid pool. SOLUTION: A low temperature fluid circulation piping 2 is connected to a high temperature fluid container 1 through a fluid supply nozzle 3 and a fluid discharge nozzle 4, and a temperature sensor 5 is connected to the inside contacted with an outer periphery, of an upper part of the fluid supply nozzle 3. On this occasion, a high temperature fluid pool is gradually formed on an upper part of the inside of the fluid supply nozzle 3 by the convection current, heat conduction and heat transfer with the lapse of time in a state that an inside of the fluid supply nozzle 3 is filled with the low temperature fluid, and a temperature of this high temperature fluid pool is detected by the temperature sensor 5. A pump rotation controller 7 is automatically operated on the basis of this detection, and a speed of rotation of a circulatin pump 6 is increased at a rise of speed of rotation of pump starting time 11, for discharging the high temperature fluid pool.
    • 42. 发明专利
    • SUBSTRATE CLEANING EQUIPMENT
    • JP2000058495A
    • 2000-02-25
    • JP22407898
    • 1998-08-07
    • HITACHI LTD
    • HIRANO KATSUHIKOENOMOTO KUNIOAMANO KAZUO
    • B08B11/04B08B3/10H01L21/304
    • PROBLEM TO BE SOLVED: To enable a substrate to be kept high in cleanness without causing damage to it by a method wherein a cavitation air bubble holding means that holds cavitation air bubbles near the surface of the substrate until they burst is provided. SOLUTION: When water of high pressure is spouted out from a nozzle 12 against a transfer carrier 2 in a cleaning tank, cavitation air bubbles are generated owing to a pressure difference between surrounding water and spouting water and a shearing action. When a jet of water 21 accompanied by active cavitation flows between substrate 1, it collides against projections 22 provided inside a transfer carrier 2 as cavitation air bubbles. As a result, cavitation air bubbles staying in a jet of water 21 are made to stay around the projections 22 without passing along the surface of the substrate 1. The cavitation air bubbles staying around the projections 22 grow gradually bigger and burst, and foreign objects attached to the surface of the substrate 1 are removed by a burst pressure induced by bursts of cavitation air bubbles. As mentioned above, a cleaning effects is produced.