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11. 发明专利

JPH08293277A METHOD FOR STARTING FIELD-EMISSION ELECTRON GUN 失效
公开(公告)号：JPH08293277A
公开(公告)日：1996-11-05
申请号：JP9841295
申请日：1995-04-24
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/073 , H01J37/248
摘要： PURPOSE: To prevent the occurrence of an abnormal state such as a discharge and destruction of an emitter at the occurrence of the abnormal state by automatically starting a field-emission electron gun. CONSTITUTION: A drawing voltage value is calculated at each step according to each anticipated emission current value that follows both data from a data table 12 for automatic starting and a program for automatically starting a field-emission electron gun, and the calculated drawing voltage is applied at each step. In each step, when the measured emission current value reaches the critical value of emission current at each step, the drawing voltage at that step is calculated based on the measured emission current value, and the drawing voltage applied at that time is lowered to the calculated drawing voltage.

12. 发明专利

JPH06223773A MAGNETIC FIELD MEASURING METHOD 失效
公开(公告)号：JPH06223773A
公开(公告)日：1994-08-12
申请号：JP835193
申请日：1993-01-21
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J49/32
摘要： PURPOSE:To measure magnetic field strength at the beam center orbit with high accuracy in an overlap field type mass spectrograph. CONSTITUTION:Detector housings 24 and 25 are inserted into the hole sections of electrodes 20 and 21. Magnetic field detectors H1 through H3 are provided for the detector housing 24, and magnetic field detectors H4 through H6 are also provided for the detector housing 25. The outputs of these are converted into current and voltage so as to be amplified by amplifiers A1 through A6, so that the resultant is inputted to a control means 30. The control means 30 reads in the coordinates R1 through r6 in each radius vector direction of the magnetic field detectors H1 through H6 and measured values B1 through B6 so as to allow a magnetic field strength distribution B(r) in the radius vector direction to be approximated to a specified curve by means of least square, so that the magnetic field strength at the beam center orbit O is thereby determined so as to be outputted.

13. 发明专利

JPH04264348A SECONDARY ION ANALYZER 失效
公开(公告)号：JPH04264348A
公开(公告)日：1992-09-21
申请号：JP4751391
申请日：1991-02-20
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： G01N23/22 , H01J49/26
摘要： PURPOSE:To provide a new secondary ion analyzer capable of preventing charge-up in the case of analyzing positive secondary ions. CONSTITUTION:In the case of analyzing positive secondary ions in a sample having insulating property, switches 16 and 17 are charged over respectively, and (+5KV) is impressed upon a sample support stand 3 from the second power supply 4B, so as to make a sample 2 to hold positive electric potential. Voltage (+5KV) generated by (-5KV) from the third power supply 14 and (+10KV) from the fourth power supply 15 is impressed upon the cathode 11 of an electron gun, and (+10KV) from the above- mentioned fourth power supply 15 is impressed upon an anode 12. By heating the cathode 11 by means of a heating power supply 13, electrons are generated from the cathode. As for said electrons, since (+5KV) is impressed upon the cathode and (+10KV) is impressed upon the anode 12 respectively, the electrons can obtain kinetic energy of 5KeVK, and can proceed in the sample surface direction. Since the positive potential (+5KV) is held by the sample 2, the electrons are decelerated by means of the stopping electric potential between said anode 12 and the sample 2, and can reach the vicinity of the sample surface at approximately OV, and can form electron cloud in the vicinity of said sample surface. When the sample surface is charged up, the electrons corresponding to the charge-up degree can be supplied to the sample surface.

14. 发明专利

JPH04237942A INTERFERING ION REMOVING METHOD FOR SUPERIMPOSED FIELD TYPE MASS SPECTROMETER 失效
公开(公告)号：JPH04237942A
公开(公告)日：1992-08-26
申请号：JP443591
申请日：1991-01-18
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： G01N27/62 , H01J49/32
摘要： PURPOSE:To remove interfering ions by energy filtering in a superimposed field type SIMS. CONSTITUTION:It is very difficult to analyze the mass with interfering ions under double-focusing conditions in a superimposed field type mass spectrometer as shown in the figure A. Under no double-focusing conditions, energy dispersion occurs as shown by the figure B or C. When the mass with no interfering ions is to be analyzed, a superimposed field section is set to satisfy the double- focusing conditions, and when the mass with interfering ions is to be analyzed, the superimposed field section is set out of the double-focusing conditions. Energy filtering can be performed, and interfering ions can effectively be removed.

