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11. 发明专利

JP2007304046A Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：JP2007304046A
公开(公告)日：2007-11-22
申请号：JP2006135083
申请日：2006-05-15
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G01C19/56 , G01C19/5712 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor that can be easily manufactured by using MEMS technology. SOLUTION: The angular velocity sensor 1 comprises: a disk-like swing body 22 supported rotatably in a circumferential direction by being supported swingably around a first shaft parallel to a frame 21; a drive electrode 24 for swinging the swing body around the first shaft by using static power; a first detection electrode 251 provided on the swing body; and a second detection electrode 252 provided on a substrate 30 fixing the frame. The drive electrode, the first detection electrode and the second detection electrode are arranged on the substantially same plane as the swing body. Furthermore, the angular velocity sensor 1 comprises: a power source 4 for applying alternating current on the drive electrode 24; and a measuring means 5 for measuring an electrostatic capacity or a variation speed of the electrostatic capacity between the first detection electrode 251 and the second detection electrode 252. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供可以通过使用MEMS技术容易地制造的角速度传感器。角速度传感器1包括：通过围绕平行于框架21的第一轴可摆动地支撑而沿圆周方向可旋转地支撑的盘状摆动体22; 用于通过静电使摆动体围绕第一轴摆动的驱动电极24; 设置在摆动体上的第一检测电极251; 以及设置在固定框架的基板30上的第二检测电极252。驱动电极，第一检测电极和第二检测电极布置在与摆动体基本相同的平面上。此外，角速度传感器1包括：用于在驱动电极24上施加交流电的电源4; 以及用于测量第一检测电极251和第二检测电极252之间的静电电容的静电容量或变化速度的测量装置5.版权所有（C）2008，JPO＆INPIT

12. 发明专利

JP2006038645A Signal detection circuit for capacity type microelectronic mechanical system sensor 审中-公开
标题翻译：用于容量型微电子机械系统传感器的信号检测电路
公开(公告)号：JP2006038645A
公开(公告)日：2006-02-09
申请号：JP2004219200
申请日：2004-07-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： KITAMURA TORU , ARAKI RYUTA
IPC分类号： G01C19/56 , G01C19/5684 , G01R27/26
摘要： PROBLEM TO BE SOLVED: To provide a signal detection circuit for capacity type microelectronic mechanical system sensor (MEMS) having high detection sensitivity (good S/N ratio) which can be easily formed on a silicon wafer. SOLUTION: A gate of a first transistor 3 consisting of DMOSFET is connected with a capacitor 1 for detection which is provided to the MEMS sensor 10. The source of the first transistor 3 is grounded, and to the gate, a resistor 4 of which one end is grounded is connected. The source of the second transistor 5 consisting of the drain of the first transistor 3 and the DMOSFET is connected with the gate of the second transistor 5, and its connection is connected to an input terminal of a buffer amplifier 6. Between the output terminal of the buffer amplifier 6 and the gate of the first transistor 3, a feedback capacitor 8 is provided. The first and the second transistors 3 and 5 are DMOSFET and so a current flows in the case that the gate potential is zero. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够容易地在硅晶片上形成的具有高检测灵敏度（良好的S / N比）的容量型微电子机械系统传感器（MEMS）的信号检测电路。解决方案：由DMOSFET组成的第一晶体管3的栅极与提供给MEMS传感器10的用于检测的电容器1相连。第一晶体管3的源极接地，并且在栅极处连接电阻器4 其一端接地。由第一晶体管3的漏极和DMOSFET构成的第二晶体管5的源极与第二晶体管5的栅极连接，其连接与缓冲放大器6的输入端连接。缓冲放大器6和第一晶体管3的栅极，反馈电容器8。第一和第二晶体管3和5是DMOSFET，因此在栅极电位为零的情况下电流流动。版权所有（C）2006，JPO＆NCIPI

