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21. 发明专利

JP2013068549A Flow rate sensor, mass flow controller, and manufacturing method of flow rate sensor 有权
标题翻译：流量传感器，流量控制器和流量传感器的制造方法
公开(公告)号：JP2013068549A
公开(公告)日：2013-04-18
申请号：JP2011208007
申请日：2011-09-22
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , SAITO MAKOTO
IPC分类号： G01F1/684 , G05D7/06
CPC分类号： G01F1/6847 , G01F1/69 , G01F1/696 , G01F1/698 , G01F15/006 , G05D7/0635 , H05K1/0212 , H05K2201/09481
摘要： PROBLEM TO BE SOLVED: To provide an MEMS type flow rate sensor which improves a sealing property between members configuring a channel, and has such corrosion resistance as to be usable for halogen-based gas.SOLUTION: In a flow rate sensor 10, a surface made of a base material 11 and a back surface made of a channel structure base material 21 are oppositely pasted, and fixed by a fixing member. The base material 11 has a pair of thermo-sensitive films 12; a heater film 13 positioned between the pair of thermo-sensitive films 12; and a channel protective film 15, in a channel forming area on the surface; and a metallic protective film having corrosion resistance on an area other than the channel forming area. The channel structure base material 21 has, on the back surface thereof, a groove formed in the channel forming area; and a side wall structure portion partitioning the groove and the other area other than the channel forming area, and projecting out as compared with the other area; and consists of a material having corrosion resistance. The side wall structure portion of the channel structure base material 21 is crimped so as to be positioned on the metallic protective film of the base material 11.
摘要翻译：要解决的问题：提供一种MEMS型流量传感器，其提高构成通道的构件之间的密封性，并且具有可用于卤素类气体的耐腐蚀性。解决方案：在流量传感器10中，由基材11制成的表面和由沟道结构基材21制成的背面相反地粘贴，并由固定构件固定。基材11具有一对热敏膜12; 位于一对热敏膜12之间的加热膜13; 以及在表面的通道形成区域中的通道保护膜15; 以及在通道形成区域以外的区域具有耐腐蚀性的金属保护膜。通道结构基材21在其背面具有形成在通道形成区域中的槽; 以及侧壁结构部分，其分隔所述槽和除了所述通道形成区域之外的其他区域，并且与所述另一区域相比突出; 并由具有耐腐蚀性的材料组成。通道结构基材21的侧壁结构部分被压接成位于基材11的金属保护膜上。版权所有（C）2013，JPO＆INPIT

22. 发明专利

JP2012084648A Gas piping member, gas piping 审中-公开
标题翻译：气管配件，气管
公开(公告)号：JP2012084648A
公开(公告)日：2012-04-26
申请号：JP2010228507
申请日：2010-10-08
申请人： Toshiba Corp , 株式会社東芝
发明人： NISHIYAMA NOBUYASU , ETO HIDEO , SAITO MAKOTO
IPC分类号： H01L21/3065 , C23C16/455 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a gas piping member which can reduce liquefaction of gas therein, for example.SOLUTION: The gas piping member that supplies gas for processing a semiconductor substrate comprises: an inner tube which passes the gas on the inside thereof; a heater extending in the longitudinal direction of the inner tube in contact with the outer wall of the inner tube; an outer tube arranged on the outside of the inner tube and the heater coaxially with the inner tube and having an end provided with a ramp that inclines to the inner tube side and is connected to the inner tube; and a heat insulating material arranged between the inner tube and the outer tube. The heater is configured to be connected with the heater of other gas piping member by penetrating the ramp.
摘要翻译：要解决的问题：提供例如可以减少气体液化的气体配管部件。解决方案：提供用于处理半导体衬底的气体的气体管道构件包括：使内部气体通过内管的内管; 加热器，其在所述内管的纵向方向上与所述内管的外壁接触; 外管配置在内管的外侧，加热器与内管同轴配置，其端部具有向内管侧倾斜并连接到内管的斜面; 以及布置在内管和外管之间的绝热材料。加热器被构造成通过穿过斜坡与其它气体管道构件的加热器连接。版权所有（C）2012，JPO＆INPIT

