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    • 91. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2011146682A
    • 2011-07-28
    • JP2010235063
    • 2010-10-20
    • Toshiba Corp株式会社東芝
    • KITAGAWA MITSUHIKO
    • H01L29/861H01L21/329H01L21/338H01L21/8234H01L27/04H01L27/06H01L27/088H01L29/06H01L29/12H01L29/778H01L29/78H01L29/812
    • H01L29/0634H01L27/0629H01L27/0814H01L29/063H01L29/0638H01L29/1608H01L29/2003H01L29/205H01L29/41H01L29/7803H01L29/7804H01L29/7805H01L29/7813H01L29/861H01L29/8611
    • PROBLEM TO BE SOLVED: To provide a semiconductor device securing a low threshold and higher voltage resistance, even if a Schottky electrode is not installed. SOLUTION: A cathode layer 1 of type N + is formed, in junction with a cathode electrode 100 and a drift layer 2 of type N in low impurity concentration is formed, in junction with the cathode layer 1. A plurality of trenches 4a, 4b are arranged on the upper surface of the drift layer 2, keeping a predetermined interval. Embedded electrodes 5a, 5b are respectively formed within the trenches 4a, 4b via insulating films 6a, 6b. An inter-trench region 7 is formed between the neighboring trenches. In addition, a universal contact layer 3, jointed with an anode electrode 200, is formed in junction with the inter-trench region 7, by alternately arranging a P + -layer 31 at a high impurity concentration and an N + -layer 32 at a high impurity concentration. Since the potential of the inter-trench region 7 under the thermal equilibrium condition is adjusted, the difference in the potential, from that of the drift layer 2 under the thermal equilibrium condition, is lower than built-in voltage that depends on the band gap of a semiconductor material used. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:即使没有安装肖特基电极,也提供确保低阈值和更高耐电压性的半导体器件。 解决方案:形成与阴极电极100结合的类型为N + 的阴极层1,形成低杂质浓度的类型N的漂移层2,与阴极结合 多个沟槽4a,4b布置在漂移层2的上表面上,保持预定的间隔。 嵌入电极5a,5b分别经由绝缘膜6a,6b形成在沟槽4a,4b内。 在相邻的沟槽之间形成沟槽间区域7。 此外,通过交替地布置高杂质浓度的P + SP层 - 层31,与阳极电极200连接的通用接触层3形成为与沟槽间区域7结合,以及 在高杂质浓度下的N + 层32。 由于调节了热平衡条件下的沟槽间区域7的电位,所以在热平衡条件下,与漂移层2的电位差的电位差低于取决于带隙的内置电压 的半导体材料。 版权所有(C)2011,JPO&INPIT