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1. 发明专利

JP2014094864A Production method of black quartz glass 有权
标题翻译：黑色玻璃的生产方法
公开(公告)号：JP2014094864A
公开(公告)日：2014-05-22
申请号：JP2012247904
申请日：2012-11-09
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： ABE EMIKO
IPC分类号： C03B20/00 , C03C3/06 , C03C4/02
摘要： PROBLEM TO BE SOLVED: To shorten a production process and to reduce production cost by omitting a reduction step for reducing niobium oxide to obtain black color in a reduction atmosphere obtained by hydrogen, and by uniting the reduction step and a melting step together.SOLUTION: In a production method, an ethanol solution of niobium pentachloride and quartz glass powder are mixed together, and the mixed powder raw material is heated and dried to convert niobium pentachloride into niobium pentoxide, filled into a container made of carbon lined with felt made of carbon, and melted by being heated at 1,800°C or higher in a vacuum furnace, to thereby obtain black quartz glass, and further a reduction step for obtaining a reduction atmosphere by hydrogen can be omitted by enabling reduction of niobium pentoxide in the container made of carbon. The obtained black quartz glass shows similar shieldability to a conventional one.
摘要翻译：要解决的问题：为了缩短生产工艺并降低生产成本，通过省略用于还原氧化铌的还原步骤以在由氢气获得的还原气氛中获得黑色，并将还原步骤和熔融步骤结合在一起。解决方案：在制造方法中，将五氯化铌和石英玻璃粉末的乙醇溶液混合，将混合粉末原料加热干燥，将五氯化铌转化为五氧化二铌，填充到由碳制成的碳制成的容器中并通过在真空炉中在1800℃以上的温度下加热熔融，由此得到黑色的石英玻璃，进一步的还原步骤，通过氢还原气氛可以省略，因为能够还原五氧化二in 碳。所获得的黑色石英玻璃显示出与传统黑色石英玻璃相似的屏蔽性。

2. 发明专利

JP2013112540A Method and apparatus for manufacturing quartz glass cylinder material 有权
标题翻译：制造石英玻璃圆筒材料的方法和装置
公开(公告)号：JP2013112540A
公开(公告)日：2013-06-10
申请号：JP2011257786
申请日：2011-11-25
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： KUDO MASAKAZU , SATO MIYUKI , IZAWA YUKIHIRO , KATO TADAAKI
IPC分类号： C03B20/00 , C03B19/00
CPC分类号： C03B19/1484 , C03B19/1492
摘要： PROBLEM TO BE SOLVED: To inexpensively manufacture various quartz glass cylinder materials.SOLUTION: A furnace 1 is composed of a furnace roof 2, a furnace bottom 3 and a furnace wall 4. The furnace bottom 3 is supported by a column support 7, and since the column support 7 rotates and can move up and down, the furnace bottom 3 can rotate and move up and down with respect to heat sources 5 which is circularly arranged on the furnace roof 2 and heats quartz glass material powder. Such quartz glass material powder is supplied to the heat sources 5 and melted. By lowering the furnace bottom 3 while rotating with respect to the heat sources 5, the molten quartz glass material powder accumulates and solidifies in a cylinder shape on the furnace bottom 3, and a cylindrical quartz glass cylinder material 8 is obtained.
