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    • 1. 发明专利
    • CERAMIC HEATER
    • JPH10335049A
    • 1998-12-18
    • JP13893097
    • 1997-05-28
    • KYOCERA CORP
    • HAMADA EMIKOFUKUDA JUNSAKAMOTO KOJINAKAMA HIDENORI
    • H05B3/02H05B3/03H05B3/14
    • PROBLEM TO BE SOLVED: To provide a ceramic heater, which has high strength in a bonding part and which has an excellent heat resistant impulse, high temperature stability and a temperature rising characteristic, by electrically connecting an electrode leading-out metal plate to an electrode leading-out part of a ceramic heater through a metal layer formed of a noble metal, which contains the active metal adhered at a specified bonding area. SOLUTION: A heating unit 2 formed of an inorganic conductive material such as W, TiN, which generates the heat with electrification, is embedded in an insulating member 3 formed of a non-oxide group ceramic sintered body such as SiN and BN so as to obtain a ceramic heater 4. An electrode leading- out metal plate 8 is electrically connected to an electrode leading-out part 5, which is led out to one end of the ceramic heater 4, through a pad part 7 formed of a metal layer 6, and a lead wire 9 is bonded to the metal plate 8 so as to obtain a ceramic heater 1. The metal layer 6 is made of a noble metal, which is mainly composed of Au including V, Ti or the like at 1-10%. As the electrode leading-out metal plate 8, a Fe-Ni alloy plate is desirable, and bonding area is set at 20-80% in relation to the pad part 7 so as to prevent the concentration of the thermal stress.
    • 2. 发明专利
    • CERAMIC HEATER
    • JPH10177892A
    • 1998-06-30
    • JP33868596
    • 1996-12-18
    • KYOCERA CORP
    • FUKUDA JUNSAKAMOTO KOJINAKAMA HIDENORIHAMADA EMIKOMAEDA MASAHITO
    • F23Q7/00H05B3/42H05B3/48
    • PROBLEM TO BE SOLVED: To prevent developing cracks in a generated heat resistor and an insulating member when heat is generated from a low temperature to a high temperature and a device is operated continuously in a saturated state for a long time by setting a gap to a specified value or higher, the gap being formed between laminated generated heat resistors formed by bending or in layers via an insulating member having a sodium content set to a specified value or lower. SOLUTION: A ceramic heater is composed by combining an insulating member 3 having a ceramic sintered body, a sodium content of which is set to 1,000ppm or lower, and resistors each made of an inorganic conductive material generating heat by current carrying, and a gap 4 between laminated heat generation resistors 2 formed by bending or in layers via the insulating member 3 is secured to be 0.2mm or higher. Thus, sufficient insulating resistance is provided between the heat generation resistors 2 and, even if the device is operated in a heat saturated condition from a low temperature of 1,000 deg.C to 1,500 deg.C, the developing of cracks in the heat generation resistors 2 and the insulating member 3 caused by reduced insulation is prevented.