13. 发明专利

JP2005016965A Package and manufacturing method thereof, vibrating gyroscope and manufacturing method thereof 审中-公开
标题翻译：振动胶及其制造方法及其制造方法
公开(公告)号：JP2005016965A
公开(公告)日：2005-01-20
申请号：JP2003177945
申请日：2003-06-23
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： TAKEMOTO TAKESHI , ARAKI RYUTA
IPC分类号： G01C19/56 , G01C19/5783 , G01P15/08 , G01P9/04
CPC分类号： G01C19/56
摘要： PROBLEM TO BE SOLVED: To provide a package superior in sealability and its manufacturing method, and a vibrating gyroscope having a satisfactory balance of the Q value (the ratio of the whole energy of a vibration system to an applied energy) and its temperature coefficient and its manufacturing method. SOLUTION: A spacer 5 is inserted in an unbonded package 6 and is held in a chamber 8 of an anode bonding device 7. After the pressure inside the chamber 8 is made to 1.0×10 -2 Pa or lower, a noble gas is sealed in to adjust the pressure inside the chamber 8 between 0.0034×T 0 Pa and 0.34×T 0 Pa (where T 0 is the absolute temperature inside the chamber). The spacer 5 is pulled out in a state with the pressure maintained, and a sealing substrate 2 and a support substrate 1 are temporarily bonded to each other with voltage loaded between 150-230 V, with either of them set as an anode and the other as a cathode. After the pressure inside the chamber 8 is made to 1.0×10 -1 Pa or lower, the package is manufactured at voltage load between 500-1,000 V. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供密封性优异的封装及其制造方法，以及具有令人满意的Q值（振动系统的能量与施加能量的比例）与其它的振动陀螺仪的平衡的振动陀螺仪温度系数及其制造方法。解决方案：将间隔件5插入到未结合的包装6中，并且保持在阳极接合装置7的室8中。在室8内的压力为1.0×10 SP / > Pa以下，将惰性气体密封以将室8内的压力调节为0.0034×T 0 Pa和0.34×T 0 Pa（其中T 0 是室内的绝对温度）。间隔件5在保持压力的状态下拉出，并且密封基板2和支撑基板1在负载为150-230V的电压之间暂时接合，其中任一个设定为阳极，而另一个作为阴极。在室8内的压力为1.0×10 -1 Pa以下时，封装在500-1000V的电压负载下制造。版权所有（C）2005，JPO＆NCIPI

14. 发明专利

JP2011027562A Vibration gyro using piezoelectric film 审中-公开
标题翻译：振动陀螺使用压电薄膜
公开(公告)号：JP2011027562A
公开(公告)日：2011-02-10
申请号：JP2009173976
申请日：2009-07-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , IKEDA TAKASHI , NISHIDA HIROSHI , MORIGUCHI TAKAFUMI , HIRATA YASUYUKI
IPC分类号： G01C19/56 , G01C19/5684
摘要： PROBLEM TO BE SOLVED: To provide a vibration gyro measuring a plurality of rotary shafts with a small and simple structure. SOLUTION: The vibration gyro includes: a ring vibrating body 11 having a uniform plane; a leg part 15 flexibly supporting the ring vibrating body; and a plurality of electrodes formed of upper and lower metal films sandwiching the piezoelectric film in the thickness direction. When one driving electrode 13a exciting the primary vibration of the ring vibrating body 11 by the cosNθ vibration mode is the reference driving electrode, the plurality of other electrodes 13b, ..., 13f are arranged at specific places. In accordance with the arrangement, the primary vibration in the out-of-plane cos2θ vibration mode is excited, and a uniaxial or biaxial angular velocity can be detected by using a secondary vibration detection means of the cos3θ in-plane vibration mode. Further, by adding a group of driving electrodes, increase in amplitude or electric power saving is achieved as compared with a group of driving electrodes arranged only at angles separated circumferentially by (360/N)°. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种以简单的结构测量多个旋转轴的振动陀螺仪。解决方案：振动陀螺仪包括：具有均匀平面的环形振动体11; 支撑环形振动体的腿部15; 以及在厚度方向夹着压电膜的上下金属膜形成的多个电极。当通过cosNθ振动模式激励环形振动体11的主振动的一个驱动电极13a是基准驱动电极时，多个其它电极13b，...，13f被布置在特定位置。根据该结构，激发平面外的cos2θ振动模式的主振动，通过使用cos3θ面内振动模式的二次振动检测装置，可以检测单轴或双轴角速度。此外，通过添加一组驱动电极，与仅沿周向（360 / N）°分开的角度排列的驱动电极组相比，实现了振幅或省电的增加。版权所有（C）2011，JPO＆INPIT

