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    • 1. 发明专利
    • METHOD OF PREVENTING THERMAL FATIGUE OF NOZZLE
    • JP2000193200A
    • 2000-07-14
    • JP36894698
    • 1998-12-25
    • HITACHI LTDHITACHI ENGINEERING CONSULTING
    • HIRANO AKIHIKOKOJIMA NAOKIENOMOTO KUNIO
    • G21C15/02F17D3/12G21C17/003
    • PROBLEM TO BE SOLVED: To prevent the generation of thermal fatigue by detecting the high temperature fluid pool on a slightly upstream part of a low temperature fluid side of a mixing point of low temperature fluid and high temperature fluid, and discharging the high temperature fluid pool. SOLUTION: A low temperature fluid circulation piping 2 is connected to a high temperature fluid container 1 through a fluid supply nozzle 3 and a fluid discharge nozzle 4, and a temperature sensor 5 is connected to the inside contacted with an outer periphery, of an upper part of the fluid supply nozzle 3. On this occasion, a high temperature fluid pool is gradually formed on an upper part of the inside of the fluid supply nozzle 3 by the convection current, heat conduction and heat transfer with the lapse of time in a state that an inside of the fluid supply nozzle 3 is filled with the low temperature fluid, and a temperature of this high temperature fluid pool is detected by the temperature sensor 5. A pump rotation controller 7 is automatically operated on the basis of this detection, and a speed of rotation of a circulatin pump 6 is increased at a rise of speed of rotation of pump starting time 11, for discharging the high temperature fluid pool.
    • 7. 发明专利
    • WASHING DEVICE
    • JPH1119608A
    • 1999-01-26
    • JP17804697
    • 1997-07-03
    • HITACHI LTD
    • HIRANO KATSUHIKOENOMOTO KUNIO
    • G02F1/13B08B3/08B08B3/10H01L21/304
    • PROBLEM TO BE SOLVED: To efficiently remove the foreign matter sticking to member surfaces by injecting high-pressure water in water or water atmosphere to generate cavitation and casting the cavitation air bubbles diffused by a refraction and diffusion plate to wafer surfaces without directly bringing these bubbles colliding to the wafers etc. which are the objects to be washed. SOLUTION: The mechanically polished or chemically polished wafers 401 prior to washing are transferred by a manipulator from storage shelves to a washing tank and are chucked by a polyhedral chuck 402 previously installed in the washing tank. While a table 407 mounted at a chucking device is rotated, the high-pressure water is injected into the water tank from a nozzle 408 for a water jet and is directed toward the cavitation reflection and diffusion plate 403 on the table 407, by which the cavitation air bubbles are generated. The deposits are removed by the microjets or impact waves generated when the cavitation air bubbles diffused on the surfaces of the wafers 401 by the cavitation reflection and diffusion plate 403 collapse at their surfaces and near the surfaces.
    • 9. 发明专利
    • JOINT MADE OF SHAPE MEMORY ALLOY
    • JPH09281278A
    • 1997-10-31
    • JP9504996
    • 1996-04-17
    • HITACHI LTD
    • AMANO KAZUOFUJIMORI HARUOENOMOTO KUNIOSHIGENAKA NAOTOMOCHIZUKI MASATOOTAKA MASAHIROHIRANO KATSUHIKOMASUDA MINORU
    • G21C19/20B21D39/04C22C19/03
    • PROBLEM TO BE SOLVED: To facilitate and rationalize piping replacement work by providing the outside surface of a cylindrical liner with grooves having parts penetrating this cylindrical liner and forming shape memory allay rings and the cylindrical liner to a fit structure. SOLUTION: The shape memory allay rings 1 are manufactured by using shape memory alloys. These allays are made to memorize a shape in such a manner that the diameter thereof is reduced by heating the allays to their austenitic transformation temp. or above. The cylindrical liner 2 to be inserted into the inner side of the shape memory allay rings 1 is provided with two rows of annular projecting parts 3a, 3b in its circumferential direction and the outside surface is provided with the grooves 5 having the parts penetrating the inside of the liner. When the shape memory alloy rings 1 restore the shape to the reduced diameter by inducing the austenitic transformation, the cylindrical liner 2 is deformed and the annular projecting parts 3a, 3b formed on its inside surface bite into a piping, thereby clamping the piping. In such a case, the rigidity of the cylindrical liner 2 is enhanced if the width of the grooves 5 on the outside surface of the cylindrical liner 2 is made small and the number of the grooves is reduced.