摘要翻译：要解决的问题：要廉价地制造各种石英玻璃圆筒材料。解决方案：炉1由炉顶2，炉底3和炉壁4组成。炉底3由柱支撑件7支撑，并且由于柱支撑件7旋转并且可以向上移动，炉底3可以相对于循环地布置在炉顶2上的热源5上下旋转并加热石英玻璃材料粉末。这种石英玻璃材料粉末被供应到热源5并熔化。通过在相对于热源5旋转的同时降低炉底3，熔融石英玻璃材料粉末在炉底3上以圆柱形状积聚并固化，并且获得圆柱形石英玻璃圆筒材料8。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012153586A Apparatus for producing quartz glass molded body 审中-公开
标题翻译：生产QUARTZ玻璃模体的装置
公开(公告)号：JP2012153586A
公开(公告)日：2012-08-16
申请号：JP2011015800
申请日：2011-01-27
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： CHIBA KAZUYUKI
IPC分类号： C03B11/08 , C03B20/00
CPC分类号： Y02P40/57
摘要： PROBLEM TO BE SOLVED: To produce a quartz glass molded body at a high yield and at a low cost.SOLUTION: A lower mold 52, a quartz glass preform 16, a pressing tool 18, a guide member 20 and a load plate 22 are sequentially placed on the circular carbon bottom plate 12 of 1 cm thickness and 50 cm diameter. An orthohexagonal column-shaped outer cylinder 14 is assembled on the outside of those by combining six carbon plates of 20 cm width, 30 cm length and 3 cm thickness, and the outer cylinder is fixed by a carbon tool to assemble a production apparatus. The quartz glass preform 16 is set within the outer cylinder, put in an electric furnace and melted by heating at 1,800°C for 2 h to thereby obtain an orthohexagonal column-shaped quartz glass molded body 16a of 20 cm length of one side and 12 cm average height having a recessed portion of 22 cm φ and 5 cm depth in the center of the upper surface and a recessed portion of 20 cm φ and 4 cm depth in the center of the lower surface.
摘要翻译：要解决的问题：以高产率和低成本生产石英玻璃成型体。解决方案：下模具52，石英玻璃预成型件16，加压工具18，引导构件20和负载板22依次放置在1厘米厚度和50厘米直径的圆形碳底板12上。通过组合20厘米宽，30厘米长和3厘米厚度的六个碳板将正六角柱形外筒14组装在其外侧，并且外筒通过碳工具固定以组装生产装置。将石英玻璃预成型体16设置在外筒内，放入电炉中，在1800℃下加热熔融2小时，得到单面20cm长的正六角柱状石英玻璃成形体16a，12 cm的平均高度，在上表面的中心具有22cmφ和5cm深度的凹陷部分，在下表面的中心具有20cmφ和4cm深度的凹陷部分。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012020907A Method for producing quartz glass molding 有权
标题翻译：生产石英玻璃模具的方法
公开(公告)号：JP2012020907A
公开(公告)日：2012-02-02
申请号：JP2010160847
申请日：2010-07-15
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： CHIBA KAZUYUKI
IPC分类号： C03B20/00 , G02B1/00
CPC分类号： C03B19/09
摘要： PROBLEM TO BE SOLVED: To provide a method for easily changing the outer diameter of a quartz glass molding by heating and melting a quartz glass preform.SOLUTION: In carrying out a melt molding by using an outer cylinder 10 of a polygonal pillar obtained by assembling carbon-made plate materials 14 having the same shape as a mold material, the diameter of an inscribed circle is changed by changing number of sides of the polygonal pillar to be assembled by changing number of plate materials 14, in order to change the outer diameter of a molten quartz glass molding 16a. When the plate material 14 having a 6 cm side is used, the diameter of the inscribed circle is 10.4 cm in the case of a hexagonal pillar, 14.5 cm in the case of an octagonal pillar and 22.4 cm in the case of a dodecagonal pillar, and the diameter can be easily changed.
