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31. 发明专利

JPH10177892A CERAMIC HEATER 失效
公开(公告)号：JPH10177892A
公开(公告)日：1998-06-30
申请号：JP33868596
申请日：1996-12-18
申请人： KYOCERA CORP
发明人： FUKUDA JUN , SAKAMOTO KOJI , NAKAMA HIDENORI , HAMADA EMIKO , MAEDA MASAHITO
IPC分类号： F23Q7/00 , H05B3/42 , H05B3/48
摘要： PROBLEM TO BE SOLVED: To prevent developing cracks in a generated heat resistor and an insulating member when heat is generated from a low temperature to a high temperature and a device is operated continuously in a saturated state for a long time by setting a gap to a specified value or higher, the gap being formed between laminated generated heat resistors formed by bending or in layers via an insulating member having a sodium content set to a specified value or lower. SOLUTION: A ceramic heater is composed by combining an insulating member 3 having a ceramic sintered body, a sodium content of which is set to 1,000ppm or lower, and resistors each made of an inorganic conductive material generating heat by current carrying, and a gap 4 between laminated heat generation resistors 2 formed by bending or in layers via the insulating member 3 is secured to be 0.2mm or higher. Thus, sufficient insulating resistance is provided between the heat generation resistors 2 and, even if the device is operated in a heat saturated condition from a low temperature of 1,000 deg.C to 1,500 deg.C, the developing of cracks in the heat generation resistors 2 and the insulating member 3 caused by reduced insulation is prevented.

32. 发明专利

JPH10137737A TREATING LIQUID HEATING DEVICE OF SUBSTRATE TREATING DEVICE 失效
公开(公告)号：JPH10137737A
公开(公告)日：1998-05-26
申请号：JP31294396
申请日：1996-11-07
申请人： DAINIPPON SCREEN MFG
发明人： NAGARA SHUJI , NAKAGAWA HITOSHI
IPC分类号： H05B3/42 , B01J19/00 , C02F1/02 , H01L21/304 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To provide a treating liquid heating device of a substrate treating device in which the leakage of treating liquid is surely prevented. SOLUTION: A treating liquid heating device 2 is provided with a housing 25 made of stainless steel consisting of a cylindrical sidewall 22, a bottom wall 23 and a flange 24, and a disk-like cover 26 made of stainless steel, just like the housing 25. The peripheral part of the cover 26 and the flange 24 of the housing 25 are gastightly abutted with each other by action of eight sets of screw threads 27 and nuts 30. A heater 28 is attached to the cover 26. The heater 28 has the form of bends in which a pair of base end parts are fixed to the cover 26 with the cover 26 and the housing 25 being abutted so that it may be housed in a gastight chamber formed by the cover 26 and the housing 25.

33. 发明专利

JP2599587B2 失效
公开(公告)号：JP2599587B2
公开(公告)日：1997-04-09
申请号：JP116587
申请日：1987-01-08
IPC分类号： B29C45/22 , B29C45/30 , B29C45/73 , B29C45/78 , H05B3/42

34. 发明专利

JPH08273805A CURRENT APPLICABLE HEATING HONEYCOMB BODY 失效
公开(公告)号：JPH08273805A
公开(公告)日：1996-10-18
申请号：JP7312795
申请日：1995-03-30
申请人： NGK INSULATORS LTD
发明人： KATO YASUSHI , HASHIMOTO SHIGEHARU , WATANABE YOSHINOBU
IPC分类号： B01J35/00 , B01J35/04 , F01N3/20 , F01N3/28 , H05B3/12 , H05B3/42
摘要： PURPOSE: To lower the stress generated by electric current concentration and prevent cell rupture of a honeycomb body. CONSTITUTION: A current applicable heating honeycomb body 10 has a large number of through holes 12 partitioned by diaphragms 11 made of a conductive material and practically parallel to the gas flowing direction and has both end faces in a gas flowing inlet side and a gas flowing outlet side. Heat generation of the honeycomb body is controlled by controlling the flow of the electric current at the time when electricity is applied to the honeycomb body. The cell structure composed of the through holes 12 near the electricity concentrating part (the peripheral part) 15 in the honeycomb body 10 and the diaphragms 11 is so formed as to lower the stress generated following the electric current concentration.

35. 发明专利

JPH08222358A PROCESSING METHOD FOR PLASTIC HEATING ELEMENT 失效
公开(公告)号：JPH08222358A
公开(公告)日：1996-08-30
申请号：JP2926895
申请日：1995-02-17
申请人： TOYO INK MFG CO
发明人： YOSHIOKA JUNICHI , MIYASHITA SUSUMU , SAKUMA KANA
IPC分类号： H05B6/80 , H05B3/14 , H05B3/42
摘要： PURPOSE: To perform bending process with a plastic heating element in a short time without causing damage to the heating element. CONSTITUTION: This rod-shaped plastic heating element, having at least an inner-layer conductive portion and an outer-layer cover portion, is softened by induction heating with microwaves, is then inserted into a mold, cooled, and molded into a certain shape.

