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121. 发明专利

JPS61114451A Correction of astigmatism 失效
标题翻译：校正的修正
公开(公告)号：JPS61114451A
公开(公告)日：1986-06-02
申请号：JP23315184
申请日：1984-11-07
申请人： Hitachi Ltd
发明人： MURAKOSHI HISAYA , ICHIHASHI MIKIO , FUKUHARA SATORU , KIYOFUJI SHIGEMITSU , TODOKORO HIDEO
IPC分类号： H01J37/153 , H01J37/28
CPC分类号： H01J37/153
摘要： PURPOSE:To enable optimum correction of astigmatism to be achieved according to correction values by installing two astigmatism correctors with different directions and controlling one of the correctors while the other one is maintained at a constant value to obtain one of the correction values and then controlling the latter one while the former one is maintained at a constant value to obtain the other correction value. CONSTITUTION:An astigmatism correcting device consisting of installed correctors 8A and 8B with different directions, is installed in the path of a microprobe 3 for a scanning electron microscope or a similar device. First, while the corrector 8A is maintained at a constant value, the corrector 8B is used to obtain a first correction value with which the probe diameter is minimized and then the first correction value is stored in a memory circuit 18A. Next, while the corrector 8B is maintained at a constant value, the corrector 8A is used to obtain a second correction value with which the probe diameter is minimized and then the second correction value is stored in a memory circuit 18B. After that, the first and the second correction values are combined by a computing circuit 19 before being used to control the correctors 8A and 8B through a controller 17. Therefore, optimum correction of the astigmatism can be achieved in a short time and the correction can be automatically performed.
摘要翻译：目的：通过安装具有不同方向的两个散光校正器，控制其中一个校正器，另一个维持在一个恒定值，以便通过校正值来实现对像散的最佳校正，以获得一个校正值，然后控制后一个，而前一个维持在恒定值以获得另一个校正值。构成：由用于扫描电子显微镜或类似装置的微探针3的路径中安装由安装有不同方向的校正器8A和8B组成的像散校正装置。首先，当校正器8A保持恒定值时，校正器8B用于获得探针直径最小化的第一校正值，然后将第一校正值存储在存储器电路18A中。接下来，当校正器8B保持恒定值时，校正器8A用于获得探针直径最小化的第二校正值，然后将第二校正值存储在存储器电路18B中。之后，第一和第二校正值在被用于通过控制器17控制校正器8A和8B之前由计算电路19组合。因此，可以在短时间内实现像散的最佳校正，并且校正可以自动执行。

122. 发明专利

JPS60241633A METHOD FOR DETECTING AUTOMATIC FOCUSING OF ELECTRON BEAM APPARATUS 失效
公开(公告)号：JPS60241633A
公开(公告)日：1985-11-30
申请号：JP9644484
申请日：1984-05-16
申请人： HITACHI LTD
发明人： FUKUHARA SATORU , KIYOFUJI SHIGEMITSU , TODOKORO HIDEO , ICHIHASHI MIKIO
IPC分类号： H01J37/153 , H01J37/21 , H01J37/28
摘要： PURPOSE:To realize automatic focusing with a high accuracy even for a sample which generates lesser amount of secondary electrons by adding the function to sequentially move the center point of circular scanning on the sample and detect automatically the position of sample which generates the maximum information signal. CONSTITUTION:A sample 5 is scanned in circular with the primary electron beam of a scanning type electron microscope by adding the signal sent from a circular scanning generator 7 and the signal of a stair case wave deflection signal part 11 in an addition circuit part 12 and giving it to the X and Y deflection coils 2, the secondary electrons generated are detected, it is processed by a control circuit 10 having a signal detecting part 9 and a memory in order to control an objective lens coil 4. Thereby automatic focusing and automatic astigmatism correction are carried out. Accordingly, the automatic focusing with good S/N can be realized by sequentially moving the center point of circular scanning on the sample 5 in the X and Y directions and searching the maximum value of detected signal. As a result, it can be utilized adequately for IC and LSI, etc.

123. 发明专利

JPS60127648A STROBOSCANNING TYPE ELECTRON MICROSCOPE 失效
公开(公告)号：JPS60127648A
公开(公告)日：1985-07-08
申请号：JP23424283
申请日：1983-12-14
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , FUKUHARA SATORU
IPC分类号： H01J37/28 , H01J37/26
摘要： PURPOSE:To achieve a test of a long period LSI or the like without n-multifying the generation period and the delay time of a pulse electron beam by providing the detection system of a secondary electron signal with n-pieces of gate circuits synchronized with a clock signal. CONSTITUTION:The output terminal of a secondary electron detector 9 is provided with a gate circuit 18 and picture memories 17. Said memories 17 operate synchronously with a display device 7. The gate circuit 18 makes-and-breaks through a counter 15 synchronously operating with a clock signal of a sample driving circuit 11 giving a periodical change to the sample 14 while selectively supplying respective memories with the signals of the secondary electron detector 9. According to said constitution, a secondary electron signal generated by a pulse electron beam of ''1'' is stored in an M1 picture memory through G1, while a secondary electron signal generated by a pulse of ''2'' is stored in an M2 picture memory through G2 respectively. Thereby, the test of LSI or the like can be achieved without n-multifying a pulse beam generation period.

