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13. 发明专利

JP2005083884A Dynamic quantity sensor 有权
标题翻译：动态数量传感器
公开(公告)号：JP2005083884A
公开(公告)日：2005-03-31
申请号：JP2003315945
申请日：2003-09-08
申请人： Murata Mfg Co Ltd , 株式会社村田製作所
发明人： YAMASHITA MUNEHARU
IPC分类号： G01L1/16 , G01C19/00 , G01C19/56 , G01C19/5776 , G01P15/09 , G01P15/097 , G01P15/10 , G01P21/00 , G01P9/00
CPC分类号： G01C19/5642 , G01P15/09 , G01P15/097 , G01P21/00
摘要： PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor with a self-diagnosis function, which uses two piezoelectric vibrators where stresses caused by dynamic quantity are opposite to each other, applies the piezoelectric vibrators with voltage signals, converts current signals flowing through the piezoelectric vibrators into voltage signals, and detects the phase differences of their output signals. SOLUTION: The two piezoelectric vibrators Sa, Sb are installed so that stresses caused by the dynamic quantity, such as acceleration or the like, are opposite to each other. A current voltage conversion/signal adding circuit 11 converts the current signals flowing through the piezoelectric vibrators Sa, Sb into voltage signals. A feedback signal processing circuit 12 amplifies an addition signal of the two voltage signals and feeds it back to an acceleration detecting element 10, thereby making up an oscillation state. A self-diagnosis circuit 15, which is composed of a series circuit of a switch circuit SW and a capacitor C1, is disposed between a reference potential section (ground) and a connection node, where the piezoelectric vibrator Sb is connected with a resistor RLb through which the current flows. The diagnosis is carried out as to whether Sb-signals, caused by on/off operations of the switch circuit SW, change normally. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供具有自我诊断功能的动态量传感器，其使用两个压电振动器，其中由动态量引起的应力彼此相反，将压电振动器施加电压信号，转换流动的电流信号通过压电振动器进入电压信号，并检测其输出信号的相位差。解决方案：两个压电振动器Sa，Sb安装成使得由诸如加速度等的动态量引起的应力彼此相反。电流电压转换/信号相加电路11将流经压电振动器Sa，Sb的电流信号转换为电压信号。反馈信号处理电路12放大两个电压信号的相加信号，并将其馈送回加速度检测元件10，从而构成振荡状态。由开关电路SW和电容器C1的串联电路构成的自诊断电路15设置在基准电位部（地）和连接节点之间，压电振子Sb与电阻器RLb 电流流过。进行关于由开关电路SW的接通/断开操作引起的Sb信号是否正常变化的诊断。版权所有（C）2005，JPO＆NCIPI

14. 发明专利

JP2003254991A DYNAMIC QUANTITY SENSOR 审中-公开
公开(公告)号：JP2003254991A
公开(公告)日：2003-09-10
申请号：JP2002326605
申请日：2002-11-11
申请人： MURATA MANUFACTURING CO
发明人： YAMASHITA MUNEHARU
IPC分类号： G01P15/09 , G01P15/097 , G01P15/10
摘要： PROBLEM TO BE SOLVED: To constitute a dynamic quantity sensor for realizing the non- adjustment of a circuit caused by decrease in dispersion of characteristics of two piezoelectric vibrators and the reduction of dispersion factors, separating the distance between the piezoelectric vibrators and the circuit part, and dispensing with the control of a phase shift amount caused by a phase shift circuit. SOLUTION: Two piezoelectric vibrators Sa, Sb are installed so that stress being applied by the dynamic quantity such as acceleration becomes reversed. A current voltage conversion-signal adding circuit 11 converts current signals flowing through the two piezoelectric vibrators into voltage signals. A voltage amplification-amplitude limiting circuit 12 amplifies an adding signal of two voltage signals, conducts positive feedback of voltage signals Vosc of the same phase as the current signals to oscillate. A phase different voltage conversion circuit 13 generates a voltage signal proportional to the phase difference between signals Sa and signals Sb which are voltage-converted signals. An amplification- filter circuit 14 DC-amplifies the voltage signal and removes unnecessary frequency components. COPYRIGHT: (C)2003,JPO

