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11. 发明专利

JP2006310453A Process tube and its manufacturing method 审中-公开
标题翻译：过程管及其制造方法
公开(公告)号：JP2006310453A
公开(公告)日：2006-11-09
申请号：JP2005129520
申请日：2005-04-27
申请人： Seiko Epson Corp , Tosoh Quartz Corp , セイコーエプソン株式会社 , 東ソー・クォーツ株式会社
发明人： SUZUKI MASATO , TANAE KAZUHIRO
IPC分类号： H01L21/22 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a process tube and its manufacturing method capable of suppressing lateral deformation of a perforated plate and top plate even if repeatedly used under high temperature.
SOLUTION: A process tube 100 comprises a cylindrical tube body 1, a top plate 2 fitted to the upper end of the tube body 1, and a perforated plate 3 fitted away from the top plate 2 on the inner side of the tube body 1. The top plate 2 and the perforate plate 3 are dome-shaped. The upper end 5 of the tube body 1, comprising a joint (a) between the top plate 2 and the tube body 1, and a joint (b) between the perforated plate 3 and the tube body 1, is thicker than the parts other than the upper end 5.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供即使在高温下重复使用的能够抑制多孔板和顶板的横向变形的工艺管及其制造方法。解决方案：处理管100包括圆柱形管体1，装配到管体1的上端的顶板2和从顶板2装配在管体内侧的多孔板3 顶板2和穿孔板3是圆顶形的。管体1的上端5包括顶板2和管主体1之间的接头（a）和多孔板3与管体1之间的接头（b）比其它部分更厚（C）2007，JPO＆INPIT

12. 发明专利

JP2005145766A Method for producing silica glass molding 审中-公开
标题翻译：生产二氧化硅玻璃成型的方法
公开(公告)号：JP2005145766A
公开(公告)日：2005-06-09
申请号：JP2003386762
申请日：2003-11-17
申请人： Tosoh Corp , Tosoh Quartz Corp , 東ソー・クォーツ株式会社 , 東ソー株式会社
发明人： OSADA HIRONARI , KUDO MASAYUKI , TSUYOSHI TORU , KIMURA SHIGEO
IPC分类号： C03B20/00
CPC分类号： C03B19/06 , C03B19/066 , C03B20/00
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a silica glass molding, which method does not necessitate complicated after-processings, such as machining and flaming, for attaining a desired shape or markedly reduces such after-processings, if necessary, and provides high productivity.
SOLUTION: The silica glass molding is obtained by kneading a silica glass powder comprising spherical particles having the maximum and minimum diameters in the range of 0.01 to 20 μm and containing 5 to 70 wt.%, based on the entire particles, of 0.2 μm or smaller particles with an organic binder in such a mixing ratio that the rate of the powder in the kneaded mixture with the organic binder is 65 to 85 wt.%, hot-extrusion-molding the mixture, degreasing the molding by heating, and vacuum-sintering the degreased molding at 1,200-1,400°C. The obtained silica glass molding has a density of 2.0 to 2.2 g/cm
3 .
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供石英玻璃成型体的制造方法，该方法不需要诸如机械加工和燃烧的复杂的后处理，以获得所需的形状，或者如果需要，显着地减少这种后处理，并提供高生产率。解决方案：二氧化硅玻璃成型体是将具有最大和最小直径的球形颗粒的二氧化硅玻璃粉末在0.01至20μm的范围内混合，并且含有基于整个颗粒的5-70重量％ 0.2μm以下的有机粘合剂的粒子，使混合物中的粉末与有机粘合剂的比例为65〜85重量％，将该混合物进行热挤压成型，加热脱模，并在1200-1,400℃下对脱脂模塑进行真空烧结。得到的石英玻璃成型体的密度为2.0〜2.2g / cm 3。版权所有（C）2005，JPO＆NCIPI

