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1. 发明专利

JP2004201823A Washing/purifying method, washing apparatus and purifying apparatus 审中-公开
公开(公告)号：JP2004201823A
公开(公告)日：2004-07-22
申请号：JP2002372957
申请日：2002-12-24
申请人： Ebara Corp , Watanabe Cleaning:Kk , 有限会社ワタナベクリーニング , 株式会社荏原製作所
发明人： SHINJO RYOICHI , ISHII YOSHIHIRO , WATANABE MUNETAKA
IPC分类号： D06F39/08 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To develop the sufficient washing or purifying actions by making magnetic forces work on an ozone solution having ozone dissolved thereinto.
SOLUTION: A washing apparatus supplies the ozone solution having ozone dissolved thereinto into a tub to wash the washing in the tub. The washing apparatus is provided with a magnetism supply means which makes the magnetic forces (fluxes from permanent magnets 30 and 30) work on the ozone solution to be supplied into the washing tub or the ozone solution Q in the tub. In the washing apparatus, by the action of the magnetic forces on the ozone solution, the Lorenz force works on the charged particles existing in the water to activate the ozone solution, thereby effectively removing the dirt and the pollutants in the objects to be washed or purified.
COPYRIGHT: (C)2004,JPO&NCIPI

2. 发明专利

JP2002316027A DEVICE AND METHOD FOR MANUFACTURING GAS-DISSOLVED WATER, DEVICE AND METHOD FOR ULTRASONIC CLEANING 失效
公开(公告)号：JP2002316027A
公开(公告)日：2002-10-29
申请号：JP2001120828
申请日：2001-04-19
申请人： EBARA CORP
发明人： OZAWA TAKU , SHINJO RYOICHI , HARADA MINORU , SAITO TAKAYUKI , SASAKI KENICHI , MURAKAWA KEIICHI , SHIMAMURA KAZUHIDE
IPC分类号： B01F1/00 , B01D53/22 , B01D61/00 , B01F3/04 , B01F15/04 , C02F1/36 , C02F1/44 , C02F1/68 , C02F1/74 , C02F1/78 , H01L21/00
摘要： PROBLEM TO BE SOLVED: To provide a device for manufacturing gas-dissolved water which can efficiently manufacture gas-dissolved water 31 wherein concentration of a dissolved gas 3 is at or below saturated concentration in a short time. SOLUTION: The device for manufacturing gas-dissolved water 1 which is constituted so that a gas to be dissolved 3 is dissolved in water to be treated 4 to obtain the gas-dissolved water 5 is provided with a dissolving section 11 for dissolving the gas to be dissolved in the water to be treated, a gas to be dissolved supply passage 12 for guiding the gas to be dissolved to the dissolving section, a first water to be treated supply passage 13 for guiding the water to be treated to the dissolving section, a gas-dissolved water discharging passage 14 for guiding the gas-dissolved water from the dissolving section and a second water to be treated supply passage 15 for guiding the water to be treated without passing through the dissolving section. The second water to be treated supply passage is joined to the gas-dissolved water discharging passage and the water to be treated guided by the second water to be treated supply passage dilutes concentration of the dissolved gas in the gas-dissolved water to a prescribed concentration.

3. 发明专利

JP2002020105A OZONE GENERATING DEVICE 失效
公开(公告)号：JP2002020105A
公开(公告)日：2002-01-23
申请号：JP2000195421
申请日：2000-06-29
申请人： EBARA CORP
发明人： SHINJO RYOICHI , HARADA MINORU , NISHIOKA YUKIKO
IPC分类号： C01B13/11 , H01T23/00
摘要： PROBLEM TO BE SOLVED: To provide a discharge body of an ozone generating device having high ozone generating efficiency and capable of generating high concentration ozone. SOLUTION: The ozone generating device is provided with a pair of electrodes 22 and 42 having electrode surfaces facing each other, a high voltage AC power source 17 for applying high voltage between the electrodes, a dielectric 43 arranged between the opposed electrodes and a gas flow passage for passing the raw material gas G between the opposed electrodes. At least electrode surface 22 of one of the pair electrodes is provided with many grooves 16 extending nearly parallel to each other and the raw material gas G is made to flow through a pace between many grooves 16 and the dielectric 43 in a direction crossing many grooves 16.

