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    • 26. 发明专利
    • Optical switch
    • 光开关
    • JP2003329946A
    • 2003-11-19
    • JP2002135574
    • 2002-05-10
    • Japan Aviation Electronics Industry Ltd日本航空電子工業株式会社
    • KATO YOSHICHIKA
    • G02B26/08B81B3/00G02B5/08G02B6/35G02B6/36
    • G02B6/357B81B3/001G02B6/3514G02B6/3518G02B6/3546G02B6/3584G02B6/3636G02B6/3692
    • PROBLEM TO BE SOLVED: To make easily settable the inter-electrode distance to a desired distance and easily formable a projection and an electrode pattern for sticking prevention or the like on a fixed electrode side. SOLUTION: An optical switch has a structure in which an upper substrate 60 is joined to a lower substrate 40 via a spacer 50. The upper substrate 60 has a three-layered structure of: an top-side single-crystal silicon layer 61 in which a V groove 64 is formed by anisotropic etching and micromirrors 65 are constituted by forming mirror bases and coating the mirror bases with metal; a rear-side single-crystal silicon layer 63 in which a movable electrode 67 and a flexure part 68 are formed; and a silicon dioxide layer 62 interposed between them. In the lower substrate 40, a fixed electrode 41 is formed. The inter-electrode distance is set according to the thickness of the spacer 50, the lower substrate 40 need not have a ridged part unlike before, and a fixed electrode formation surface is made flat. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了容易地将电极间距离设定到期望的距离,并且容易地形成突起和用于防止固定电极侧的防止电极图案等。 解决方案:光开关具有通过间隔件50将上基板60接合到下基板40的结构。上基板60具有三层结构:顶侧单晶硅层 61,其中通过各向异性蚀刻形成V槽64,并且微镜65通过形成镜面基座并用金属涂覆镜面底座构成; 形成可动电极67和弯曲部68的背面单晶硅层63; 和介于它们之间的二氧化硅层62。 在下基板40中形成有固定电极41。 电极间距离根据间隔物50的厚度设定,下基板40不需要像以前那样具有脊状部,固定电极形成面成为平坦状。 版权所有(C)2004,JPO