36. 发明专利

JP2511301B2 失效
公开(公告)号：JP2511301B2
公开(公告)日：1996-06-26
申请号：JP32623788
申请日：1988-12-26
申请人： TOSHIBA CERAMICS CO
发明人： NOZAWA TATSUO , MEGURO KAZUNORI , KITAZAWA ATSUO
IPC分类号： H05B3/14 , H05B3/42

37. 发明专利

JP2506265B2 失效
公开(公告)号：JP2506265B2
公开(公告)日：1996-06-12
申请号：JP24425093
申请日：1993-09-30
申请人： HUSKY INJECTION MOLDING
发明人： HAARARUTO SHUMITSUTO
IPC分类号： B22D17/20 , B29C45/00 , B29C45/17 , B29C45/20 , B29C45/26 , B29C45/73 , B29C45/74 , H05B3/42

38. 发明专利

JPH0878142A CERAMIC HEATER 失效
公开(公告)号：JPH0878142A
公开(公告)日：1996-03-22
申请号：JP20716094
申请日：1994-08-31
申请人： KYOCERA CORP
发明人： HASHIMOTO KATSUTO
IPC分类号： H05B3/14 , H05B3/42
摘要： PURPOSE: To provide a ceramic heater which can be uniformly heated over a long term without thermal deformation by providing a zigzag or spiral ring body consisting of a ceramic having a specified volume natural resistance value, and forming both the ends into electrode taking parts. CONSTITUTION: A heater 1 has electrode parts 5 on both ends of a zigzag or spiral ring body 1 consisting of conductive ceramic. The ring body 2 is cylindrical as the whole, and has a slit 3 in the axial direction and grooves 4 alternately extended from both the end surfaces. When a voltage is applied between both the electrode parts 5, a current is carried to the conductive ceramic ring body 2 itself to heat it. As the conductive ceramic forming the ring body 2, a one having a volume natural resistance value of 10 -10cm is used in order to efficiently heat it. When glass 23 is sealed by use of this heater 1, the deformation by heat cycle is eliminated because the ring body 2 is formed of ceramics, and the resistance value of the heater 1 can be regulated by changing the number of grooves 4 or the width of the heating part.

39. 发明专利

JPH0798120A CERAMIC HEATING ELEMENT AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH0798120A
公开(公告)日：1995-04-11
申请号：JP24301493
申请日：1993-09-29
申请人： NIPPON DENSO CO
发明人： KURANO ATSUSHI , ANDO IKUYA
IPC分类号： F23Q7/00 , H05B3/14 , H05B3/42
摘要： PURPOSE:To provide the manufacturing method for a ceramic heating element with a heating part containing a condutive ceramic material which can avoid the increase of consumption power or trouble due to the addition of circuits, and a ceramic heating element which can prevent a leak from occurrence. CONSTITUTION:A ceramic heating element is rotated around the axial center, and is ground by a bit tool grinder by a grinding quantity in response to a measured electric resistance of a heating part 2 to adjust the electric resistance of the heating unit 2. A pair of column parts 23, 24 of the heating part 2 are formed to be in parallel with the axial center and a rotary symmetry with the axial center as a pivot, and therefore, the outer surface is uniformly ground at respective parts in the axial direction or diametric direction, and the resistance value for each part of the heating part 2 can be uniformly increased. For the ceramic heating element, a creeping leak distance between a supporting part 3 and the heating part 2 is made to be not less than 2mm when the resistance value of the heating part 2 is not more than 2 ohms.

40. 发明专利

JPH06236794A HEATING PIPE INDUSTRIAL FURNACE, INDUSTRIAL FURNACE AND HEATING OF FURNACE 失效
公开(公告)号：JPH06236794A
公开(公告)日：1994-08-23
申请号：JP6149093
申请日：1993-02-10
申请人： RIITOHANMERU GMBH & CO KG
发明人： HENINGU RIHITERU
IPC分类号： F27D7/02 , F27D11/02 , H05B3/14 , H05B3/42 , H05B3/64
摘要： PURPOSE: To operate an industrial furnace of a long time by a method wherein in a porous ceramic heating tube to electrically heat the industrial furnace, at least an adapter for connection of an inert gas supply device is provided at its end, and the inert gas flow supplied through it is let flow out exclusively through a periphery of the heating tube. CONSTITUTION: A heating tube 10 covered by an outer box 12 is composed of silicon carbide with a porosity of 15%. An adapter 14 is then fitted airtightly to its one end 10a while a cross section smaller than the heating tube 10 is being kept on it. A cover 16 is fitted to an opposite end 10b to make inside of the heating tube 10 airtight. Hereby, the inactive gas supplied through the adapter 14 is let flow exclusively through the periphery of the heating tube 10 into an industrial purpose electric furnace. As a result, an effective life time can be maintained even if its has extremely oxidizing property or extremely reducing property.

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