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31. 发明专利

JPH11273117A Method and device for adjusting optical axis of light beam, exposure method and device 失效
标题翻译：用于调整光束光轴的方法和装置，曝光方法和装置
公开(公告)号：JPH11273117A
公开(公告)日：1999-10-08
申请号：JP7534798
申请日：1998-03-24
申请人： Sony Corp , ソニー株式会社
发明人： MASUHARA SHIN , AKI YUICHI , HAGA MOTOHISA
IPC分类号： G11B7/125
摘要： PROBLEM TO BE SOLVED: To easily adjust an optical axis with required precision by at least either modulating an incident light beam with a modulation means or deflecting it with a deflection means, supplying an optical axis adjustment signal to the modulation means and/or the deflection means when a prescribed emission light beam is obtained and adjusting the optical axis of the emission light beam. SOLUTION: The light quantities added to a groove recording laser beam (channel A) and the recording laser beam corresponding to wobbling (channel B) are set to be nearly equal by a beam splitter 4, and a bit of a length according to an electric recording signal is formed. The laser beams modulated and optical axis-adjusted by respective modulators 9, 10 are joined again through prescribed optical elements by a polarizing beam splitter 18. The laser beam propagating through the channel B is by 100% reflected, and the laser beam propagating through the channel A is by 100% transmitted to be made incident on a beam expander.
摘要翻译：要解决的问题：为了通过至少用调制装置调制入射光束或用偏转装置偏转来容易地以所需精度调整光轴，向调制装置和/或偏转提供光轴调节信号意味着获得规定的发射光束并调节发射光束的光轴。解决方案：添加到凹槽记录激光束（通道A）中的光量和对应于摆动（通道B）的记录激光束）被设置为几乎相等于分束器4，并且根据电形成记录信号。由各调制器9,10调制和光轴调整的激光束通过偏振分束器18再次通过规定的光学元件连接。通过通道B传播的激光束被反射100％，激光束传播通过通道A被100％传输以便入射到扩束器上。

32. 发明专利

JP2003248324A DEVICE AND METHOD FOR ELECTRON BEAM IRRADIATION 审中-公开
公开(公告)号：JP2003248324A
公开(公告)日：2003-09-05
申请号：JP2002050146
申请日：2002-02-26
申请人： SONY CORP , JEOL LTD
发明人： MIURA YOSHIHISA , AKI YUICHI , KAWASE HIROSHI , YAMAMOTO MASANOBU , DATE NAOKI , NORIOKA SETSUO , KOIZUMI MITSURU , KOMATSUBARA TAKAO
IPC分类号： G21K5/00 , A61N5/00 , G03F7/20 , G11B7/26 , G11B9/10 , G21G5/00 , G21K5/04 , H01J33/02 , H01J37/18 , H01J37/20 , H01J37/301 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To maintain the inner side of a vacuum chamber at a necessary degree of vacuum of a partial vacuum type electron beam irradiation device even when an electrostatic pressure floating pad is separated from a body to be irradiated (original disk). SOLUTION: The air is prevented from flowing in the vacuum chamber 14 by arranging a vacuum seal valve 30 composed of a piston opening and closing an electron beam path 19 in the electrostatic pressure floating pad 18 and closing the electron beam path 19 by placing the vacuum seal valve 30 in operation when the electrostatic pressure floating pad 18 is separated from the body 1 to be irradiated. In this structure, the vacuum seal valve 30 is sectioned in a round shape and formed tapered to realize high vacuum sealing without any gap, thereby securely maintaining the degree of vacuum in the vacuum chamber and an electron beam column. COPYRIGHT: (C)2003,JPO

33. 发明专利

JP2002260293A CENTERING METHOD AND DEVICE OF DISK 失效
公开(公告)号：JP2002260293A
公开(公告)日：2002-09-13
申请号：JP2001054738
申请日：2001-02-28
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： G11B17/022 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To carry out centering easily and with high precision to set the center of a disk 1 to the center of revolution of a turn table 5. SOLUTION: In a centering device, a disk 1 is placed on a turn table 5 supported by a linear guide mechanism, and the turn table 5 moves straight until the disk 1 hits the pieces on its periphery to set the center of the disk 1 to the center of the revolution of the turn table 5. In this invention, two pieces 22a, 22b are provided at two positions with spacing smaller than the diameter of the disk 1. The disk 1 hitting one of the pieces first on its periphery then the other, its position is corrected to accomplish accurate centering.