13. 发明专利

JP2004284828A High durability quartz glass, its manufacturing method, and member and device using the same 有权
标题翻译：高耐久性QUARTZ玻璃及其制造方法，以及使用其的部件和装置
公开(公告)号：JP2004284828A
公开(公告)日：2004-10-14
申请号：JP2003065000
申请日：2003-03-11
申请人： Tohos Sgm Kk , Tosoh Corp , Tosoh Quartz Corp , 東ソ−・エスジ−エム株式会社 , 東ソー・クォーツ株式会社 , 東ソー株式会社
发明人： ARAI KAZUYOSHI , TAKAHATA TSUTOMU , HASHIMOTO SHINKICHI , KIRITANI HIDEAKI , HARADA YOSHINORI
IPC分类号： C03B20/00 , C03C3/06 , C03C3/085 , C03C3/087 , C03C3/095 , C03C4/08 , H01L21/3065
CPC分类号： C03C3/06 , C03C2201/32 , C03C2201/3411 , C03C2201/3417 , C03C2201/3423 , C03C2201/36 , C03C2201/54
摘要： PROBLEM TO BE SOLVED: To provide a quartz glass having a high purity and exhibiting enhanced durability while keeping good processability and machinability, and reduced dusting property as a member of a semiconductor production apparatus or a liquid crystal display production apparatus using a halide gas and/or its plasma; and to provide a device equipped with such excellent quartz glass.
SOLUTION: The highly durable quartz glass is characterized by containing aluminum and at least one element (M) selected from the group consisting of group 2A elements, group 3A elements and group 4A elements of the periodic table. A method for manufacturing the quartz glass, and the quartz glass member and the device using the quartz glass are also provided.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有高纯度并且在保持良好加工性和机械加工性的同时显示出增强的耐久性的石英玻璃，以及作为半导体制造装置的构件或使用卤化物的液晶显示器制造装置的降低的除尘性气体和/或其等离子体; 并提供配备有这样优良的石英玻璃的装置。解决方案：高耐用的石英玻璃的特征在于含有铝和至少一种选自元素周期表的2A族元素，3A族元素和4A族元素的元素（M）。还提供了一种制造石英玻璃的方法，以及石英玻璃构件和使用石英玻璃的装置。版权所有（C）2005，JPO＆NCIPI

14. 发明专利

JP2004025412A Surface correction method of polishing surface plate and surface correction material used for the same 审中-公开
公开(公告)号：JP2004025412A
公开(公告)日：2004-01-29
申请号：JP2002189150
申请日：2002-06-28
申请人： Tosoh Corp , Tosoh Quartz Corp , 東ソー・クォーツ株式会社 , 東ソー株式会社
发明人： KURAMOCHI TOSHIHITO , TAKATO SHUJI , YOKOMIZO YUKO , ASANO MUTSUMI
IPC分类号： B24B53/017 , B24D3/00 , B24D7/00 , B24D7/06 , B24B37/00
摘要： PROBLEM TO BE SOLVED: To provide a surface correction method of a polishing surface plate and a surface correction material for it in the case of polishing a polished material with the polishing surface plate using polishing compact mainly consisting of inorganic grains. SOLUTION: The surface correction method of the polishing surface plate and the surface correction material for it are used arranging a member made of a predetermined material on a part or a whole surface with respect to the correction of the correction material used for the surface correction, and adding correction fluid by mutually carrying out abrasive movement of the polishing surface plate and/or the surface correction material. COPYRIGHT: (C)2004,JPO

15. 发明专利

JP2003151911A PROCESS TUBE AND METHOD FOR IMPROVING HEAT-RESISTANT PROPERTIES AND DURABILITY IN THE PROCESS TUBE 审中-公开
公开(公告)号：JP2003151911A
公开(公告)日：2003-05-23
申请号：JP2001348114
申请日：2001-11-13
申请人： TOSOH QUARTZ CORP
发明人： TANAE KAZUHIRO , OYAMADA MASARU
IPC分类号： H01L21/22 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To prevent thermal deformation, in the top board of a process tube whose diameter is increased. SOLUTION: In the process tube for semiconductor treatment, comprising cylindrical quartz glass 10 and a top board, at least the outer-periphery surface site of the shape of a top board 2 is set as a spherical shape. As a result, five times of heating up to 1,200 deg.C from the room temperature and cooling to 800 deg.C is made for two cycles, thus setting deflection at the center section of the dome- like top board 2, to approximately one sixth of a cylindrical top board. Additionally, when a heat-resistant rod 31 is mounted onto the surface of the top board 2 via a quartz glass capillary 3, the deflection can be reduced to approximately one fourth.

16. 发明专利

JP2014211388A フローセルの製造方法及びフローセル有权
标题翻译：流动细胞和流动细胞的制造方法
公开(公告)号：JP2014211388A
公开(公告)日：2014-11-13
申请号：JP2013088478
申请日：2013-04-19
申请人：東ソー・クォーツ株式会社 , Tosoh Quartz Corp
发明人： SUGAWARA MASATO , SHINDO AKIRA , HONDA KEIJI
IPC分类号： G01N21/05
CPC分类号： G01N21/05
摘要：【課題】石英ガラスからのみなるフローセルを製造できるようにする。【解決手段】石英ガラス製のフローセルの製造方法であって、直方体の石英ガラスに貫通穴を形成して測定室5とし、この測定室5に通じる2本の流路21を上面25から形成する。貫通穴の両側を透明石英ガラス板3で覆って測定室5とし、窓4を形成すると共に上面25を研磨する。別体の石英ガラス体に切削加工によってニップルを挿入するためのネジ穴11、11を形成する。更に穴11aを延長形成して底面15まで貫通させ、流路21に合致させる。底面15を同様に研磨する。流路21とニップル穴を合致させ、両者の研磨面を密着させ、加熱しながら接合面に圧力を加えて一体化し、石英ガラスのみからなるフローセルを得る。【選択図】図1
摘要翻译：要解决的问题：可以制造仅由石英玻璃制成的流通池。解决方案：在由石英玻璃制成的流动池的制造方法中，在长方体形石英玻璃中形成通孔作为测量与该测量室5连通的两个通道21由上表面25形成。对于测量室5，通孔的两侧被透明石英玻璃板3覆盖，形成窗口4，并且抛光上表面25。用于插入接头的螺纹孔11通过切割工作形成在另一石英玻璃体中。孔11a形成为更靠近底面15并与相应的通道21相连接。类似地，底面15被抛光。每个通道21和相应的接头孔都被接合，使得两个抛光面彼此紧密接触。两者都是通过在加热时施加热量来集成的。因此，仅获得由石英玻璃形成的流动池。

