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    • 27. 发明专利
    • OPTICAL WAVEGUIDE ELEMENT
    • JPS62247306A
    • 1987-10-28
    • JP8992386
    • 1986-04-21
    • HITACHI LTD
    • SATO HIDEMIHIYOSHI YASUOKANEDA AIZOTSUNODA SHIGEHARU
    • G02B6/13G02B6/12
    • PURPOSE:To obtain an optical waveguide element having good stability with ease, high accuracy and low loss at a low cost by irradiating an electron beam to a thin metallic film formed on a chalcogenide glass substrate to diffuse the metal in the irradiated part into the chalcogenide glass substrate, thereby forming a prescribed flush type three-dimensional optical waveguide. CONSTITUTION:A substrate made of As2S3 having 2.4 refractive index is used as the optically polished chalcogenide glass substrate 1 and a thin Ag film is formed to 500Angstrom as the thin metallic film 2 by vacuum deposition on the substrate. The vacuum deposition is executed under the conditions of 40 deg.C substrate temp., 5X10 mmHg vacuum degree and 5Angstrom /S film forming speed. The electron beam 3 having 50kV acceleration voltage and 0.7mum spot diameter is then irradiated onto the thin metallic film 2 and the unnecessary thin metallic film is removed by etching, by which the flush-type three-dimensional optical waveguide 4 having 3mum both width and depth and 2.44 refractive index is formed.
    • 28. 发明专利
    • OPTICAL MULTIPLEXER/DEMULTIPLEXER FOR OPTICAL COMMUNICATION
    • JPS61151504A
    • 1986-07-10
    • JP27304584
    • 1984-12-26
    • HITACHI LTD
    • TSUNODA SHIGEHARUSATO HIDEMIKANEDA AIZO
    • G02B6/293G02B6/28
    • PURPOSE:To reduce considerably the number of parts of an optical multiplexer/ demultiplexer, to improve the processability and to reduce considerably the unit price of parts by producing glass blocks in accordance with the number of wavelengths to be demultiplexed or multiplexed. CONSTITUTION:Interference film filters 11-14 for reflection which reflect wavelengths lambda1-lambda4 or permit them to transmit through respectively are stuck or vapor-deposited to one surface of blocks 10 and 9. The optical signal lambda1 out of optical signals lambda1-lambda4 incident from an input port 1 is reflected on the interference film filter 11 for lambda1 reflection and is transmitted to the first port 2. The other optical signals lambda2-lambda4 are transmitted through the interference film filter 11, and the optical signal lambda2 out of transmitted optical signals lambda2-lambda4 is reflected on the interference film filter 12 for lambda2 reflection and is transmitted to the second port 3. The outer optical signals lambda3 and lambda4 are transmitted through the interference film filter 12 and are reflected on interference film filters 13 and 14 similarly and are transmitted to the third port 7 and the fourth port 8 respectively, and thus, all optical signals lambda1-lambda4 are demultiplexed. They are multiplexed through the reverse course.
    • 29. 发明专利
    • Optical multiplexer/demultiplexer
    • 光学多路复用器/解复用器
    • JPS6167803A
    • 1986-04-08
    • JP18967584
    • 1984-09-12
    • Hitachi Ltd
    • HIYOSHI YASUOSATO HIDEMIKANEDA AIZOTSUNODA SHIGEHARU
    • G02B6/12G02B6/28G02B6/293
    • G02B6/12004
    • PURPOSE:To reduce the number of the constituent parts as well as the size and to attain stabilization to vibration from the outside by irradiating electron beams on the thin film of chalcogens glass formed on a substrate so as to form flat microlenses and microgratings. CONSTITUTION:A silicon oxide film 9, the thin film 10 of chalcogens glass having microlenses 13 and microgratings 14-1-14-4 formed by irradiating electron beams, a protective film and a thin metallic film are successively laminated on a silicon substrate 8. Light from an optical fiber 1 is introduced into the glass film 10 through a rodlike lens 4, converted into parallel rays of light through the microlens 13 on the inlet side, and passed through the microgratings 14-1-14-4 to branch the multiplex wavelengths lambda1-lambda4 into the separate wavelengths. When single light having wavelengths lambda1-lambda4 is incident on the glass film 10 from each port, the wavelengths are multiplexed.
    • 目的:为了减少构成部件的数量和尺寸,并且通过在形成在基板上的硫属元素玻璃的薄膜上照射电子束来实现来自外部的振动的稳定性,以形成平坦的微透镜和微光栅。 构成:通过照射电子束,保护膜和薄金属膜形成的具有微透镜13和微孔14-1-14-4的硫属玻璃的薄膜10依次层叠在硅基板8上。 来自光纤1的光通过棒状透镜4被引入到玻璃膜10中,通过入口侧的微透镜13转换成平行光线,并通过微光栅14-1-14-4分支多路复用 波长λ1-λ4进入分离的波长。 当具有波长λ1-λ4的单个光从每个端口入射到玻璃膜10上时,波长被多路复用。