15. 发明专利

JP2009042607A Two-dimensional scanner 有权
标题翻译：二维扫描仪
公开(公告)号：JP2009042607A
公开(公告)日：2009-02-26
申请号：JP2007209014
申请日：2007-08-10
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G02B26/10 , G02B26/08 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide a two-dimensional scanner carried out at the same frequency in both a swing around the first axis and a swing around the second axis, and in a phase having different each other by 90°. SOLUTION: This two-dimensional scanner 1 has a swing member 2, a ring member 3 arranged in an outside of the swing member to conform its center with the swing member, the first paired connection members 4A for connecting the swing member to the ring member and arranged along the first axis, and the second paired connection members 4B for connecting the swing member to the ring member and arranged along the second axis orthogonal to the first axis, and further has driving means 5 capable of oscillating the first connection members and the second connection members along a direction substantially orthogonal to a plane including the ring member, using a connection portion to the ring member as the oscillation center, and for oscillating the swing member by expanding and contracting the ring member to swing the first connection members and the second connection members. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供在围绕第一轴线的摆动中围绕第二轴线的摆动以及相对于彼此相差90°的相位的相同频率的二维扫描器。解决方案：该二维扫描仪1具有摆动构件2，环形构件3，其布置在摆动构件的外侧以使其与摆动构件一致，第一成对连接构件4A用于将摆动构件连接到环形构件并沿着第一轴线布置，以及第二成对连接构件4B，用于将摆动构件连接到环构件并且沿着与第一轴线正交的第二轴线布置，并且还具有驱动装置5，其能够使第一连接构件和第二连接构件沿着与包括环构件的平面大致正交的方向，使用与环构件的连接部作为振动中心，并且通过使环构件膨胀和收缩来摆动第一连接件来摆动摆动构件成员和第二连接成员。版权所有（C）2009，JPO＆INPIT

16. 发明专利

JP2009006428A Mems device equipped with getter film formed in sealed space 审中-公开
标题翻译：在密封空间中形成的膜装置的MEMS器件
公开(公告)号：JP2009006428A
公开(公告)日：2009-01-15
申请号：JP2007168965
申请日：2007-06-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： TAKEMOTO TAKESHI , NISHIDA HIROSHI , TORAYASHIKI OSAMU , IKEDA TAKASHI , ARAKI RYUTA
IPC分类号： B81B3/00 , G01C19/56 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To reduce volume of a sealed space and simplify a manufacturing process, while maintaining performance of a MEMS (Micro Electronic Mechanical System) device formed in the sealed space. SOLUTION: This MEMS device in the sealed space is formed by recessed parts 34, 36a, 36b and 36c of a glass substrate. The MEMS device is a vibrator 10 provided with a movable part (a ring or a suspension, for instance) and a fixed part (an electrode for detecting primary vibration, for instance), and is provided with getter films 40a, 40b, 40c and 40d formed on a surface of only the fixed part. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了减小密封空间的体积并简化制造过程，同时保持在密封空间中形成的MEMS（微电子机械系统）装置的性能。解决方案：密封空间中的MEMS器件由玻璃基板的凹部34,36a，36b和36c形成。 MEMS器件是设置有可动部（例如，环或悬架）和固定部（例如，用于检测主振动的电极）的振动器10，并且设置有吸气膜40a，40b，40c和 40d仅形成在固定部分的表面上。版权所有（C）2009，JPO＆INPIT

17. 发明专利

JP2007264138A Mems actuator 审中-公开
标题翻译： MEMS执行器
公开(公告)号：JP2007264138A
公开(公告)日：2007-10-11
申请号：JP2006086707
申请日：2006-03-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： SHIMODA KYOJI , ARAKI RYUTA
IPC分类号： G02B26/10 , B41J2/44 , G02B26/12 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide an MEMS actuator which easily oscillates an oscillation member at high speed and with a large amplitude, scans an object to be scanned in the main scanning direction, is miniaturized, and is provided at low cost. SOLUTION: The MEMS actuator is provided with oscillation members 13A and 13B which oscillate an oscillation member (a micromirror) 12 about a first axis; second movable electrodes 21A and 21B provided on the oscillation member; and second fixed electrodes 22A and 22B provided on a substrate so as to face to a second movable electrode along the axis direction of the oscillation member, wherein the axis of the oscillation member, the oscillation member, the second movable electrodes and the second fixed electrodes are arranged on substantially the same plane, an AC power source 40 applies a second AC voltage between the second movable electrodes and the send fixed electrodes, so that the oscillation member is oscillated also about the axis, which intersects at right angles with the oscillation member by electrostatic force generated by applying the second AC voltage. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种MEMS致动器，该MEMS致动器容易地以高速度和大幅度振荡振荡部件，以主扫描方向对被扫描物体进行小型化，并以低成本提供。解决方案：MEMS致动器设置有振荡构件13A和13B，振荡构件13A和13B围绕第一轴线振荡振荡构件（微镜）12; 设置在振荡部件上的第二可动电极21A，21B; 以及设置在基板上的第二固定电极22A和22B，以便沿着振荡部件的轴线方向与第二可动电极相对，其中振动部件，振动部件，第二可动电极和第二固定电极交流电源40在第二可动电极和发送固定电极之间施加第二交流电压，使得振荡部件也绕着与摆动部件成直角相交的轴线摆动，通过施加第二AC电压产生的静电力。版权所有（C）2008，JPO＆INPIT