17. 发明专利

JP2013112571A Method and apparatus for manufacturing quartz glass cylinder material 有权
标题翻译：制造石英玻璃圆筒材料的方法和装置
公开(公告)号：JP2013112571A
公开(公告)日：2013-06-10
申请号：JP2011260930
申请日：2011-11-29
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： KUDO MASAKAZU , SATO MIYUKI , IZAWA YUKIHIRO , KATO TADAAKI
IPC分类号： C03B20/00
CPC分类号： C03B19/1484 , C03B19/1492
摘要： PROBLEM TO BE SOLVED: To inexpensively manufacture various quartz glass cylinder materials.SOLUTION: A furnace 1 is composed of a furnace roof 2, a furnace bottom 3 having a central opening 31, and a furnace wall 4. The furnace bottom 3 is supported by a column support 7 through a bracket 71. A circular refractory core 9 is disposed at the center of the furnace 1. The column support 7 can rotate and move up and down, and the furnace bottom 3 can rotate and move up and down with respect to heat sources 5 circularly arranged on the furnace roof 2. Quartz glass material powder is supplied to the heat sources 5 and melted. The core 9 inhibits heat radiation during melting and prevents temperature reduction in the melted parts. By lowering the furnace bottom 3 while rotating it, the molten quartz glass accumulates and solidifies in a cylinder shape on the furnace bottom 3, and a cylindrical quartz glass cylinder material 8 is obtained.
摘要翻译：要解决的问题：要廉价地制造各种石英玻璃圆筒材料。解决方案：炉1由炉顶2，具有中心开口31的炉底3和炉壁4组成。炉底3通过支架71由柱支撑件7支撑。圆形耐火芯9设置在炉1的中心。柱支撑件7可以上下旋转并且上下移动，并且炉底3可以相对于循环地布置在炉顶2上的热源5上下旋转将石英玻璃材料粉末供应到热源5并熔化。芯9在熔化期间抑制热辐射，并防止熔化部分的温度降低。通过在使炉底3旋转的同时降低炉底3，熔融石英玻璃在炉底3上积存并固化成圆筒状，得到圆筒状的石英玻璃圆筒材8。版权所有（C）2013，JPO＆INPIT

18. 发明专利

JP2011162392A Mold material for production of quartz glass molding and method for producing quartz glass molding 审中-公开
标题翻译：用于生产石墨玻璃成型的模具材料和生产石英玻璃模具的方法
公开(公告)号：JP2011162392A
公开(公告)日：2011-08-25
申请号：JP2010026808
申请日：2010-02-09
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： CHIBA KAZUYUKI
IPC分类号： C03B19/02 , C03B20/00 , G02B1/00
CPC分类号： C03B19/09
摘要： PROBLEM TO BE SOLVED: To provide a low-cost method for producing a quartz glass molding.
SOLUTION: Six circular carbon plates of a width of 20 cm, a length of 30 cm, and a thickness of 3 cm are assembled together on a circular carbon plate of a thickness of 1 cm and a diameter of 50 cm to form a regular hexagonal prism outer cylinder, and the outside of the cylinder is fixed with a specially carbon jig. Further, carbon felt is applied to the bottom and inside surface of the cylinder. A cylindrical quartz glass preform of a diameter of 29 cm and a height of 24 cm is placed inside the regular hexagonal prism and is molten by heating to 1,700°C for 3 hours to obtain a regular hexagonal prism quartz glass molding of a side of 20 cm and a height of 15 cm.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种生产石英玻璃模制品的低成本方法。解决方案：将宽度为20cm，长度为30cm，厚度为3cm的六个圆形碳板组装在厚度为1cm，直径为50cm的圆形碳板上，以形成正六棱柱外筒，圆筒外侧用特殊碳夹固定。此外，碳毡被施加到圆筒的底部和内表面。将直径29cm，高24cm的圆柱形石英玻璃预成型件放入正六棱柱内，通过加热至1,700℃熔融3小时，得到20边的正六棱柱石英玻璃成形体厘米，高15厘米。版权所有（C）2011，JPO＆INPIT