摘要翻译：要解决的问题：提供一种通过加热和熔化石英玻璃预制件来容易地改变石英玻璃模制品的外径的方法。解决方案：通过使用通过组装具有与模具材料相同形状的碳制板材14获得的多边形柱的外筒10进行熔融模塑，通过改变数量来改变内切圆的直径通过改变板材14的数量来组装多边形柱的侧面，以改变熔融石英玻璃模制件16a的外径。当使用具有6cm侧的板材14时，在六边形柱的情况下，内切圆的直径为10.4cm，在八角柱的情况下为14.5cm，在十字形柱的情况下为22.4cm，并且可以容易地改变直径。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2010006679A Method of producing quartz glass formed member 审中-公开
标题翻译：生产石英玻璃成型的方法
公开(公告)号：JP2010006679A
公开(公告)日：2010-01-14
申请号：JP2008171585
申请日：2008-06-30
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： ONUKI YUKIO
IPC分类号： C03B19/02 , C03B20/00
CPC分类号： Y02P40/57
摘要： PROBLEM TO BE SOLVED: To produce a quartz glass worked component at low cost by making defect parts generating in the hot forming small and improving the production efficiency and yield. SOLUTION: The quartz glass formed body 5 is obtained by producing a mold material 1 comprising a halved cylinder to form a part of a true circle by cutting a square material or a circular material of carbon of a base material to form a true circular inner surface when being assembled, mounting a molten quartz glass base material 4 inside the mold material 1 formed cylindrical by being assembled and heating to form the molten quartz glass base material 4 to meet the true circular of the inner surface of the mold material 1. The number of the divided parts can be three, four or more parts even if the inner shape of the carbon mold material 1 forms the true circle after assembled. The quartz glass formed body having excellent raw material usage rate is obtained by fixing the mold material 1 using a string-like body 60 comprising a carbon fiber. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：通过使热成型中产生的缺陷部分变小，并且提高生产效率和产率，以低成本制造石英玻璃加工部件。解决方案：石英玻璃成形体5通过制造包括半圆筒的模具材料1而获得，该模具材料1通过切割正方形材料或基材的碳的圆形材料形成真圆的一部分，以形成真实的圆圆形内表面组装时，通过组装和加热将熔融石英玻璃基材4安装在形成为圆柱形的模具材料1内，以形成熔融石英玻璃基材4以满足模具材料1的内表面的真实圆形即使碳组合材料1的内部形状在组装后形成真圆，分割部分的数量可以是三个，四个或更多个部分。通过使用包含碳纤维的线状体60固定模具材料1，获得具有优异的原料使用率的石英玻璃成形体。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009167040A Method of cutting glass tube 有权
标题翻译：切割玻璃管的方法
公开(公告)号：JP2009167040A
公开(公告)日：2009-07-30
申请号：JP2008005277
申请日：2008-01-15
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： SATO MIYUKI , KATO TADAAKI
IPC分类号： C03B33/06
CPC分类号： Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a method of cutting glass tubes which does not generate fine glass powders and improves the yields in cutting glass tubes without complicating the manufacturing process. SOLUTION: The method of cutting glass tubes comprises a first step of forming a mark-off scratch on an intended cutting position on the outer or inner circumferential surface of a glass tube by pressing a cutter against the intended cutting position on the outer or inner circumferential surface of the glass tube and moving the glass tube and the cutter relatively along the intended cutting position and a second step of cooling the region where the mark-off scratch is formed on the outer or inner circumferential surface of the glass tube. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种切割玻璃管的方法，其不会产生细玻璃粉末并提高切割玻璃管的产量，而不会使制造过程复杂化。解决方案：切割玻璃管的方法包括在玻璃管的外圆周表面或内圆周表面上的预定切割位置上形成标记刮痕的第一步骤，其通过将切割器压靠在外部的预定切割位置上或玻璃管的内周面，并且使玻璃管和切割器沿着预定的切割位置相对移动;以及第二步骤，冷却在玻璃管的外周面或内周面上形成标记划痕的区域。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2009155159A High precision pore working with fine size to quartz glass plate 审中-公开
标题翻译：高精度的钻孔加工精细尺寸到QUARTZ玻璃板
公开(公告)号：JP2009155159A
公开(公告)日：2009-07-16
申请号：JP2007334840
申请日：2007-12-26
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： KANO AKIHIKO
IPC分类号： C03B33/02
摘要： PROBLEM TO BE SOLVED: To work a pore to a quartz glass plate at high precision and at a high speed, and further, to elongate the service life of a grinding tool.
