会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 31. 发明专利
    • SUCTION AND EXHAUST PUMP
    • JP2001153050A
    • 2001-06-05
    • JP33232499
    • 1999-11-24
    • METEKU KK
    • TSUJI TAKESHI
    • A61M1/14F04B9/02F04B23/06F04B43/06F04B53/00F04B53/02F04B53/08F04B53/14
    • PROBLEM TO BE SOLVED: To provide a suction and exhaust pump to accurately and continuously measure an amount of removed water by composing a mechanical structure having no sliding abrasion part by interposing an airtight film, without requiring a suction and exhaust valve. SOLUTION: Cylinders 2, 2 having the same capacity are horizontally placed face to face on the right and left sides of a driving part 1, a rotation shaft 30 rotated clockwise and counterclockwise by a motor PM is extended in the driving part and ball screws 27, 27 are formed on the right and left extended part of the rotation shaft 30, ball nuts 32, 32 which follow the right and left ball screws of the rotation shaft are fixedly provided through a bearing 28 in the insertion holes at the centers of a pair of pistons 31, 31 relatively moving in the right and left cylinders, the bottom part of a cylindrical diaphragm D covering each piston 31 is fixed to the head part of the piston 31 and its peripheral ends are fixed to the sides of cylinders 2, 2 with its peripheral parts folded back in order to form right and left measuring compartments 42, 42 having the same capacity, and suction and exhaust is alternatively carried out at a designated quantity from the suction and exhaust hole 43 of each measuring compartment 42.
    • 33. 发明专利
    • LIQUID MATERIAL FLOW CONTROL PUMP
    • JPH11159474A
    • 1999-06-15
    • JP34418297
    • 1997-11-28
    • JAPAN PIONICS
    • TAKAMATSU YUKICHIYONEYAMA GAKUOISHIHAMA YOSHIYASU
    • F04B53/02F04B13/00F04B53/14
    • PROBLEM TO BE SOLVED: To prevent contamination of a liquid material by outside air by arranging a gas seal part in a slidingly movable part of a piston to suck in/deliver the liquid material by sliding motion, flowing inert gas here, and enclosing a suction valve and a delivery valve in piping joints welded to a casing. SOLUTION: Inert gas such as nitrogen, argon and helium is passed into this gas seal chamber 7 from an inert gas supply port 8 by defining the gas seal chamber 7 by a gas seal wall 6 between packing 5 and a driving part 4 of a piston 3 fitted/installed in a cylinder 2 formed in a casing 1 of a flow control pump to supply a semiconductor manufacturing liquid material. A suction valve 11 and a delivery valve 12 are enclosed in respective ones by welding suction side and delivery side respective piping joints 9 and 10 to upper and lower parts of the casing. The liquid material is sucked in/delivered according to sliding motion of the piston 3, but in this case, the delivery valve 12 is set to as to be actuated by a pressure difference of about 1 to 100 kg/cm by a spring, etc.
    • 35. 发明专利
    • FIXED DISPLACEMENT PUMP
    • JPH10159750A
    • 1998-06-16
    • JP31442096
    • 1996-11-26
    • JEOL LTD
    • KUDO SATORU
    • G01F11/06F04B53/02G01N30/32
    • PROBLEM TO BE SOLVED: To remove bubbles generated in chamber space having a seal material, and prevent a flowrate loss by forming a liquid delivery flow passage near the chamber space coming to a vertical upper position, when the seal material is used, regarding the case where a plunger for sucking and delivering liquid is sealed with a self-sealing type material. SOLUTION: A plunger 1 is made to give a reciprocating motion, thereby opening an intake valve 2 and then mucking liquid from a vertical lower level. Then, the liquid is delivered to a vertical upper position by pushing a delivery valve 3 open. Liquid in the area where the plunger 1 is laid, is sealed with a self-sealing material 4. Regarding a fixed displacement pump so formed, the delivery valve 3 is communicated to the chamber space coming to the vertical upper position during the use of the seal material 4 via an approximately L-shaped flow passage 6. As a result, bubbles, even when generated in the chamber space at a position A, due to the plunger 1 pushed left at a delivery stroke, are forced out from the flow passage 6 to the delivery valve 3, thereby preventing the occurrence of a flowrate loss.
    • 36. 发明专利
    • PLUNGER PUMP
    • JPH09264263A
    • 1997-10-07
    • JP9585396
    • 1996-03-27
    • MARUYAMA MFG CO
    • TAKAHASHI EIJI
    • F04B53/16F04B53/02F15B20/00
    • PROBLEM TO BE SOLVED: To know a replacement time of a ring type high pressure seal in a very high pressure plunger pump without disassembling a manifold and or a seal case. SOLUTION: A plurality of ring type high pressure seals 58 are arranged in the axial direction, and their inner circumference sides are brought into slide contact with the circumference part of a plunger 48. A compression coil spring 64 presses the high pressure seals 58 toward a spacer 56 via a seal presser 60. A needle 82 is passed through the inside of a seal case 34 freely displaceably in the moving direction of the seal presser 60, and the tip of a needle part 83 is brought into contact with a flange part 86 in the seal presser 60. According to progress of abrasion in the ring type high pressure seals 58, the seal presser 60 pushes the needle 82 away, and the flange part 84 is pushed out from a crank case 16 side end face, so that a replacement time for the ring type high pressure seals 58 can be known from the quantity of the pushed out flange part 84.