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21. 发明专利

JPH0672702A OZONIZER 失效
公开(公告)号：JPH0672702A
公开(公告)日：1994-03-15
申请号：JP16262993
申请日：1993-06-30
申请人： EBARA CORP
发明人： SHINJO RYOICHI , KAMIYA ICHIRO , HARADA MINORU , NISHIOKA YUKIKO
IPC分类号： C01B13/11 , H01T23/00
摘要： PURPOSE:To provide a discharge-type ozonizer capable of generating concd. gaseous ozone from gaseous oxygen of 99.9% purity without the concn. being decreased with time. CONSTITUTION:The gas pressure at the discharge part of the discharger of an ozonizer is made at least >=1.1kgf/cm higher than atmospheric pressure and/or a liq.-cooled discharger is used, and the liq. coolant is controlled to >=15 deg.C. In this case, plural bank-shaped protrusions are provided on the face of one electrode on the dielectric side of the electrode with the dielectric in between as the structure of the discharger of the ozonizer, the tip of the protrusion is brought into contact with the dielectric or brought so close to the dielectric. The raw material and product are preferable to passed through a tunnel- shaped space between the recess between the protrusions and the dielectric, and an electric discharge is generated in this space.

22. 发明专利

JPH04203617A GROOVE MACHINING METHOD FOR DYNAMIC PRESSURE BEARING MADE OF CERAMICS 失效
公开(公告)号：JPH04203617A
公开(公告)日：1992-07-24
申请号：JP33784490
申请日：1990-11-30
申请人： EBARA CORP
发明人： NODA YUMIKO , KAMIYA ICHIRO , SHINJO RYOICHI , TOSHIMITSU MANABU , SATO YOSHIO
IPC分类号： F16C33/24 , B23K26/00 , B23K26/352 , B28B11/08 , F16C17/00 , F16C17/02 , F16C17/04 , F16C33/14
摘要： PURPOSE:To enhance groove forming accuracy by radiating a YAGQ switch pulse laser beam along a dynamic pressure generating groove outline of a base material of a dynamic pressure bearing made of ceramics so as to form the groove outline portion, and radiating the laser beam onto the inside of the outline portion. CONSTITUTION:A YAGQ switch pulse laser beam is radiated onto a portion corresponding to an outline portion of a dynamic pressure generating groove 10a formed on a machining surface of a base material 10. After forming the outline portion of a groove 10b, the YAGQ switch pulse laser beam is radiated onto the inside of the outline portion, thus forming the groove 10a. With this constitution, the outline of the groove 10a is removed in the same manner that when one line is formed by one scanning. Therefore, the outline can be connected by a straight or curved line without any accumulation portion, resulting in accurate groove formation.

23. 发明专利

JPH0476366A DEVICE FOR CONVEYING VESSEL UNDER COOLING 失效
公开(公告)号：JPH0476366A
公开(公告)日：1992-03-11
申请号：JP19004890
申请日：1990-07-17
申请人： EBARA CORP
发明人： SASAKI KATSUMI , OSADA NORIYUKI , SHINJO RYOICHI , SAKURAI KEIZO
IPC分类号： B65G47/88 , B65G47/80 , B65G47/84 , F25D13/06 , F25D31/00
摘要： PURPOSE:To lower the cost, facilitate the maintenance, and make the apparatus as a whole compact by using a conveying mechanism which consists of a circular table rotated by a drive device. CONSTITUTION:By pushing open a door 12a in a forwarding port 12 a beer mug J is put on a table 3 while the table 3 is being rotated clockwise by a drive motor 21. The beer mug J is conveyed with its side between an inner side guide 8 and an outer side guide 9. During this conveyance, while the beer mug J undergoes spontaneous cooling in an atmosphere of cool air, the beer mug J is exposed to rapid cooling with cooling air forcedly blown on it from fans 17, 17. After thus being cooled, the beer mug J is stopped from moving by contact with the edge of an inwardly curved stopper plate 16 in a gate mechanism 14. The degree to which an adjusting plate 25 projects is adjustable: when a beer mug of large size is conveyed for cooling, the projection of the adjusting plate 25 is reduced or the adjusting plate 25 is removed and, when the mug is of medium size or of small size, the projection is increased.

