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    • 14. 发明专利
    • Method for producing metallic microsphere
    • 生产金属微球的方法
    • JP2011026697A
    • 2011-02-10
    • JP2010069860
    • 2010-03-25
    • Hitachi Metals Ltd日立金属株式会社
    • KUMAMOTO SHINGO
    • B22F9/08H01L21/60
    • PROBLEM TO BE SOLVED: To provide a method for producing metallic microspheres reduced in depressions caused on the surfaces of metallic microspheres and with the characteristics of surface smoothness in order to improve an electrical connection reliability, in the achievement of multilayering a wiring board, micronizing a connection terminal part, or the like by using the metallic microspheres.
      SOLUTION: In the method for producing metallic microspheres, Cu droplets are subjected to spherical solidification in an atmosphere comprising 10 to 800 vol.ppm oxygen, and the balance inert gas. Further, preferably, the Cu droplets are formed by dropping Cu molten metal to which pressure and vibration are applied from an orifice.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 解决问题:为了提供一种在金属微球表面上形成的减少凹陷的金属微球的制造方法和具有表面平滑性的特性,以提高电连接的可靠性,在实现多层布线基板 ,通过使用金属微球使连接端子部件等微粉化。 解决方案:在金属微球的制造方法中,将Cu液滴在含有10〜800体积ppm的氧气和余量的惰性气体的气氛中进行球化固化。 此外,优选地,通过滴下从孔口施加压力和振动的Cu熔融金属来形成Cu液滴。 版权所有(C)2011,JPO&INPIT
    • 15. 发明专利
    • Molten metal supply apparatus
    • 金属供应设备
    • JP2006231381A
    • 2006-09-07
    • JP2005051270
    • 2005-02-25
    • Hitachi Metals Ltd日立金属株式会社
    • SATO KOJIITOGA KENJIKUMAMOTO SHINGOIKEDA TAKAFUMIAKISHIGE MANABUNISHI YUICHI
    • B22D39/02B22D41/01
    • PROBLEM TO BE SOLVED: To provide a small-sized molten metal supply apparatus which replaces the atmosphere of an ingot and melt the ingot to produce molten metal and supplies the molten metal to a following process, and in which variation arising at charging a master alloy and fluctuation in pressure by increasing the capacity do not influence the quality of molten alloy.
      SOLUTION: The molten metal supply apparatus is provided with an ingot additional charging part and a melting chamber connected to the lower part of the ingot additional charging part, the ingot additional charging part has a insertion chamber in which the ingot is inserted and held, and a replacing chamber positioned below the insertion chamber and connected to the melting chamber, the ingot is introduced into the melting chamber after replacing the atmosphere, with an inlet side shielding member arranged between the insertion chamber and the replacing chamber, and an outlet side shielding member arranged between the replacing chamber and the melting chamber and a feeding device for introducing the ingot from above into the melting chamber positioned below with a controlled feeding speed.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种小型熔融金属供给装置,其替代锭的气氛并熔化锭以产生熔融金属并将熔融金属供应到后续过程中,并且在充电中产生变化 主合金和通过增加容量的压力波动不影响熔融合金的质量。 解决方案:熔融金属供给装置设置有锭附加充电部和与锭附加充电部的下部连接的熔化室,铸锭附加充电部具有插入槽,插入该铸锭, 以及位于插入室下方并连接到熔化室的置换室,在更换大气之后,将铸锭引入到熔化室中,其中入口侧屏蔽构件设置在插入室和更换室之间,并且出口 设置在所述更换室和所述熔化室之间的侧面屏蔽构件以及用于将锭从上方引入到以受控进给速度定位在下方的熔化室中的进料装置。 版权所有(C)2006,JPO&NCIPI
    • 19. 发明专利
    • HEAT SPREADER AND MANUFACTURE THEREOF, AND SEMICONDUCTOR DEVICE USING THE SAME
    • JPH11297908A
    • 1999-10-29
    • JP732399
    • 1999-01-14
    • HITACHI METALS LTD
    • KUMAMOTO SHINGOKISHIGAMI ICHIRONAKANISHI HIROKIYAMADA HIDEYA
    • H01L23/373
    • PROBLEM TO BE SOLVED: To reduce an increase in a coefficient of thermal expansion and have excellent thermal expansion characteristic and sufficient thermal conductive characteristic, by a method wherein a thermal expansion restriction layer is formed with a high thermal conductive layer of a Cu-based material, low thermal expansion layer of a Fe-Ni-based alloy having a through hold, and a metal having a coefficient of thermal expansion of a specified value or less. SOLUTION: A high thermal conductive layer of a Cu-based metal and a low thermal expansion layer of a Fe-Ni-based alloy having a plurality of through holes are laminated to form a basic structure 4 of a multilayer structure. A high thermal conductive layer 3 is filled up in a through hole 2 on both sides of a low thermal expansion layer 1, and continued via the through hole 2. As a thermal expansion restriction layer 5 composed of a metal in which a coefficient of thermal expansion α30-800 deg.C is 7.5×10 / deg.C or less, at least one species of metal layer out of a Mo-based metal and a W-based metal is disposed outside the basic structure 3 of a multilayer structure. Thus, it is possible to obtain low thermal expansion characteristic in a high temperature region of 500 deg.C or more and ensure high thermal conductivity.
    • 20. 发明专利
    • HEAT SPREADER AND ITS MANUFACTURE, AND SEMICONDUCTOR DEVICE USING THE HEAT SPREADER
    • JPH11186476A
    • 1999-07-09
    • JP35291597
    • 1997-12-22
    • HITACHI METALS LTD
    • KISHIGAMI ICHIRONAKANISHI HIROKIYAMADA HIDEYAKUMAMOTO SHINGO
    • H01L23/373
    • PROBLEM TO BE SOLVED: To reduce anisotropy of a thermal expansion coefficient which exceeds a curie point and which reaches a high temperature and to provide a superior thermal expansion characteristic and a sufficient thermal conduction characteristic, by forming a thermal expansion suppression layer whose specified thermal expansion coefficient is not more than a specified value. SOLUTION: Three stripe-like metal boards 1 are provided and Cu metals 2 are arranged between the layers. The Cu metal 2 is also arranged on a surface outside the stripe-like metal board. At least one type of metal layer 3 in a Mo metal and a W metal is arranged as the thermal expansion suppression layer constituted of the metal whose thermal expansion coefficient α30-850 deg.C is not more than minus six-th power/ deg.C of 7.5×10 on the outer side, for example. Then, the Cu metal 2 is arranged on the outer side. Thus, a point that the thermal expansion characteristic at the high temperature at the time of junction by silver brazing is insufficient can be improved. Consequently, an inexpensive heat spreader having a high thermal conduction characteristic, low thermal expansion ability and less anisotropy of thermal expansion coefficient and less warp can be used and the cost of the semiconductor device can be reduced.