23. 发明专利

JP2012057251A Protective film, method for forming the same, apparatus for manufacturing semiconductor, and plasma treatment apparatus 审中-公开
标题翻译：保护膜，其形成方法，制造半导体的装置和等离子体处理装置
公开(公告)号：JP2012057251A
公开(公告)日：2012-03-22
申请号：JP2011172820
申请日：2011-08-08
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , SAITO MAKOTO
IPC分类号： C25D11/04 , C23C16/44 , C23C28/00 , C23F1/04 , C23F1/44 , C25D11/06 , C25D11/18 , C25D11/24 , H01L21/3065
CPC分类号： C23C28/023 , B32B15/016 , C22C21/00 , C22C21/02 , C22F1/04 , C23C28/021 , C23C30/00 , H01J37/3244 , H01J37/32477 , H01J37/32495 , Y10T428/24273 , Y10T428/24479
摘要： PROBLEM TO BE SOLVED: To provide a protective film that has so high plasma resistance as to be hardly stripped off from a protection target even if exposed to plasma for a long period of time.SOLUTION: According to one embodiment, a protective film 50 formed on a component in a plasma treatment apparatus and having a plasma resistance includes: a base film 51 formed on the component and having a concave-convex structure; and a plasma protection film 53 formed on the base film 51 to cover the concave-convex structure.
摘要翻译：要解决的问题：即使长时间暴露于等离子体，也能够提供具有如此高的等离子体电阻的保护膜，几乎不会从保护靶剥离。解决方案：根据一个实施例，形成在等离子体处理装置中的具有等离子体电阻的部件上的保护膜50包括：形成在部件上并具有凹凸结构的基膜51; 以及形成在基膜51上以覆盖凹凸结构的等离子体保护膜53。版权所有（C）2012，JPO＆INPIT

24. 发明专利

JP2012033150A Mass flow controller, mass flow controller system, substrate processing apparatus and gas flow rate adjustment method 审中-公开
标题翻译：质量流量控制器，质量流量控制系统，基板处理装置和气体流量调整方法
公开(公告)号：JP2012033150A
公开(公告)日：2012-02-16
申请号：JP2011122390
申请日：2011-05-31
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , SAITO MAKOTO , NISHIYAMA NOBUYASU
IPC分类号： G05D7/06 , H01L21/3065
CPC分类号： G05D7/0623 , Y10T137/0368 , Y10T137/7759 , Y10T137/7761 , Y10T137/87314 , Y10T137/87322
摘要： PROBLEM TO BE SOLVED: To provide a mass flow controller capable of changing a gas flow rate more quickly than conventional ones.SOLUTION: According to the embodiment, a mass flow controller 100 includes a gas passage composing member 110, a flow rate adjustment part 130, a displacement magnitude storage part 144 and a setting circuit 145. The flow rate adjustment 130 has a valve 131 arranged in a gas passage 113 for adjusting a gas flow rate and an actuator 133 for controlling the displacement magnitude of the valve 131. The displacement magnitude storage part 144 stores information of the displacement magnitudes of the valve 131 calculated for every processing procedure before performing any processing procedure, which shows its displacement magnitude when allowing gas of a flow rate regulated by the processing procedure to flow into the gas passage 113. The setting circuit 145 obtains the displacement magnitude corresponding to the processing procedure from the displacement magnitude storage part 144 to control the actuator 133 based on the displacement magnitude obtained.
摘要翻译：要解决的问题：提供能够比常规气体流量更快地改变气体流量的质量流量控制器。解决方案：根据实施例，质量流量控制器100包括气体通道组成部件110，流量调节部分130，位移量存储部分144和设置电路145.流量调节器130具有阀 131设置在用于调节气体流量的气体通道113中，以及用于控制阀131的位移大小的致动器133.位移大小存储部144存储在执行之前针对每个处理过程计算的阀131的位移量值的信息其显示当允许由处理程序调节的流量的气体流入气体通道113时的位移量的设置。设定电路145从位移大小存储部分144获得对应于处理程序的位移量，基于获得的位移大小来控制致动器133。版权所有（C）2012，JPO＆INPIT

25. 发明专利

JP2012013170A Electric valve, mass flow controller and substrate processing apparatus 审中-公开
标题翻译：电动阀，质量流量控制器和基板处理装置
公开(公告)号：JP2012013170A
公开(公告)日：2012-01-19
申请号：JP2010151291
申请日：2010-07-01
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , SAITO MAKOTO , NISHIYAMA NOBUYASU
IPC分类号： F16K31/02 , F16K31/06 , F16K49/00 , G01F1/00 , G01F1/684 , G01P5/12 , G05D7/06 , H01L21/3065
CPC分类号： G05D7/0635 , F16K31/007 , F16K31/0655
摘要： PROBLEM TO BE SOLVED: To provide an electric valve in which operation speed of a valve element can be increased further and a large flow rate can be controlled.SOLUTION: A valve structure 35 whose opening is variable is provided with a flow passage 13 to control the flow rate of a fluid flowing in the flow passage 13. A displacement enlarging mechanism (stroke enlarging mechanism) 50 for enlarging expansion of a piezoelectric element 42 to transmit the expansion to the valve element 37 is provided between the valve element 37 of the valve structure 35 and the piezoelectric element 42 which is an actuator of the valve element 37.
摘要翻译：要解决的问题：提供一种可以进一步增加阀元件的操作速度并且可以控制大流量的电动阀。解决方案：开口可变的阀结构35设有流路13，用于控制在流路13中流动的流体的流量。一种用于扩大膨胀的位移扩大机构（行程放大机构）50 在阀结构35的阀元件37和作为阀元件37的致动器的压电元件42之间设置用于将膨胀传递到阀元件37的压电元件42。（C）2012，JPO＆INPIT