15. 发明专利

JP2001242106A AUGER ELECTRON SPECTROSCOPE AND AUGER ELECTRON SPECTROSCOPY 失效
公开(公告)号：JP2001242106A
公开(公告)日：2001-09-07
申请号：JP2000055229
申请日：2000-03-01
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： G01N23/227 , H01J37/252 , H01J37/30 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an Auger electron spectroscope, capable of performing Auger analysis in a high-vacuum atomosphere rather than in an ultrahigh vacuum atomosphere. SOLUTION: A central control unit 37 issues a command for an ion beam irradiation system control unit 32, to perform ion beam scanning on a prescribed region, including an analyzing point and also issues a command to an electron beam irradiation system control unit 11 and an electron spectroscope control unit 16 to start the Auger analysis of the analyzing point. As a result, the element of the analysis point is analyzed, while the contaminant accumulated on the analyzing point is removed through irradiation with an ion beam.

16. 发明专利

JP2000292384A SAMPLE ANALYTICAL METHOD AND ELECTRON BEAM ANALYTICAL DEVICE 失效
公开(公告)号：JP2000292384A
公开(公告)日：2000-10-20
申请号：JP9473599
申请日：1999-04-01
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/22 , G01N23/225 , G01N23/227
摘要： PROBLEM TO BE SOLVED: To execute drift correction correctly, even if a sample surface shape is changed by ion sputtering onto a sample at the time of analysis of the sample. SOLUTION: A drift correction signal forming means 16 forms binary image data by executing binarization processing of image data sent from a central control device 17, and obtains a coordinate of the central position of a pit based on the binary image data. Also, the drift correction signal forming means 16 forms binary image data by executing binarization processing of image data memorized in an image data memory means 20 before analysis, and obtains a coordinate of the central position of a pit based on the binary image data. The drift correction signal forming means 16 obtains the difference between the coordinates and sends it to a deflection control means 14 as drift correction data.

17. 发明专利

JPH0961385A AUGER ELECTRON SPECTROSCOPE 失效
公开(公告)号：JPH0961385A
公开(公告)日：1997-03-07
申请号：JP22162195
申请日：1995-08-30
申请人： JEOL LTD
发明人： KUDOU MASATO , YAMADA TAKAHISA
IPC分类号： G01N23/227 , H01J37/252 , H01J49/44
摘要： PROBLEM TO BE SOLVED: To eliminate the influence of the magnetic field near a sample, and also eliminate the reduction in spatial resolution and distortion of spectrum to perform a highly precise analysis. SOLUTION: In the Auger electron spectroscope for emitting an accelerated electron to a sample 4 and spectrally dividing the Auger electron generated from the sample surface to analyze the sample surface, a magnetic filed cancel coil 10 for canceling the magnetic field appearing among an objective lens 2, the sample 4 and a spectroscope 5 is wound around the objective lens 2, around a magnet preventing cylinder 3 provided on the lower part of the objective lens 2, or around a magnetic shield for covering the spectroscope 5, and direct and alternating currents are made to flow thereto to control the magnetic field near the sample. A cancel magnetic field for removing the influence of the geomagnetic field appearing near the sample surface or an external floating magnetic field can be generated, and the bad effect by these magnetic fields can be effectively canceled.

18. 发明专利

JPH06223772A ELECTRODE VOLTAGE SETTING METHOD 失效
公开(公告)号：JPH06223772A
公开(公告)日：1994-08-12
申请号：JP835293
申请日：1993-01-21
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： G01N27/62 , H01J49/26
摘要： PURPOSE:To control the parameter lambda1 which determines the angular convergent point of a mass spectrograph, and the parameter lambda2 which determines secondary aberration, independently in an overlap field type mass spectrograph having a six pole type electrode. CONSTITUTION:A DELTAM controller 17 is provided for controlling lambda1, and a DELTAD controller 18 is provided for controlling lambda2. LM and MD set by these controllers are simultaneously inputted to an adder 19 and a subtracter 20. The adder 19 operates a formula (DELTAM+DELTAD) so as to allow resultant to be informed to a power supply circuit 14. This action thereby allows the power supply circuit 14 to generate voltage Vso corresponding to (DELTAM+DELTAD), to that the voltage is then applied to an electrode 5 and electrode 6. The subtracter 20 operates a formula (DELTAM-DELTA) so as to allow the resultant to be informed to a power supply circuit 16. This action thereby allows the power supply circuit 16 to generate voltage Vsi corresponding to (DELTAM-DELTAD), so that the voltage is then applied to an electrode 3 and an electrode 4.

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