4. 发明专利

JPH0624710A OZONE GENERATOR 失效
公开(公告)号：JPH0624710A
公开(公告)日：1994-02-01
申请号：JP19900592
申请日：1992-07-03
申请人： EBARA CORP
发明人： NISHIOKA YUKIKO , KAMIYA ICHIRO , HARADA MINORU , SHINJO RYOICHI
IPC分类号： C01B13/11 , H01T23/00
摘要： PURPOSE:To prevent dew condensation in a discharge body, etc., and prevent the discharge body, etc., from causing abnormal discharge in an ozone generator cooling the discharge body, etc., generating ozone by discharging at high voltage. CONSTITUTION:In an ozone generator 1 housing a discharge body 10 for generating ozone by discharge, an electric source 12 applying alternating current high voltage to the discharge body and a cooling part 11, etc., for cooling the discharge body 10 and/or electron source 12 in one housing 2, a dehumidifier 15 for outside air is provided in an outside air suction port 14 for ventilation. A cooling liquid passage of the outside air dehumidifier 15 is provided on upstream side of the cooling part 11 for the discharge body 10, etc., to keep the interior of the device in drying atmosphere. A dehumidifier 6 is provided in the outlet of a compressor 5 for introducing a raw material gas and simultaneously a discharge port 24 of a discharge gas piping 23 of an oxygen enriching device or heatless drier 8 passing the dehumidified raw material gas through is provided in the device.

5. 发明专利

JPH04203618A GROOVE MACHINING METHOD FOR DYNAMIC PRESSURE BEARING MADE OF CERAMICS 失效
公开(公告)号：JPH04203618A
公开(公告)日：1992-07-24
申请号：JP33784590
申请日：1990-11-30
申请人： EBARA CORP
发明人： NODA YUMIKO , KAMIYA ICHIRO , SHINJO RYOICHI , TOSHIMITSU MANABU , SATO YOSHIO
IPC分类号： F16C33/24 , B23K26/00 , B23K26/352 , B28B11/08 , F16C17/00 , F16C17/02 , F16C17/04 , F16C33/14
摘要： PURPOSE:To enhance machining accuracy by applying surface finish to a portion forming a slide surface of a bearing base body made of ceramics after being sintered, bonding an organic material for absorbing a YAG laser beam according to a predetermined pattern of a machining groove so as to radiate the laser beam along the bonded pattern. CONSTITUTION:A portion of a slide surface of a bearing base body 1 made of ceramics after being sintered is applied to surface finish. A black organic material capable of efficiently absorbing a YAG laser beam is bonded onto the slide surface according to a pattern of a predetermined machining groove, thus obtaining portions 2a as shown by slash marks. A YQG laser processor radiates a YAGQ switch pulse laser beam onto the portions 2a with the organic material bonded thereto, to machine the groove 2. The bearing base body 1 is immersed into 1-trichloroethane, followed by ultrasonic cleaning, and then, the residual organic material is removed.

6. 发明专利

JPH0211899A WEAR RESISTING BLOWER 失效
公开(公告)号：JPH0211899A
公开(公告)日：1990-01-16
申请号：JP16092088
申请日：1988-06-30
申请人： SUMITOMO CEMENT CO , EBARA CORP
发明人： HAYASHI MIKIO , SUGIYAMA HIROKI , SHINJO RYOICHI , ISAKA SHINICHI
IPC分类号： F04D29/02 , F04D29/30
摘要： PURPOSE:To prevent surfaces of a liner from wearing in its corner part by forming an irregular surface in the surfaces of ceramics along a flow direction of gas in the corner part formed by a bottom wall part of the liner and its side wall part. CONSTITUTION:A channel-shaped liner 20, protected and coated in its internal side surface with ceramics 21, is connected to each blade plate 2 of an impeller. Surfaces of ceramics 21a, 21b in right and left corner parts 25, 26 of the liner 20 are irregularly formed along its lengthwise direction. Consequently, the corner part 25 is prevented from generating a smooth flow of gas, weakening simultaneously even flow energy of dust, and the liner 20 is prevented from easily generating wear in its surface by the dust.

7. 发明专利

JPH114995A DRY CLEANING SYSTEM 失效
公开(公告)号：JPH114995A
公开(公告)日：1999-01-12
申请号：JP17761597
申请日：1997-06-17
申请人： EBARA CORP
发明人： NISHIOKA YUKIKO , SHINJO RYOICHI , ISHII YOSHIHIRO
IPC分类号： D06L1/08 , C01B13/02 , C01B13/11 , D06F17/12 , D06F43/00
摘要： PROBLEM TO BE SOLVED: To provide a dry cleaning system to make laundry to be cleanly washed by keeping a petroleum solvent clean, capable of preventing the ignition or explosion of the petroleum solvent, and inexpensive in price and running cost. SOLUTION: In this dry cleaning system with using a petroleum solvent as a cleaning liquid, provided with an ozone adding part (an air diffuser pipe 11) at an appropriate place in a dry cleaning liquid circulatory system between an exhausting side of a washing tub of the dry cleaning device and a circulating pump, and adapted for adding an ozone gas supplied from an ozone generating device 10 into the cleaning liquid through the ozone adding part, the ozone generating device 10 is a device for generating the ozone gas from an oxygen- enriched air as a raw gas, generated by an oxygen enrichment machine 15, and is to introduce a nitrogen-enriched air exhausted when the oxygen-enriched air is generated by the oxygen enrichment machine 15 to a vapor phase part for a solvent storing tank 2 and/or a vapor phase part for the washing tub 8.

