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    • 19. 发明专利
    • Method and tool for adhering polishing pad
    • 用于加工抛光垫的方法和工具
    • JP2007069279A
    • 2007-03-22
    • JP2005256511
    • 2005-09-05
    • Fujikoshi Mach Corp不二越機械工業株式会社
    • NAKAMURA YOSHIOKOYAMA HARUMICHI
    • B24B37/08B24B37/20H01L21/304
    • B24D9/085B24B37/08
    • PROBLEM TO BE SOLVED: To easily and precisely perform the work of adhering a polishing pad on an upper surface plate of a both-side polishing device. SOLUTION: The polishing pad 10 is temporarily adhered to each polishing surface of the upper surface plate 30 and a lower surface plate 20 of the both-side polishing device. A roller device 200 having a roller body 230 rotatably provided at a shaft 220 mounted to a sun gear 80 and an internal tooth gear 70 and formed with a spiral projecting part 232 of a required width on an outside surface is mounted, and is mounted on the lower surface plate 20 in the radial direction. The upper surface plate 30 is lowered up to a position where the upper surface plate 30 is abutted on the roller body 230 by a supporting device 60. The upper and lower surface plates 30 and 20 are rotated at equal speed in mutual opposite directions, while pressurizing the roller body 230 by the upper surface plate 30, and polishing pad 10 is simultaneously adhered to the upper and lower surface plates 30 and 20. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了容易且精确地执行将抛光垫粘附在双面抛光装置的上表面板上的工作。 解决方案:抛光垫10临时粘附到上表面板30的每个抛光表面和两面抛光装置的下表面板20。 具有可旋转地设置在安装在太阳齿轮80上的轴220和内齿齿轮70上并且形成有外表面上所需宽度的螺旋突出部232的辊体230的滚筒装置200安装在 下表面板20沿径向方向。 上表面板30被降低到上表面板30通过支撑装置60抵靠在辊主体230上的位置。上表面板30和下表面板20以相等的相反方向旋转,同时 通过上表面板30对辊主体230加压,并且抛光垫10同时粘附到上表面板30和下表面板20上。版权所有(C)2007,JPO&INPIT