124. 发明专利

JPS607049A ELECTRIC POTENTIAL MEASURING DEVICE 失效
公开(公告)号：JPS607049A
公开(公告)日：1985-01-14
申请号：JP11271983
申请日：1983-06-24
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , FUKUHARA SATORU
IPC分类号： G01N23/225 , G01R19/00 , G01R31/302 , G01R31/305 , H01J37/244 , H01J37/26 , H01J37/28 , H01L21/66
摘要： PURPOSE:To improve the operation performance of an electric potential measuring device by installing a controlling electrode between a substance to be measured and a detector for detecting secondary electrons discharged from the substance to be measured when it is irradiated by a primary electron beam and maintaining the output of the detector at a constant level. CONSTITUTION:Between a sample 1 to be measured and a secondary electron detector 4 placed facing the sample 1, a control electrode (G) is placed which forms a potential barrier for discriminating the energies of secondary electron rays discharged from the sample 1. The output of the detector 4 is supplied to an amplifier 7 the output of which is compared with a reference voltage 6 to obtain a difference which is then applied to the electrode (G) through an amplifier 5. An LPF8 is connected to the electrode G2. The output of the LPF8 is compared with an operation-point reference voltage 9 by means of an operation-point setting differential amplifier 10 to obtain a difference which is then fed back to the amplifier 7. Here, the frequency of waves filtered by the LPF8 is adjusted to be sufficiently smaller than the frequency of waves within the sample 1. By the means mentioned above, the electric potential of the surface of the sample 1 can be measured without any errors, thereby enabling the operation performance to be improved.

125. 发明专利

JPS606876A POTENTIAL MEASURING DEVICE 失效
公开(公告)号：JPS606876A
公开(公告)日：1985-01-14
申请号：JP11272083
申请日：1983-06-24
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , FUKUHARA SATORU , YONEDA SHIYOUZOU
IPC分类号： G01R19/145 , G01R31/302 , H01J37/244 , H01J37/28 , H01L21/66
摘要： PURPOSE:To hold an operation point constant even when an irradiation current varies and even when a sample is different in material at a measurement point by standardizing a detected potential signal and using it to constitute a feedback circuit. CONSTITUTION:A control electrode G arranged in the middle of a secondary electron detector 4 placed facing the sample 1 to be measured forms a potential barrier for discriminating the energy of a secondary electro emitted by the sample irradiated with an electron beam 2. The output of the secondary electron detector 4 is supplied to a dividing circuit 8 and divided by the output of a low-pass filter circuit 7 which receives the output of the secondary electron detector 4. The output of the dividing circuit 8 is compared with a reference voltage 6, and the difference is amplified by an amplifier 5 and supplied to the control electrode G. Consequently, when the irradiation current becomes double, the numerator and denominator of the dividing circuit 8 become double, so the dividing circuit 8 has no variation in its output and the operation point of feedback is invariably the same once it is adjusted.

126. 发明专利

JPS5835854A SECONDARY ELECTRON DETECTION UNIT 失效
公开(公告)号：JPS5835854A
公开(公告)日：1983-03-02
申请号：JP13415081
申请日：1981-08-28
申请人： HITACHI LTD
发明人： NAKAIZUMI YASUSHI , OOTAKA TADASHI , TODOKORO HIDEO , FUKUHARA SATORU
IPC分类号： G01N23/22 , H01J37/244
摘要： PURPOSE:To eliminate the effect of extrusion of the electrostatic field by arranging a plurality of detectors symmetrically with a sample placed in the center. CONSTITUTION:An absorption electrode 12 is fitted below an objective lens 2, and the positive voltage is applied to the absorption electrode 12. This voltage generates a vertical electrostatic field on the surface of a sample 3 so as to accelerate the emission of secondary electrons 6 from the sample 3. At least two secondary electron detectors 7 are provided symmetrically, and even numbers of detectors prevent the lateral electrostatic field from becomming asymmetric. The output of detectors 7 can be added, or the output of only one side detector can be used as the intensity modulation signal of a CRT.

127. 发明专利

JPS5125063A 失效
公开(公告)号：JPS5125063A
公开(公告)日：1976-03-01
申请号：JP9709174
申请日：1974-08-26
申请人： HITACHI LTD
发明人： OKANO HIROSHI , HAYAKAWA KASUNOBU , YAMAMOTO SATOHIKO , FUKUHARA SATORU
IPC分类号： H01J1/304 , H01J1/30

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