SOLUTION: An original pore 10 with a diameter smaller than that of a desired pore 1 is drilled to a quartz glass plate 2 as a workpiece using a laser, and next, the original pore 10 is ground using a grinding tool, so as to form a pore 1 with a desired diameter. Burrs (dross) 3 produced by the laser processing are removed by the grinding tool, so as to be a flat face, further, the processing of a correct circular pore can be performed without applying a load on the grinding tool, and the service life of the grinding tool can be elongated by several times than the case only by grinding tool processing, thus the reduction of processing time and the reduction of cost can be attained.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：以高精度和高速度将石墨玻璃板加工成石英玻璃板，并延长研磨工具的使用寿命。解决方案：使用激光将直径小于所需孔1的原始孔10钻孔作为工件的石英玻璃板2，接下来，使用研磨工具研磨原始孔10，因此以形成具有所需直径的孔1。通过研磨工具除去由激光加工产生的毛刺（浮渣）3，从而成为平坦面，此外，可以在不对研磨工具施加负荷的情况下进行正确的圆孔的加工，并且使用寿命的磨削刀具可以仅仅通过磨削工具加工而延长数倍，从而可以实现加工时间的缩短和成本的降低。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2009102195A Surface reforming apparatus for tubular glass article and manufacturing method of tubular silica glass jig 有权
标题翻译：管状玻璃制品的表面改性装置及管状二氧化硅玻璃的制造方法
公开(公告)号：JP2009102195A
公开(公告)日：2009-05-14
申请号：JP2007275353
申请日：2007-10-23
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： SEKI KOJI
IPC分类号： C03C23/00 , B23K26/08 , B23K26/36
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of a cause for the formation of new particles, in the treatment of the surface of a glass tube, and to provide a surface having fine projections and recessions with uniformity, high precision and reproducibility. SOLUTION: A laser beam generated by a laser oscillation means 2 is guided to a light guide means 3 and irradiated from an irradiation means 5 at its tip. The laser beam irradiated from the irradiation means 5 is uniformly irradiated on the inner peripheral surface of a glass tube 6 to be treated since the light guide means 3 is rotated at one revolution/second by a rotation driving device 33 installed inside a horizontal arm 31. Since the rotation of the laser guide means 3 and the horizontal transfer of a transfer means 4 are synchronized and the transfer means 4 transfers the article to be treated 6 a specified distance when the irradiation means 5 rotates one turn, fine projections and recessions are formed at regular intervals on the surface of the glass tube 6 and the surface treatment by a laser beam is applied. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了防止形成新颗粒的原因，在玻璃管表面的处理中，并且提供具有均匀性，高精度和再现性的精细突起和凹陷的表面。解决方案：由激光振荡装置2产生的激光束被引导到光导装置3并在其尖端从照射装置5照射。由于照射装置5照射的激光束被均匀地照射在待处理的玻璃管6的内周面上，因为导光装置3通过安装在水平臂31内的旋转驱动装置33旋转1转/ 由于激光引导装置3的旋转和转印装置4的水平转印同步，并且当照射装置5旋转一圈时，转印装置4将待处理物品6转移指定距离，精细的突出和凹陷是在玻璃管6的表面上以规则的间隔形成，并且通过激光束进行表面处理。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2008247639A Quartz glass material and its manufacture method 有权
标题翻译： QUARTZ玻璃材料及其制造方法
公开(公告)号：JP2008247639A
公开(公告)日：2008-10-16
申请号：JP2007088345
申请日：2007-03-29
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： SEKI KOJI
IPC分类号： C03C23/00 , C03B20/00 , C23C14/06 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a quartz glass material which is made into a uniform surface and a fine uneven surface of high precision having reproducibility, and is excellent in functionality and surface characteristics, such as excellent corrosion resistance to corrosive cleaning liquids and corrosive gases, free from the generation of particles and excellent in durability.
