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31. 发明专利

JP2002275627A ELEMENT FOR ELECTRONIC PARTS, ELECTRONIC PARTS AND METHOD FOR MANUFACTURING THESE 失效
公开(公告)号：JP2002275627A
公开(公告)日：2002-09-25
申请号：JP2001069955
申请日：2001-03-13
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： HATTORI TAKAMICHI , MATSUI ATSUSHI , YAMASHITA KIYOHARU , TAKEYAMA SUSUMU , FURUKAWA MITSUHIRO
IPC分类号： C23C14/34 , H03H3/08 , H03H9/145
摘要： PROBLEM TO BE SOLVED: To solve such problems that it is conventionally difficult to control a thin film with uniform distribution of the film thickness because a region for plasma generation and changes in the plasma state are required to be synchronously controlled and that, even when the film is made into uniform thickness in the thin film forming process, the distribution of the effective film thickness becomes uneven through succeeding processes. SOLUTION: A thin film 2 is formed all over one principal plane of a substrate 1 to have such distribution of the film thickness that the film is thin in the center part of the substrate 1 and is thick in the peripheral part. Thereby, influences on the distribution of the film thickness in the succeeding processes can be compensated, and finally, uniform distribution of the effective film thickness, uniform line width and uniform electric characteristics are obtained.

32. 发明专利

JP2002246288A METHOD OF MANUFACTURING ELECTRONIC COMPONENT AND ALIGNER FOR USED IN THIS 失效
公开(公告)号：JP2002246288A
公开(公告)日：2002-08-30
申请号：JP2001039829
申请日：2001-02-16
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： HATTORI TAKAMICHI , MATSUI ATSUSHI , TAKEYAMA SUSUMU , YAMASHITA KIYOHARU , FURUKAWA MITSUHIRO
IPC分类号： G03F7/30 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an aligner for solving the problem that the accuracy of a transfer of a circuit patter is enhanced in a method of dipping a material to be treated into a developing solution like conventional methods, but the developing solution is needed in large quantities and the method lacks in the mass productivity of the material to be treated. SOLUTION: An aligner is constituted in such a structure that a developing solution is fed to the main surface on one side of the main surfaces of a material to be treated to turn the material to be treated paddled and the material to be treated is intermittingly rotated as the material to be treated keeps paddled.

33. 发明专利

JPH10126185A MANUFACTURE OF VIBRATOR 失效
公开(公告)号：JPH10126185A
公开(公告)日：1998-05-15
申请号：JP28049996
申请日：1996-10-23
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： YAGI YUJI , OISHI JUNJI , FURUKAWA MITSUHIRO
IPC分类号： H03H9/19 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To simplify the positioning of electrodes and to improve the reliability in the forming process of exciting electrodes of the vibrator used for various electric devices. SOLUTION: A recessed part 1c is formed around each vibrating part 1a of a diaphragm 1, projections 2b each having the same shape as each recessed part 1c are provided to a mask 2 for forming a pattern of exciting electrodes and they are fitted respectively together to position a mask pattern 2a of the exciting electrodes is positioned to a regular position of the vibration parts 1a. Since the patterns are positioned only with fitting of the recessed parts and the projections, positioning work is simplified, generation of dust during the work is prevented, and the yield is improved.

34. 发明专利

JPH0918280A OSCILLATOR AND ITS PRODUCTION 失效
公开(公告)号：JPH0918280A
公开(公告)日：1997-01-17
申请号：JP16847895
申请日：1995-07-04
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： HIGASHIYA HIDEKI , KURAMASU KEIZABURO , FURUKAWA MITSUHIRO , SAKAGUCHI SEIICHIRO
IPC分类号： H03H9/19 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To prevent the surface oxidation in the heat treatment by providing a TiN layer under an Au layer to constitute an electrode for excitation. SOLUTION: Electrodes 8 and 9 for excitation are constituted in laminated film structures of Au layers 8a and 9a and TiN layers 8b and 9b. Specific resistances of electrodes 8 and 9 are reduced by annealing to prevent the degradation of the Ci value. Nitrogen is introduced during vapor-deposition of Ti and the Ti rate and the degree of vacuum are controlled to easily obtain TiN layers 8b and 9b provided as contact layers to an oscillation part 7. TiN layers 8b and 9b are provided in this manner to improve the degree of contact with upper Au layers 8a and 9a, and electrodes 8 and 9 superior in environmental resistance are formed. Oxidation of surfaces of electrodes for excitation in annealing is suppressed because TiN is more hardly diffused in Au than Cr, and as the result, projections are not generated on surfaces of electrodes for excitation after heat treatment, and the degradation in oscillation characteristic or the oscillator is prevented.

