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    • 14. 发明专利
    • MANUFACTURE OF SEMICONDUCTOR ELEMENT MOUNTING SUBSTRATE
    • JPH02224264A
    • 1990-09-06
    • JP1155090
    • 1990-01-20
    • SUMITOMO ELECTRIC INDUSTRIES
    • DOI YOSHIHIKOOGASA NOBUOIGARASHI TADASHIOTSUKA AKIRA
    • H01L23/36H01L23/373
    • PURPOSE:To provide a title method with which the title substrate can sufficiently deal with integrated circuits made large-sized and high density by forming an electrically insulating inorganic coated film into a specific thickness by a PVD or CVD process on the surface side of a particular metal plate or a composite metal plate. CONSTITUTION:An electrically insulating inorganic coated film 2 is formed into a 0.1-20mum thickness by a physical vapor deposition(PVD) or chemical vapor deposition(CVD) process on the surface or side of a metal plate 1 selected among a group comprising Mo, W, and coval, 42 alloy (42% Ni-Fe), copper cladding coval cladding copper, copper cladding 42 alloy cladding copper, and 42 alloy cladding copper cladding 42 alloy, all having a 3.0-9.0X10 cm/cm. deg.C thermal expansion coefficient. Accordingly, a substrate 3 approximates a mounted semiconductor device 6 in its thermal expansion coefficient, and hence it can reduce the influence of any stress caused by mismatching of thermal expansion and further it can provide desired electrical insulating property. Hereby, a title substrate can deal with the semiconductor device 6 which has been made high density and large-sized.