24. 发明专利

JPS63156964A AIR CURTAIN SYSTEM 失效
公开(公告)号：JPS63156964A
公开(公告)日：1988-06-30
申请号：JP30392886
申请日：1986-12-22
申请人： EBARA CORP , EBARA RES CO LTD
发明人： SHINJO RYOICHI , KOMATSU KOZO , FURUYA YASUSHI
IPC分类号： F24F9/00
摘要： PURPOSE:To perform function of both cutting off the open air and ventilation, by a method wherein a sensor detecting an indoor and an outdoor pressure and contamination concentration of indoor air is mounted, and from its detecting output, automatic control is made on the velocity of discharge flow of a jet of an air curtain. CONSTITUTION:A pressure sensor C1 is mounted to a front wall in the vicinity of an opening part, and a velocity of open air flow Vs is detected in a state of being converted into a pressure. A detected pressure Pstag is indicated by means of a pressure gauge A1, and the rotational speed of a motor 7 of a blower 6 is varied through an inverter INV according to a program preinputted to a controller CNT. The variation of the rotational speed controls flow rate QJ in a duct 11, i.e. velocity of flow VJ of a nozzle 3-1, and brings an air curtain 5 into an excellent condition state. Further, through control effected on detected outputs from outer and inner pressure sensors C1 and CIR and contamination concentration C2, contaminated air is discharged through a suction port 8.

25. 发明专利

JP2000313607A OZONE-PRODUCING METHOD AND APPARATUS 失效
公开(公告)号：JP2000313607A
公开(公告)日：2000-11-14
申请号：JP12186399
申请日：1999-04-28
申请人： EBARA CORP
发明人： SHINJO RYOICHI , HARADA MINORU , NISHIOKA YUKIKO
IPC分类号： C01B13/11
摘要： PROBLEM TO BE SOLVED: To provide a process for producing clean and concentrated ozone usable in a semiconductor production field and provide an apparatus therefor. SOLUTION: The objective ozone-producing apparatus contains an ozonizer having a discharging member 1 generating electric discharge and producing ozone by the action of electric discharge on a raw material gas supplied to the discharging member 1 and a cooler 3 to cool the ozone-containing gas produced by the ozonizer. A gas containing oxygen and carbon dioxide is supplied to the discharging member 1 as a raw material gas 4, a part of the raw material gas 4 is converted into ozone by electric discharge, the produced ozone- containing gas is supplied to the cooler 3 and carbon dioxide is solidified in the cooler 3 to obtain concentrated ozone.

26. 发明专利

JPH08133707A OZONE GENERATING METHOD, DEVICE THEREFOR AND ITS USAGE 失效
公开(公告)号：JPH08133707A
公开(公告)日：1996-05-28
申请号：JP29909294
申请日：1994-11-09
申请人： EBARA CORP , TOSHIBA CORP
发明人： HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , KAJI SHIGEHIKO , NAKANO YUTAKA , NAKADA RENPEI
IPC分类号： C01B13/11 , C01B13/14 , C01B33/12
摘要： PURPOSE: To provide an ozone generating method and device therefor capable of drastically reducing a Cr compd. in the generated ozone even if a stainless steel pipe is used as the generated ozone delivery pipeline. CONSTITUTION: The ozonizer 7 is provided with the ozone generating cell 9 having a raw gas supply part 8, a high voltage impressing means 16 and an ozone discharge port 10 and the lines 11 and 12 for delivering the generated ozone. A gas prepared by adding carbon dioxide and/or carbon monoxide 2 to oxygen 1 by 10-20 vol.% is used as the raw gas. The ozone thus produced is appropriately used to form a metal oxide, especially silicon oxide.

27. 发明专利

JPH0859213A OZONIZER 失效
公开(公告)号：JPH0859213A
公开(公告)日：1996-03-05
申请号：JP21066094
申请日：1994-08-11
申请人： EBARA CORP
发明人： SHINJO RYOICHI , KAMIYA ICHIRO , HARADA MINORU , NISHIOKA YUKIKO
IPC分类号： C01B13/11
摘要： PURPOSE: To provide an ozonizer capable of efficiently generating an ozone gas having a high concentration and a high cleaning degree. CONSTITUTION: In this ozonizer of a discharge method for impressing an electric voltage 10 between electrodes 5 and 6 sandwiching a dielectric material 7 and generating ozone, both the electrodes 5 and 6 are equipped with flow channels 9 for a cooling liquid and a coupling pipe 26 for connecting the flow channels 9. Both the electrodes 5 and 6 are cooled by circulating common deionized water.