15. 发明专利

JP3278679B2 失效
公开(公告)号：JP3278679B2
公开(公告)日：2002-04-30
申请号：JP50826594
申请日：1993-09-15
IPC分类号： G01P3/489 , G01P15/097 , G01P15/10 , G01P15/16 , G01R23/10

16. 发明专利

JP2002122614A ACCELERATION SENSOR 失效
公开(公告)号：JP2002122614A
公开(公告)日：2002-04-26
申请号：JP2000311510
申请日：2000-10-12
申请人： MURATA MANUFACTURING CO
发明人： TAHODA JIYUN
IPC分类号： G01P15/08 , G01P15/09 , G01P15/097 , G01P15/10 , H01L41/08 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide an acceleration sensor of high sensitivity that can eliminate the influence of a factor other than acceleration such as the change of temperature. SOLUTION: A pair of surface wave resonators 3, 4 provided with a pair of electrodes comprising IDT electrodes 3b, 3c, 4b, 4c on the surfaces of piezoelectric substrates 3a, 4a, are jointed at the back faces to face each other, to constitute a bimorph type acceleration detecting element 2, and the acceleration detecting element 2 is fixedly supported at both longitudinal end part by case members 6 so as to bend in a plate thickness direction following the application of acceleration G. The acceleration detecting element 2 is bent by the application of the acceleration G, and the frequency change or impedance change of the surface wave resonators 3, 4 caused by bending is differentially detected to detect acceleration.

17. 发明专利

JP3189620B2 失效
公开(公告)号：JP3189620B2
公开(公告)日：2001-07-16
申请号：JP11238295
申请日：1995-04-12
IPC分类号： G01P15/09 , G01P15/08 , G01P15/097 , G01P15/10 , H01L41/08 , H01L41/107 , H03H9/17

18. 发明专利

JP2001091441A NANOMETER-ORDER MECHANICAL OSCILLATOR, MANUFACTURING METHOD THEREOF, AND MEASUREMENT DEVICE USING IT 失效
公开(公告)号：JP2001091441A
公开(公告)日：2001-04-06
申请号：JP2000156645
申请日：2000-05-26
申请人： JAPAN SCIENCE & TECH CORP
发明人： KAWAKATSU HIDEKI , TOSHIYOSHI HIROSHI
IPC分类号： G01P3/12 , B81B1/00 , B81B3/00 , B82B1/00 , B82B3/00 , G01B21/30 , G01L1/04 , G01P15/00 , G01P15/02 , G01P15/08 , G01P15/097 , G01Q10/00 , G01Q10/04 , G01Q20/02 , G01Q20/04 , G01Q60/22 , G01Q60/32 , G01Q60/38 , G01Q60/42 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/00 , G11B9/14 , H01L29/84 , H01L41/08 , H01L41/09 , H03H9/02 , G01N13/16 , G01N13/10 , G12B21/08
摘要： PROBLEM TO BE SOLVED: To provide a stable highly sensitive nanometer-order mechanical oscillator having great ability on the order of nanometers and weight change detection resolution, a manufacturing method of it, and a measurement device using it. SOLUTION: This nanometer-order mechanical oscillator 10 constructed of a base 11, a prism-shaped oscillator measurement 13, and a neck part 12 provided with an elastic part connecting the base 11 and the oscillation measurement 13 together. The oscillator 10 is formed into a mushroom shape and on the order of nanometers. The prism-shaped oscillator measurement 13 is brought close to an optional sample surface as a probe and suitable to a probe for a scanning microscope observing the surface condition.

19. 发明专利

JP2851566B2 失效
公开(公告)号：JP2851566B2
公开(公告)日：1999-01-27
申请号：JP15143495
申请日：1995-06-19
申请人： NYUU ESU DEII INC
发明人： RICHAADO JII NYUUERU , KENISU ESU REUOOREN , SUKOTSUTO DEII OOROSUKII , BAATO DEII EEGURII
IPC分类号： G01L1/10 , G01P1/00 , G01P1/02 , G01P15/08 , G01P15/097 , G01P15/10

20. 发明专利

JPH10512046A 失效
公开(公告)号：JPH10512046A
公开(公告)日：1998-11-17
申请号：JP51930196
申请日：1995-12-15
IPC分类号： G01L1/10 , G01L1/14 , G01L1/18 , G01L9/00 , G01P15/097 , G01P15/10 , H03H9/24

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