34. 发明专利

JPH11288531A DISK ORIGINAL PLATE PREPARING DEVICE 失效
公开(公告)号：JPH11288531A
公开(公告)日：1999-10-19
申请号：JP8760098
申请日：1998-03-31
申请人： SONY CORP
发明人： AKI YUICHI , YAJIMA TAKASHI , YAMATSU HISAYUKI , MASUHARA SHIN
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To cut a highly precise and dense pit pattern, etc., to a disk original plate by electron beams. SOLUTION: This device is provided with a detecting part 16 detecting the forming state of a pit pattern with respect to a disk original plate and a detected value detected by this part 16 and a reference value are compared with each other by a control part 15. The part 15 supplies a control signal based on a difference amount between the detected value and the reference value for an electron beam emitting means 14 to drive the beam deflection electrode 39. The electron beams are deflect-operated in the direction of correcting the difference amount.

35. 发明专利

JPH11288529A ELECTRON BEAM PLOTTING DEVICE 失效
公开(公告)号：JPH11288529A
公开(公告)日：1999-10-19
申请号：JP8737298
申请日：1998-03-31
申请人： SONY CORP
发明人： TAKEDA MINORU , AKI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a small-sized and simply constituted electron beam plotting device improving productivity by arranging an electron gun and an objective lens converging an electron beam emitted from the electron gun and irradiating it on a resist layer in the environment decompressed than the air and providing the part made a helium atmosphere between the objective lens and a substrate. SOLUTION: The electron beam emitted from the electron gun 11 is converged by a condenser lens 12 being an electrostatic lens to arrive at an aperture 14 through an electron beam modulation means 13. The electron beam transmittied through the aperture 14 is moved to an electron beam convergent part 20 in the state that a beam size is converged. A first area 2a housing an electron beam generation part 10 and an electron beam convergent part 20 in an electrooptical lens barrel 2 is made a high vacuum state of 10 Pa or below, and a second area 2b of an end part of a side opposite to the substrate 50 is made the helium atmosphere of 1-900 Pa, and the pressure difference of the air with the first area 2a made the high vacuum state is relaxed.

36. 发明专利

JPH09153233A OPTICAL DISK RECORDING DEVICE 失效
公开(公告)号：JPH09153233A
公开(公告)日：1997-06-10
申请号：JP31334095
申请日：1995-11-30
申请人： SONY CORP
发明人： KATSURAMOTO SHINJI , TAKEDA MINORU , AKI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To record signals by using an ultraviolet laser beam without deterioration of the signal quality by removing scattering particles generated from an optical disk at the time of forming signal grooves on the optical disk by using a blow-off nozzle. SOLUTION: A gas pressurized by a gas pressure source 41 is led to a valve 43 through a conduit tube 42. The valve regulates a flow rate of the gas. The blow-off strength of the gas onto the optical disk 8 is thus controlled. The flow rate regulated gas is led to a blow-off nozzle 45 through a conduit tube 44, and is blown off from the tip of the nozzle 45 onto the position where a pit is to be formed on the disk 8. The nozzle 45 is arranged so that it always maintains a fixed positional relationship to an objective 6 and the optical disk 8 and also the gas blown out of the nozzle flows approximately in a fixed direction. Thus, articles scattered from the optical disk 8 associated with pit forming can be removed.

37. 发明专利

JPH0836766A EXPOSURE OPTICAL APPARATUS 失效
公开(公告)号：JPH0836766A
公开(公告)日：1996-02-06
申请号：JP17220894
申请日：1994-07-25
申请人： SONY CORP
发明人： NAGANO REIKI , AKI YUICHI
IPC分类号： G11B7/08 , G11B7/09 , G11B7/135
摘要： PURPOSE:To accurately, stably regulate the optical axis with a sufficient light quantity by providing an optical axis regulating optical system for detecting the position of the optical axis of a liminous flux guided out of an optical path to be incident by a luminous flux guiding optical element. CONSTITUTION:When a totally reflecting mirror 13 for reflecting all light are disposed in the optical path 3 of the exposure optical system 17, all the emitted light of a laser light source 1 can be directed to the system 17, and a sufficient quantity of monitor light can be directed to a light receiving element to be an optical axis monitor. Accordingly, in the case of measuring the monitor output, a signal having a high S/N ratio is obtained from the receiving element, its minimum resolution is improved, and an accurate measurement is performed. The installing position of the optical element is suitably selected without altering the disposition of the system to extract a luminous flux from a different position on the path. Thus, if a malfunction occurs in the system, whether the cause of the malfunction is due to the laser light source itself or the element component of the system, can be easily judged.