8. 发明专利

JPH0859214A OZONIZER 失效
公开(公告)号：JPH0859214A
公开(公告)日：1996-03-05
申请号：JP22415194
申请日：1994-08-24
申请人： EBARA CORP , TOSHIBA CORP
发明人： HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , NAKADA RENPEI , MIYAZAKI KUNIHIRO , KAJI SHIGEHIKO
IPC分类号： B01D53/04 , B01D53/14 , C01B13/11 , H01T23/00
摘要： PURPOSE: To provide an ozonizer not being stained with a Cr compound or stained in such a slight degree as not to cause problems in production of semiconductors of high integration by eliminating NOx, HF and SOx contained in an ozone gas as a main cause of the occurrence of a Cr compound. CONSTITUTION: In this ozonizer 10 for supplying a raw material gas to an ozone generating cell 11 to which a high voltage is impressed and sending a generated ozone gas through ozone gas transporting flow channels 14 and 15, the ozone gas transporting flow channels are equipped with a removing means for eliminating one or more of NOx, HF and SOx. The ozone gas from the ozone generating cell 11 is passed through the removing means to remove one or more of NOx, HF and SOx contained in the ozone gas and delivered.

9. 发明专利

JPH0859210A OZONIZER 失效
公开(公告)号：JPH0859210A
公开(公告)日：1996-03-05
申请号：JP22415094
申请日：1994-08-24
申请人： EBARA CORP , TOSHIBA CORP
发明人： HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , NAKADA RENPEI , MIYAZAKI KUNIHIRO , KAJI SHIGEHIKO
IPC分类号： C01B13/11
摘要： PURPOSE: To enable extreme reduction of a Cr compound in a generated ozone gas by constituting at least a part coming into contact with ozone gas, from a material not containing Cr, in an ozonizer. CONSTITUTION: In this ozonizer equipped with an ozone gas generating cell for supplying a raw material gas and impressing a high voltage from a high- voltage electric source to the raw material gas to generate ozone gas and an ozone gas sending route for transporting generated ozone gas, materials of at least parts coming into contact with ozone gas, such as pipes, joints, valves and gas filters of the ozone sending route on and after the ozone generating cells are composed of materials not containing chromium or materials coated with a material not containing chromium. One or more of aluminum, an aluminum alloy, Teflon, nickel treated with fluorine, a nickel alloy, glass composed of silicon oxide as a main component and high-purity aluminum oxide are preferable as the materials not containing chromium.

10. 发明专利

JPH04203616A MACHINING METHOD FOR DYNAMIC PRESSURE BEARING MADE OF CERAMICS 失效
公开(公告)号：JPH04203616A
公开(公告)日：1992-07-24
申请号：JP33784390
申请日：1990-11-30
申请人： EBARA CORP
发明人： NODA YUMIKO , KAMIYA ICHIRO , SHINJO RYOICHI , TOSHIMITSU MANABU , SATO YOSHIO
IPC分类号： F16C17/00 , B23K26/00 , B23K26/352 , B28B11/08 , F16C17/02 , F16C17/04 , F16C33/14 , F16C33/24
摘要： PURPOSE:To enhance dynamic pressure generating groove forming accuracy by coating a base material of a dynamic pressure bearing made of ceramics with resin or oil capable of absorbing a YAGQ switch pulse laser beam, radiating the YAGQ laser beam so as to form a recess portion formed into a predetermined shape, and removing the residual coating film. CONSTITUTION:A coating film 14 made of resin or oil, e.g. dimethyl silicone oil colored into blue capable of efficiently absorbing a YAGQ switch pulse laser beam is formed on a base material 10 of a dynamic pressure bearing made of ceramics. The YAGQ switch pulse laser beam is radiated onto the base material 10 made of ceramics along a trace 11 so that a recess portion 15 such as dynamic pressure generating groove or the like of a slide bearing is formed on the base material 10. After forming the recess portion 15, the residual coating film 14 is removed.

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