35. 发明专利

JPH07226546A MAGNETIC RESISTANCE ELEMENT AND ITS MANUFACTURE 失效
公开(公告)号：JPH07226546A
公开(公告)日：1995-08-22
申请号：JP1517294
申请日：1994-02-09
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FURUKAWA MITSUHIRO , TAKEUCHI HIROSHI , HATTORI TAKAMICHI , MORISUGI KAZUJI , KURAMASU KEIZABURO , YAMASHITA KIYOHARU
IPC分类号： G01D5/245 , G01R33/09 , G11B5/39 , H01F41/34 , H01L43/08 , H01L43/12
摘要： PURPOSE:To provide a magnetic resistance element excellent in performance by making the electric resistance values of detection elements equal, and the manufacturing method of the magnetic resistance element. CONSTITUTION:Slender elements 12a, 12b, 12c, 12d are composed of magnetic resistance material having a constant width. A plurality of them are arranged in parallel at specific intervals, and connected in zigzag, thus forming a plurality of detection elements 11a, 11b, 11c, 11d. By connecting the elements, drawing- around electrodes 14a, 14b, 14c, 14d composed of the same material as the elements which constitute a bridge circuit are formed. Intervals 15b, 15c, 15d between the neighboring detection elements 11a, 11b, 11c, 11d are made equal. Intervals 15a, 15b between the outermost detection elements 11a, 11d and the adjacent parallel drawing-out electrodes 14a, 14d are all made equal to the intervals 15b, 15c, 15d.

36. 发明专利

JP2002094353A SAW DEVICE AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JP2002094353A
公开(公告)日：2002-03-29
申请号：JP2000279671
申请日：2000-09-14
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FURUKAWA MITSUHIRO , TAKAHASHI MOTOKO , KUROTAKE HIROYUKI , YAMACHIKA SATORU , YAMASHITA KIYOHARU , KOGA TAKAFUMI , MATSUO SATOSHI
IPC分类号： H03H9/145 , H03H3/08 , H03H3/10
摘要： PROBLEM TO BE SOLVED: To provide a SAW device that can shift the center frequency of a pass band toward a lower frequency, even when the SAW device adopts an IDT electrode of any configuration. SOLUTION: The SAW device is provided with a piezoelectric substrate 10 and an IDT electrode 11, made of aluminum as the major component placed on the piezoelectric substrate 10, and the IDT electrode 10 has an aluminum chemical compound layer (except Al2O3 single layer), whose mass per one mole is greater than that of a substance of the IDT electrode 11.

37. 发明专利

JP2001168671A SURFACE ACOUSTIC WAVE DEVICE AND ITS MANUFACTURE 失效
公开(公告)号：JP2001168671A
公开(公告)日：2001-06-22
申请号：JP34713099
申请日：1999-12-07
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FURUKAWA MITSUHIRO , TAKAYAMA RYOICHI , MURASHIMA YUJI
IPC分类号： H03H9/145 , H03H3/08
摘要： PROBLEM TO BE SOLVED: To provide a surface acoustic wave device in which an IDT electrode and an insulation film are firmly adhered to prevent the peeling off of the insulation film at film preparation and which has high reliability in the case of forming the insulation film on the surface acoustic wave device to improve temperature characteristics or to protect the device, and to provide its manufacturing method. SOLUTION: In this surface acoustic wave device provided with an IDT electrodes 2 performing conversion between an electric signal formed on a piezoelectric substrate 1 in an interdigital manner and a surface acoustic wave and the insulation film 7 formed on the propagation paths of the surface acoustic wave of the electrodes 2 and the substrate 1, the film 7 formed on the side face of the electrodes 2 is firmly adhered to the electrodes 2 by making the cross section of the electrodes 2 trapezoidal where the lower face side is wider than the upper face side, and a surface acoustic wave device having high reliability is obtained.

