会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 130. 发明专利
    • SEMICONDUCTOR DEVICE AND ITS FABRICATION
    • JPH08306708A
    • 1996-11-22
    • JP11088595
    • 1995-05-09
    • SANYO ELECTRIC CO
    • TOMINAGA HISAAKITOUNO HIROSHIGEHARADA YASOO
    • H01L29/41H01L21/338H01L29/812
    • PURPOSE: To provide a semiconductor device having low parasitic capacity, and its fabrication method, in which a self-aligned electrode can be formed while monitoring the magnitude of source-drain current. CONSTITUTION: A resist pattern having inverse trapezoidal cross-section is formed on a working layer 2 followed by formation of an insulating film on the entire surface. The insulating film is then removed from the upper surface of the working layer 2 and resist pattern thus forming a pair of inclining side wall parts 4a, 4b of insulating film. Subsequently, a first electrode layer is formed on the upper surface of the working layer 2 and resist pattern, the first electrode layer on the resist pattern is removed together with the resist pattern, and heat treatment is effected thus forming ohmic electrodes 5a, 5b. While monitoring the magnitude of current flowing between the ohmic electrodes 5a, 5b, a recess is made in the region of working layer 2 exposed between the pair of side wall parts 4a, 4b and a gate electrode, i.e., a second electrode layer 7c, is formed in the recess and on the inner face at the side wall parts 4a, 4b.