26. 发明专利

JP2004357721A Optical waveguide type invasion device, invasion induction device and optical waveguide type invasion system 审中-公开
公开(公告)号：JP2004357721A
公开(公告)日：2004-12-24
申请号：JP2003145295
申请日：2003-05-22
申请人： Toshiba Corp , 株式会社東芝
发明人： UCHIYAMA KENICHI , UEMATSU IKUO , OOMIYA KAYOKO , TONO ICHIRO , ETO HIDEO , KISHIMOTO ISAO , OKADA NAOTADA , HIRATA MASAMI , KASHIMA NORIYASU
IPC分类号： G01N21/27 , A61B5/00 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide type invasion device which analyzes a specified substance in body fluid without damaging a living body and without being limited by dissolved oxygen in the body fluid. SOLUTION: The optical waveguide type invasion device comprises: a sensor part 18 provided with a gel layer 12, a negative electrode plate 17 in contact with the gel layer 12 and an optical waveguide plate 15; and a circuit part 20 provided with a light emitting circuit 21 for making light be incident on the optical waveguide plate 15, a light receiving circuit 22 for receiving the light emitted from the optical waveguide plate 15, a control circuit 23 connected to the light emitting circuit 21 and the light receiving circuit 22 for generating measured result data corresponding to the change of the light received in the light receiving circuit 22 and an output circuit 25 for outputting the measured result data. COPYRIGHT: (C)2005,JPO&NCIPI

27. 发明专利

JP2003287536A Optical waveguide type protein chip and protein detecting apparatus 有权
标题翻译：光波导型蛋白芯片和蛋白质检测仪器
公开(公告)号：JP2003287536A
公开(公告)日：2003-10-10
申请号：JP2002089768
申请日：2002-03-27
申请人： Toshiba Corp , 株式会社東芝
发明人： UCHIYAMA KENICHI , ETO HIDEO , TONO ICHIRO
IPC分类号： G01N33/53 , G01N21/77 , G01N27/327 , G01N37/00 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide type protein chip capable of both shortening a reaction time between proteins in a specimen solution such as blood and an antibody and highly sensitively detecting protein molecules even through the use of the specimen solution of a very small quantity. SOLUTION: The optical waveguide type protein chip is provided with a substrate, a first optical waveguide layer formed on the surface of the substrate, gratings each formed on the surfaces of both end parts of the first optical waveguide layer, a second optical waveguide layer made of a transparent conductive material having a refractive index higher than that of the first optical waveguide layer and formed on the first, optical waveguide layer located between the gratings, an antibody fixing film formed on the second optical waveguide layer, a first insulating member formed on the substrate containing the first optical waveguide layer and having a recessed well at a part at which the antibody immobilizing film is located, and an electrode membrane formed in such a way that its part is close to the well on the first insulating member for generating electric charge in-between the second optical waveguide layer. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种光波导型蛋白质芯片，其能够缩短样品溶液如血液和抗体之间的蛋白质之间的反应时间，并且即使通过使用样品溶液也能高灵敏度地检测蛋白质分子数量很少。解决方案：光波导型蛋白芯片设置有基板，形成在基板表面上的第一光波导层，形成在第一光波导层的两端部的表面上的光栅，第二光波导波导层，其由折射率高于第一光波导层的透明导电材料制成，并形成在位于光栅之间的第一光波导层上，形成在第二光波导层上的抗体定影膜，第一绝缘层在包含所述第一光波导层并且在所述抗体固定膜所位于的部分处具有凹槽的所述基板上形成的部件，以及其部分靠近所述第一绝缘构件上的阱的方式形成的电极膜用于在第二光波导层之间产生电荷。版权所有（C）2004，JPO

