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    • 97. 发明专利
    • Piezoelectric resonator, piezoelectric oscillator, electronic device and method for manufacturing piezoelectric resonator
    • 压电谐振器,压电振荡器,电子设备及制造压电谐振器的方法
    • JP2010232806A
    • 2010-10-14
    • JP2009076055
    • 2009-03-26
    • Seiko Epson Corpセイコーエプソン株式会社
    • WADA MITSUHIRO
    • H03H9/19H01L41/09H01L41/18H01L41/22H01L41/23H01L41/253H01L41/311H03B5/32H03H3/02H03H3/04H03H9/02
    • H03H9/19H03H3/04H03H9/02023H03H9/02157H03H9/0552H03H9/1014H03H9/1021Y10T29/42
    • PROBLEM TO BE SOLVED: To provide: a piezoelectric resonator having high reliability over a long period of time; a piezoelectric oscillator; an electronic device; and a method for manufacturing the piezoelectric resonator. SOLUTION: The piezoelectric resonator 200 includes: a package 110 having a cavity 1; a plurality of electrode pads 20 formed within the cavity 1; and a piezoelectric vibrating element 100 having one end supported by a first bonding section 31 and a second bonding section 32 that include silicone base conductive adhesive and are formed on the plurality of the electrode pads 20, respectively. The piezoelectric vibrating element 100 has a piezoelectric substrate 40 having mutually opposing first face 41 and second face 42, a first electrode film 50a that is formed on the first face 41 and electrically connected to the first bonding section 31, and a second electrode film 50b that is formed on the second face 42 and electrically connected to the second bonding section 32. In a supported region of the piezoelectric vibrating element 100 by the first bonding section 31 and the second bonding section 32 and a movable region 42 not supported by the first bonding section 31 or the second bonding section 32, a fluorocarbon resin film 60 is formed on the movable region 42. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供:长时间具有高可靠性的压电谐振器; 压电振荡器; 电子设备; 以及压电谐振器的制造方法。 解决方案:压电谐振器200包括:具有空腔1的封装110; 形成在空腔1内的多个电极焊盘20; 以及压电振动元件100,其一端由第一接合部31支撑,第二接合部32分别由多个电极焊盘20形成,该第二接合部32包括硅酮基导电性粘接剂。 压电振动元件100具有彼此相对的第一面41和第二面42的压电基板40,形成在第一面41上并与第一接合部31电连接的第一电极膜50a,第二电极膜50b 形成在第二面42上并与第二接合部32电连接。在压电振动元件100的被第一接合部31和第二接合部32的支撑区域和不由第一接合部32支撑的可动部42 接合部31或第二接合部32,在可动区域42上形成氟碳树脂膜60.权利要求(C)2011,JPO&INPIT