38. 发明专利

JPH09102727A VIBRATOR AND ITS PRODUCTION 失效
公开(公告)号：JPH09102727A
公开(公告)日：1997-04-15
申请号：JP25845195
申请日：1995-10-05
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FURUKAWA MITSUHIRO , HIGASHIYA HIDEKI , SAKAGUCHI SEIICHIRO , TSURU ZENICHI , KURAMASU KEIZABURO
IPC分类号： H01L41/09 , H01L41/22 , H03H3/02 , H03H9/13 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To prevent deterioration of the vibration characteristic and increase of the Ci value by adding the specific Au diffusion prevention layers and the crystal adhesion layers to the vibration electrodes respectively. SOLUTION: The excitation electrodes 8 and 9 of a vibration part 7 include the TiN layers 8c and 9c under the Au layers 8a and 9a to serve as the Au diffusion prevention and adhesion layers and furthermore the TiO layers 8d and 9d under the layers 8c and 9c to serve as the adhesion layers to the crystal. In such a constitution, the oxidation is suppressed on the surfaces of the electrodes 8 and 9 which undergone the heat treatment and also the projections formed on the surfaces of both electrodes can be prevented. Furthermore, it is possible to prevent the diffusion of Au to the crystal interface and also to prevent the deterioration of adhesiveness. Then the characteristic deterioration of the vibrator and deterioration of the Ci value can be prevented. When the Ti layers 8c and 9c are added between the layers 8a and 9a and the layers 8c and 9c respectively, the adhesiveness is improved between the layers 8a and 9a and the layers 8c and 9c and also the environment resistance is improved.

39. 发明专利

JPH098593A VIBRATOR AND MANUFACTURE THEREFOR 失效
公开(公告)号：JPH098593A
公开(公告)日：1997-01-10
申请号：JP15753295
申请日：1995-06-23
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： HIGASHIYA HIDEKI , KURAMASU KEIZABURO , FURUKAWA MITSUHIRO , SAKAGUCHI SEIICHIRO
IPC分类号： H03H9/19 , H03H3/02
摘要： PURPOSE: To suppress the oxidation on the surface of an electrode for vibration proof after a heat-treatment and to prevent the degradation of a vibrator charac teristic and the lowering of a Ci value, by making the electrode for vibration proof of a vibration part have a constitution that a Ti layer is provided under an Au layer. CONSTITUTION: By providing Ti layers 8b and 9b under Au layers 8a and 9a in electrodes for vibration proof, the oxidation on the surface by a heat- treatment is suppressed. At this time, the degradation of a Ci value can be further suppressed by making Ti film thickness 500 angstrom or below. By performing the heat-treatment in high vacuum atomosphere which is 5.0×10 torr or below, the diffusion of the lower Ti layer to the surface and the oxidation can be further suppressed. Because Ti is difficult to diffuse in Au and to oxidize on the surface as compared with Cr, the oxidation on the surface of the electrode for vibration proof can be suppressed by the heat- treatment. As a result, a projection can not be produced on the surface of the electrode for vibration proof after the heat-treatment and the degradation of the vibration characteristic of a vibrator can be prevented.

40. 发明专利

JPH08340231A VIBRATOR 失效
公开(公告)号：JPH08340231A
公开(公告)日：1996-12-24
申请号：JP14718595
申请日：1995-06-14
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FURUKAWA MITSUHIRO , KURAMASU KEIZABURO , HIGASHIYA HIDEKI , HATTORI TAKAMICHI , SAKAGUCHI SEIICHIRO , TSURU ZENICHI
IPC分类号： H03H9/19
摘要： PURPOSE: To make a vibrator improved in productivity, small in size and reduced in energy loss. CONSTITUTION: A diaphragm 1 has a tongue-like vibration part 9 in a part to be held by 1st and 2nd covers 2, 3, exciting electrodes 11 are formed on the front and rear faces of the vibration part 9 and lead electrodes 13, 14 are drawn out from the electrodes 11 through a root part 12. A 1st connection part 16 is formed by one electrode 14 on the root side and the other electrode 13 is led to the free end side of the vibration part 9 through the outside wall of a kerf 8 and a lead electrode part formed like a U shape on the front and rear faces of the diaphragm 1 in contact with the outside wall to form a 2nd connection part 15.

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