38. 发明专利

JPH0751973A FRICTIONAL DRIVE MECHANISM 失效
公开(公告)号：JPH0751973A
公开(公告)日：1995-02-28
申请号：JP21902693
申请日：1993-08-10
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： B23Q5/38 , F16H19/02
摘要： PURPOSE:To reduce the size of a roller and to reduce a feed amount of a driven bar to rotation of a drive roller by providing the drive roller with a suppression force means to suppress deformation of the drive roller. CONSTITUTION:When a drive roller 9 is rotated by driving a rotation drive means 6, bending of the drive roller 9 is suppressed by a suppression force means 14. As a result, a linear state is maintained and thus, no breakage occurs to the drive roller 9, and a power is transmitted to a driven bar 3 without a slip. This constitution executes determined linear movement by means of the driven bar 3. Thus, even when the size of the drive roller 9 is small, a power is reliably transmitted to the driven bar 3 by the drive roller and the diameter of the drive roller 9 is reduced and a feed amount per one full rotation is reduced. As a result, precision of a feed speed at a very low speed and precision of superprecise positioning operation are extremely improved.

39. 发明专利

JP2003249188A ELECTRON BEAM IRRADIATION EQUIPMENT AND ELECTRON BEAM IRRADIATION METHOD 审中-公开
公开(公告)号：JP2003249188A
公开(公告)日：2003-09-05
申请号：JP2002049258
申请日：2002-02-26
申请人： JEOL LTD , SONY CORP
发明人： NORIOKA SETSUO , MIYOKAWA TOSHIAKI , DATE NAOKI , SASAKI JUN , AKI YUICHI , MIURA YOSHIHISA
IPC分类号： G21K5/04 , A61N5/00 , G01N23/00 , G01Q30/02 , G01Q30/20 , G01T1/29 , G11B7/004 , G11B7/09 , G11B7/26 , G21G5/00 , H01J37/04 , H01J37/18 , H01J37/20 , H01J37/21 , H01J37/252 , H01J37/304 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To realize highly precise recording by easily and correctly focusing electron beam corresponding to an original recording 1 in an electron beam irradiating equipment which records data with irradiation of the electron beam to the original recording 1. SOLUTION: A focusing stage 30, which is positioned alongside the original recording 1 and is equipped with a knife edge 134 and a Faraday cup 131, is arranged on a slide table 6 of a supporting mechanism 2 which supports the original recording 1. When recording, the electron beam first irradiates the focusing stage 30 for focusing, then the original recording 1 for recording. COPYRIGHT: (C)2003,JPO

40. 发明专利

JP2002222749A METHOD AND DEVICE FOR ELECTRON BEAM IRRADIATION 失效
公开(公告)号：JP2002222749A
公开(公告)日：2002-08-09
申请号：JP2001014876
申请日：2001-01-23
申请人： SONY CORP
发明人： AKI YUICHI , YAMAMOTO MASANOBU
IPC分类号： G01N23/225 , G03F7/20 , G03F9/02 , G11B7/26 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a method and device for electron beam irradiation by which stable electron bream irradiation can be performed by effectively avoiding the scattering of an electron beam and, in addition, eliminating the need of a large-scale vacuum chamber. SOLUTION: A support 4 which supports an object 3 to be irradiate with the electron beam and a head section 6 having an electron beam emitting hole 5 at its front end are provided with a differential static pressure floating means 22. The floating beams 22 is floated from the object 3 by a desired prescribed clearance and, at the same time, constitutes a non-contact vacuum sealed section which limitedly forms a vacuum space in an electron beam passage section between the emitting hole 5 and the object 3. The electron beam passage is stabilized by constituting the passage of an extending and contracting mechanism which extends and contracts in the axial direction of a cylindrical wall section, and making the degree of vacuum in the passage to be able to be increased more by making the clearance between the vicinity of the emitting hole 5 and the object 3 accurately settable to a narrow clearance.

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