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    • 24. 发明专利
    • SEMICONDUCTOR LASER DEVICE
    • JPS56116689A
    • 1981-09-12
    • JP2029780
    • 1980-02-19
    • SHARP KK
    • YANO MORICHIKAYAMAMOTO SABUROUKURATA YUKIOMATSUI KANEKIHAYAKAWA TOSHIROUTAKIGUCHI HARUHISA
    • H01L21/208H01S5/00H01S5/30
    • PURPOSE:To facilitate manufacture of a semiconductor laser device as well as improve its quality by selectively forming a plurality of semiconductor layers, by epitaxial growth, on the crystal surface on the inclined plane obtained by photoetching a semiconductor substrate into a step shape. CONSTITUTION:On an N type semiconductor substrate 1, an insulating layer 2 and a photoresist film 3 are formed over the whole surface. Then, the resist 3 is partially irradiated with light 4 to photoetch the substrate 1 into a step shape. Then, an insulating layer 7 and a photoresist film 8 are formed over the whole surface and partially irradiated with light 9 to photoetch the inclined plane 6 so that a crystal surface 10 is exposed below the layers 2 and 7. Then, on the insulating layer 7 on the lower step surface 5, an N type layer 11, an active layer 12 and P type layers 13 and 14 are successively formed on the crystal surface 10 by selective epitaxial growth, and then electrodes 15 and 16 are formed. Thereby, a semiconductor laser device can be manufactured by a single photoetching and a single epitaxial growth, so that the manufacture is facilitated. Moreover, the quality and the yield improve.
    • 27. 发明专利
    • MANUFACTURE OF P-TYPE SEMICONDUCTOR THIN FILM
    • JPH07161644A
    • 1995-06-23
    • JP30998793
    • 1993-12-10
    • SHARP KK
    • YUASA TAKAYUKITAKIGUCHI HARUHISA
    • H01L21/205H01L21/365
    • PURPOSE:To manufacture a II-VI compound semiconductor thin film having a high P-type carrier concentration by a method wherein an organic matter material having an azido group is used as a P-type doping raw material and the raw material is bubbled using inert gas and is fed. CONSTITUTION:A susceptor 2 is set in the interior of a reaction tube and a substrate 3 is put on it. The susceptor 2 is heated by a heater 4. Inert gases 14 and 15 are gases of different kinds and can be used properly according to their purposes as bubbling gas use or as carrier gas use by a selection of valves 11. The gases 14 and 15 are pressure reduced by pressure reducing valves 13, the flow rates of the gases are adjusted by mass flow controllers 12 and the gases are introduced in the reaction tube 1 or bubblers 8, 9 and 10. A group II raw material is kept sealed in the bubbler 8 and is vaporized by bubbling, a group VI raw material is kept sealed in the bubbler 9 and is vaporized by bubbling and the vaporized raw materials are introduced in the tube 1. Moreover, a nitrogen doping raw material having an azido group is kept sealed in the bubbler 10 and the vaporized raw material is jetted toward the substrate 3 in the reaction tube 1.