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    • 18. 发明专利
    • DEFECT INSPECTING DEVICE
    • JPS58155730A
    • 1983-09-16
    • JP3794582
    • 1982-03-12
    • HITACHI LTD
    • SUDA TADASHIKAMEYAMA MASAYOSHINAGATOMO HIROTOAKIBA MASAKUNI
    • G01N21/88G01N21/956H01L21/66
    • PURPOSE:To enable to detect the various defects on an IC chip in a non-contact state by a method wherein a defect extraction circuit is provided for every photo detector, and the final defect detecting signal is obtained by having an OR of the output pulse on a plurality of defect extraction circuits. CONSTITUTION:The output signal of the photo detectors is supplied to an input terminal Sig.IN and inputted to a comparator 34 through the intermediary of an LPF32. Also, the output of the LPF32 is inputted to a sample holding circuit 36, the output of the adder is inputted to a comparator 34 and turned to the reference voltage of the comparator. The output of the comparator 34 is inputted to an AND element 39. A forbidding pulse Een, to be used to eliminate the artificial extraction defect generating at the rise time of a DC signal, and a selective pulse Ese, to be used to eliminate the quasi-extraction defect signal generating at the existing part of an AC component, are imputted to the element 39. The element 39 outputs a defect detection signal by having the AND of three input signals. The final defect detection signal is obtained by having the OR of the defect detection signal of a plurality of defect extraction circuits.