19. 发明专利

JP2011037687A Mold for molding glass material and method for molding glass material using the same 有权
标题翻译：用于模制玻璃材料的模具和使用其模制玻璃材料的方法
公开(公告)号：JP2011037687A
公开(公告)日：2011-02-24
申请号：JP2009188684
申请日：2009-08-17
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： ONUKI YUKIO
IPC分类号： C03B19/02 , G02B3/00
CPC分类号： Y02P40/57
摘要： PROBLEM TO BE SOLVED: To improve the operation efficiency by suppressing the operation man hour by reducing the weight of a load plate loaded on a pressing fixture in the mold to a weight that can be handled by human power. SOLUTION: When a glass material used for molding a cylindrical glassware is heated and melted, the glass material is processed to a pillar shape having a recessed central part, that is, a shape close to a cylindrical shape by pressing the central part of the glass material. Since the volume of the central part of the glass material which has been heated and melted significantly decreases, it is possible to significantly decrease the weight of the central part to be ground in a grinding step, thus capable of saving material. The load plate having a required weight for use in the pressing is divided into a plurality of load plates each having a weight of 5 kg or more and 10 kg or less per sheet, so that the load plate can be handled by human power, thereby reducing the operation man hour for assembling the mold. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：通过将装载在模具中的按压装置上的负载板的重量减小到能够由人力处理的重量来抑制操作人员时间，从而提高操作效率。解决方案：当用于模制圆柱形玻璃器皿的玻璃材料被加热和熔化时，玻璃材料被加工成具有凹陷中心部分的柱状，即通过按压中心部分而接近圆柱形的形状的玻璃材料。由于被加热熔融的玻璃材料的中央部分的体积明显减小，因此可以在研磨步骤中显着地减少要研磨的中心部分的重量，从而能够节省材料。具有用于压制的所需重量的负载板被分成多个负载板，每个负载板的每个板的重量为5kg以上且10kg以下，使得负载板可以通过人力来处理，由此减少组装模具的操作时间。版权所有（C）2011，JPO＆INPIT

20. 发明专利

JP2010085252A Surface layer analysis method of quartz glass product 有权
标题翻译： QUARTZ玻璃产品的表面层分析方法
公开(公告)号：JP2010085252A
公开(公告)日：2010-04-15
申请号：JP2008254725
申请日：2008-09-30
申请人： Tosoh Analysis & Research Center Co Ltd , Tosoh Quartz Corp , 東ソー・クォーツ株式会社 , 株式会社東ソー分析センター
发明人： TAKADA TOMOAKI , TONAN MASANAO , ARAKAWA TOSHIHIKO , SAITO HIDEJI
IPC分类号： G01N1/28
摘要： PROBLEM TO BE SOLVED: To form simply a space for storing etching liquid on the surface, and to prevent leak of the etching liquid, in a method for analyzing nondestructively a metal included in a surface layer of a quartz glass product such as a quartz glass tube.
SOLUTION: A ring-shaped member 10 made of a polyethylene resin is placed on a surface to be analyzed of the quartz glass tube 3, heated and melted by a hot plate 4, and welded integrally on the surface, to thereby form a storage space for etching liquid. Hydrofluoric acid is injected and stored into the storage space to keep a contact state for a fixed time, to thereby dissolve as deep as 1 μm. A part of dissolved solution is sampled, and a dissolved quartz glass amount is determined by an inductively coupled plasma emission spectrometry. Further, residual dissolved solution is vaporized and dried, and then an evaporation residue is dissolved with dilute nitric acid to obtain recovery liquid, and a metal amount in the recovery liquid is determined by an inductively coupled plasma mass spectrometry.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了简单地在表面上形成用于存储蚀刻液的空间，并且为了防止蚀刻液的泄漏，在非破坏性地分析包括在石英玻璃制品的表面层中的金属例如石英玻璃管。解决方案：将由聚乙烯树脂制成的环形构件10放置在石英玻璃管3的待分析表面上，由热板4加热熔化，并整体焊接在表面上，从而形成用于蚀刻液体的存储空间。将氢氟酸注入并储存在储存空间中以保持接触状态一段固定的时间，从而溶解至1μm以下。对溶解溶液的一部分进行取样，并通过电感耦合等离子体发射光谱法测定溶解的石英玻璃量。此外，将残留的溶解溶液蒸发干燥，然后用稀硝酸溶解蒸发残余物，得到回收液，通过电感耦合等离子体质谱法测定回收液中的金属量。版权所有（C）2010，JPO＆INPIT

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