SOLUTION: The focus of a laser beam of a laser beam machining apparatus 1 using a multi-joint arm robot 3 is aligned to the surface of a quartz glass plate 2 and is moved at the speed previously determined from a relational expression between the speed and surface roughness within a range of 0.5 to 50 μm of the surface roughness Ra in order to obtain the desired surface roughness to form the fine uneven surface. Then, the face formed with the uneven surface is coated with a diamond-like carbon film (DLC). The quartz glass material obviates the dust generation of the particles, is satisfactory in hydrofluoric acid durability and thermal oxidation resistance, has high corrosion resistivity to a gaseous halide and/or its plasma, and is excellent in surface characteristics of a member for a semiconductor manufacturing apparatus.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供制造成均匀表面的石英玻璃材料和具有再现性的高精度的精细不平坦表面，并且具有优异的功能性和表面特性，例如对腐蚀性清洁液体的优异的耐腐蚀性和腐蚀性气体，不产生颗粒，耐久性好。解决方案：使用多关节臂机器人3的激光束加工设备1的激光束的焦点与石英玻璃板2的表面对准，并且以先前从两者之间的关系表达式确定的速度移动表面粗糙度在表面粗糙度Ra的0.5〜50μm的范围内的速度和表面粗糙度，以获得所需的表面粗糙度以形成微细凹凸表面。然后，形成有不平坦表面的表面涂覆有类金刚石碳膜（DLC）。石英玻璃材料消除了颗粒的粉尘，在氢氟酸耐久性和耐热氧化性方面是令人满意的，对气态卤化物和/或其等离子体具有高耐腐蚀性，并且半导体制造部件的表面特性优异仪器。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2008179858A Jig superior in durability for semiconductor-manufacturing apparatus 有权
标题翻译： JIG高分子半导体制造设备耐久性
公开(公告)号：JP2008179858A
公开(公告)日：2008-08-07
申请号：JP2007014332
申请日：2007-01-24
申请人： Tosoh Quartz Corp , 東ソー・クォーツ株式会社
发明人： SEKI KOJI , MISAKI HIDEHIKO
IPC分类号： C23C16/44 , C03B20/00 , C03C17/22 , C23C14/06 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a jig for use in a semiconductor-manufacturing apparatus, which has superior corrosion resistance against a corrosive cleaning liquid such as a fluoric acid solution and a nitric acid solution, and a corrosive gas such as a halogen-based gas and a chlorine-based gas, does not produce particles and is superior in durability.
SOLUTION: The jig for the semiconductor-manufacturing apparatus has a quartz glass substrate of which the surface is worked into arbitrary surface roughness and surface properties, and then is further covered with a diamond-like carbon film (DLC) that is a hard film. The jig for the semiconductor-manufacturing apparatus has a DLC film of 0.5 μm or thicker, has a durability of 0.005 μm/hr or less against hydrofluoric acid, has a thermal oxidation rate of 0.1 μm/hr or less at 600°C, has an adhesive strength of 95/100 pieces or more, and has such a surface roughness as to follow the surface roughness of the quartz glass substrate. Then, the jig has high corrosion resistance against a halide gas and/or the plasma, inhibits the production of the particles, and shows the superior durability.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种对于诸如氟酸溶液和硝酸溶液等腐蚀性清洗液具有优异的耐腐蚀性的半导体制造装置中使用的夹具，以及腐蚀性气体卤素系气体和氯系气体不产生粒子，耐久性优异。解决方案：用于半导体制造装置的夹具具有石英玻璃基板，其表面被加工成任意的表面粗糙度和表面性质，然后被类似于金属的碳膜（DLC）硬膜半导体制造装置的夹具具有0.5μm以上的DLC膜，耐氢氟酸的耐久性为0.005μm/小时以下，600℃下的热氧化率为0.1μm/小时以下，具有粘合强度为95/100个以上，并且具有遵循石英玻璃基板的表面粗糙度的表面粗糙度。然后，夹具对卤化物气体和/或等离子体具有高耐腐蚀性，抑制了颗粒的产生，并表现出优异的耐久性。版权所有（C）2008，JPO＆INPIT

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