28. 发明专利

JPH06304389A SOLVENT DEODORIZING METHOD OF DRY-CLEANING APPARATUS 失效
公开(公告)号：JPH06304389A
公开(公告)日：1994-11-01
申请号：JP5312394
申请日：1994-02-25
申请人： EBARA CORP , HAKUYOUSHIYA KK
发明人： NISHIOKA YUKIKO , KAMIYA ICHIRO , SHINJO RYOICHI , ISHII YOSHIHIRO , KOSAKA KOICHI
IPC分类号： D06F43/08
摘要： PURPOSE:To provide a solvent deodorizing method of a dry-cleaning apparatus which enables the elimination of odor of a petroleum base solvent by a simple method and effectively. CONSTITUTION:A petroleum base solvent in a solvent storage tank 2 is drawn with a circulation pump 5 to be supplied to a washing tank 8 through a filter (cartridge filter tank 6) and an adsorbent (carbon tank 7) and circulated to the solvent storage tank 2 through a button trap 3 from the washing tank 8. In a dry-cleaning apparatus of such a type, an ozone gas is injected into a solvent as fine bubble circulating through the dry-cleaning apparatus. Then, odor components of the solvent itself and malodorous components of pollutants accumulated in the solvent are decomposed by ozone for deodorizing them.

29. 发明专利

JPH06126157A ELECTRIC DISCHARGE REACTION DEVICE 失效
公开(公告)号：JPH06126157A
公开(公告)日：1994-05-10
申请号：JP12087093
申请日：1993-04-22
申请人： EBARA CORP
发明人： KAMIYA ICHIRO , SHINJO RYOICHI , MURAKAMI TAKESHI , NISHIOKA YUKIKO , HARADA MINORU
IPC分类号： B01J19/08 , C01B13/11 , H01T19/00
摘要： PURPOSE:To provide a long durable electric discharge reaction device with stable performance which is free electrode wear resulting from high density electric discharge and contamination of a reaction product by a harmful substance as well as is capable of generating a high concentration of ozone. CONSTITUTION:The electric discharge reaction device is composed of a dielectric present between a high voltage electrode 3 and a grounded electrode 4 to generate a silent discharge and/or a creeping discharge between the dielectric 2 and the high voltage electrode 3, and/or between the dielectric 2 and the ground electrode 4. Thus the substance is allowed to undergo a reaction in a discharge space 1. A metal material which is highly corrosion-resistant against the substance in the discharge space 1 and a reaction product there and also can be used for anodic oxidation coating, is used as an electrode material in a part which comes in contact with an electric discharge in the discharge space 1. The part which comes in contact with the electric discharge in the discharge space 1 is coated by an anodic oxidation treated film. In addition, a highly pure or pure, significantly corrosion-resistant and chemically stable substance film is formed tightly on said anodic oxidation treated film within said applicable range.

30. 发明专利

JPH0693440A DISCHARGE REACTION DEVICE 失效
公开(公告)号：JPH0693440A
公开(公告)日：1994-04-05
申请号：JP12086993
申请日：1993-04-22
申请人： EBARA CORP
发明人： KAMIYA ICHIRO , SHINJO RYOICHI , MURAKAMI TAKESHI , NISHIOKA YUKIKO , HARADA MINORU
IPC分类号： B01J19/08 , C01B13/11 , C23C14/00 , C23C14/34 , C23C16/50 , H01L21/02 , H01T19/00
摘要： PURPOSE:To provide the discharge reaction device which is maintained at the hardness capable of withstanding an electric discharge, extremely reduces the consumption of electrodes, enables stable performance over a long period of time and is capable of forming a clean reaction product to prevent the contamination of the reaction product by harmful materials. CONSTITUTION:This discharge reaction device is constituted to make the material passed in a discharge space 1 or held in this discharge space 1 to react within the discharge space 1 by interposing a dielectric 2 between the high- voltage electrode and the grounding electrode 4 and generating the silent discharge and/or creeping discharge between the dielectric substance 2 and the high-voltage electrode 3 and/or the grounding electrode 4. A high-purity aluminum material refined to a high degree is used for the electrode material of the part in contact with the discharge within the discharge device 1 of the above-mentioned device and is further coated with an anodic oxidation treated film within the range of the part in contact with the discharge in the discharge space 1.

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