28. 发明专利

JPH1187313A PLASMA-PROCESSING METHOD 失效
公开(公告)号：JPH1187313A
公开(公告)日：1999-03-30
申请号：JP23703497
申请日：1997-09-02
申请人： TOSHIBA CORP
发明人： KOJIMA KAYOKO , SAITO MAKOTO , ETO HIDEO , SHIMIZU TOSHIO , AOKI KATSUAKI , NIIMURA TADASHI
IPC分类号： G02F1/1343 , H01L21/027 , H01L21/302 , H01L21/306 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a method of etching an ITO film, which is capable of preventing an electrode wiring material from being corroded and etching the ITO film at a high speed, and a method of exfoliating a regist formed on a substrate surface, without leaving residues behind. SOLUTION: In this method, a resist exfoliation chamber 11 for exfoliating a resist after an etching processing has been finished, is evacuated down to a predetermined pressure, and a gas containing Fe atom is mixed with O2 gas so as to be provided in a ratio in a range of 0.5 to 15%, and furthermore the mixed gas is introduced into the chamber 11 as an ashing gas and is set to a predetermined pressure. The ashing gas in the chamber 11 is irradiated with microwaves to be made into a plasma, and active species produced thereby ashes the resist. Thereafter, a resist residue left behind on the surface of the substrate 23 is cleaned.

29. 发明专利

JP2013065078A Mass flow controller and flow control method for mass flow controller 审中-公开
标题翻译：质量流量控制器和流量控制器的流量控制方法
公开(公告)号：JP2013065078A
公开(公告)日：2013-04-11
申请号：JP2011201967
申请日：2011-09-15
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , SAITO MAKOTO , NISHIYAMA NOBUYASU , OUCHI JUNKO
IPC分类号： G05D7/06 , C23C16/455 , H01L21/3065 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a mass flow controller capable of accurately controlling flow rate of liquefied gas while preventing re-liquefaction of the liquefied gas.SOLUTION: A mass flow controller 100 comprises: a piping for sensor 13 and a bypass piping 14 for distributing liquefied gas flowing in from an input 11; a thermal-type sensor 7 arranged in such a manner as to cover the piping for sensor; a heat insulation region 15 for covering the piping for sensor to form a double piping with the piping for sensor and being connected to the piping for sensor and the bypass piping; and a closing valve 1 for closing the connection and making the heat insulation region be a closed region. The mass flow controller also has: an output 12 of the liquefied gas joining from the piping for sensor and the bypass piping; control means for controlling the flow rate of the liquefied gas flowing out from the output on the basis of a detection result of the thermal-type sensor; and a heater 2 for heating all the components from below.
摘要翻译：要解决的问题：提供能够精确地控制液化气体的流量同时防止液化气体再液化的质量流量控制器。解决方案：质量流量控制器100包括：用于传感器13的管道和用于分配从输入端11流入的液化气体的旁路管道14; 以覆盖传感器用配管的方式配置的热式传感器7; 隔热区域15，用于覆盖用于传感器的管道，以形成具有用于传感器的管道的双重管道，并连接到传感器和旁路管道的管道; 以及用于封闭连接并使隔热区域成为封闭区域的关闭阀1。质量流量控制器还具有：从传感器管道和旁路管道连接的液化气输出12; 控制装置，用于根据热型传感器的检测结果控制从输出流出的液化气体的流量; 以及用于从下方加热所有部件的加热器2。版权所有（C）2013，JPO＆INPIT

30. 发明专利

JP2013021382A Coaxial cable 审中-公开
标题翻译：同轴电缆
公开(公告)号：JP2013021382A
公开(公告)日：2013-01-31
申请号：JP2011150613
申请日：2011-07-07
申请人： Toshiba Corp , 株式会社東芝
发明人： ETO HIDEO , NISHIYAMA NOBUYASU , SAITO MAKOTO , OUCHI JUNKO
IPC分类号： H01P7/06 , H01B7/30 , H01B7/42 , H01B11/18
CPC分类号： H01J37/32577 , H01B11/1856 , H01B11/1882
摘要： PROBLEM TO BE SOLVED: To provide a coaxial cable capable of transmitting high-frequency power with high efficiency, for example.SOLUTION: The coaxial cable, transmitting high-frequency power, includes an inner pipe, an outer pipe and insulative support materials. The inner pipe is formed from a conductor. The outer pipe is disposed outside the inner pipe to be coaxially to the inner pipe and is formed from a conductor. The insulative support material is disposed between the inner pipe and the outer pipe. Cooling gas is flowed into at least either one of a first space inside the inner pipe and a second space between the inner pipe and the outer pipe.

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