18. 发明专利

JP2004279384A Oscillator manufacturing method, oscillator and photomask 审中-公开
公开(公告)号：JP2004279384A
公开(公告)日：2004-10-07
申请号：JP2003075154
申请日：2003-03-19
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , TAKEMOTO TAKESHI
IPC分类号： G01C19/56 , G01C19/5684 , H01L41/09 , H01L41/22 , H01L41/332 , H03H9/24 , G01P9/04
CPC分类号： G01C19/567 , H03H9/2431 , H03H2009/0233 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an oscillator to be manufactured in photolithographic and dry etching processes with its natural frequency having less dispersion. SOLUTION: A plurality of through-holes are formed on a ring of a ring oscillator R2. When a ring width W of the ring oscillator is reduced as a result of a machining error in manufacturing processes, a diameter d of each through-hole is increased. As a result, the mass of the ring oscillator R2 is greatly reduced, compared with that of a ring oscillator R1 having no through-hole. As the mass of the ring oscillator is reduced greater with the ring width w reduced, the fluctuation of the natural frequency of the ring oscillator is more suppressed. Thus, the fluctuation of the natural frequency of the ring oscillator R2 due to the machining error is suppressed, compared with that of the ring oscillator R1. COPYRIGHT: (C)2005,JPO&NCIPI

19. 发明专利

JP2004109059A Gyroscope installation method and gyroscope device 审中-公开
公开(公告)号：JP2004109059A
公开(公告)日：2004-04-08
申请号：JP2002275364
申请日：2002-09-20
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G01C19/00
摘要： PROBLEM TO BE SOLVED: To provide a gyroscope installation method and a gyroscope device for using the gyroscope having a small FS value for an application for requiring a large FS value. SOLUTION: Two gyroscopes 2-1, 2-2 or more are installed so as to cancel a rotation signal in the direction orthogonal to a rotational axis Z of a rotator. In the gyroscopes 2-1, 2-2, angles θ 1 , θ 2 between the rotational axis Z and measurement axes z 1 , z 2 meet formula (1) ¾cosθ i ¾ i /ω MAX ¾. In formula (1), θ i (deg) is the angle between the measurement axis of the i-th gyroscope and the rotational axis of the rotator, FS i (deg/s) is a full scale of the i-th gyroscope and ω MAX (deg/s) is the maximum angular velocity of the rotational axis of the rotator. COPYRIGHT: (C)2004,JPO

20. 发明专利

JP2012083338A Vibrator, and oscillator and gas detector including the same 审中-公开
标题翻译：振动器，振动器和气体探测器，包括它们
公开(公告)号：JP2012083338A
公开(公告)日：2012-04-26
申请号：JP2011187157
申请日：2011-08-30
申请人： Sumitomo Precision Prod Co Ltd , Univ Of Tokyo , 住友精密工業株式会社 , 国立大学法人東京大学
发明人： JEAN JACQUES DELAUNAY , UTSUMI YURARO , YAMADA ICHIRO , TORAYASHIKI OSAMU , ARAKI RYUTA
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To increase resonance frequency variation responding to deformation of a beam member.SOLUTION: A gas sensor 1 includes first and second beam members 2, 3 which are coupled with each other and driven by vibration. The first beam member 2 has deformable gas sensitive films 4. The first beam member 2 is deformed with an aspect different from that of the second beam member 3, by deformation of the gas sensitive films 4.
摘要翻译：要解决的问题：增加响应于梁构件的变形的共振频率变化。解决方案：气体传感器1包括彼此耦合并由振动驱动的第一和第二梁构件2,3。第一梁构件2具有可变形的气体敏感膜4.第一梁构件2通过气敏膜4的变形而与第二梁构件3的形状不同的方向变形。（C）2012 ，JPO＆INPIT

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