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    • 8. 发明专利
    • Magnesium oxide vapor-deposition material
    • 氧化镁蒸气沉积材料
    • JP2005330574A
    • 2005-12-02
    • JP2004292642
    • 2004-10-05
    • Ube Material Industries Ltd宇部マテリアルズ株式会社
    • UEKI AKIRAMASUDA AKIRAKATO YUZO
    • C04B35/053C23C14/08C23C14/24C23C14/32H01J9/02H01J11/22H01J11/34H01J11/38H01J11/40H01J11/02
    • PROBLEM TO BE SOLVED: To provide a magnesium oxide vapor-deposition material advantageously usable for forming a magnesium oxide film useful as a protective film for the dielectric layer of an alternating current type plasma display panel by an electron beam vapor-deposition method. SOLUTION: The magnesium oxide vapor-deposition material comprises metal oxide in which the valence of the metallic element(s) is any of 3, 4 and 5 in the range of 0.01 to 6 mol%. Alternatively, the magnesium oxide vapor-deposition material comprises alkaline-earth metal oxide other than magnesium oxide, and metal oxide in which the valence of the metallic element(s) is any of 3, 4 and 5 in such a manner that each content is controlled to ≥0.005 mol% expressed in terms of the metallic element contents, and also, the total content is controlled to ≤6 mol% expressed in terms of the metallic element contents. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供一种有利地用于通过电子束气相沉积法形成用作交流型等离子体显示面板的电介质层的保护膜的氧化镁膜的氧化镁蒸镀材料 。 解决方案:氧化镁气相沉积材料包括金属氧化物,其中金属元素的价数为3至4和5之间的范围为0.01至6摩尔%。 或者,氧化镁蒸镀材料包含除了氧化镁以外的碱土类金属氧化物,金属氧化物,其中金属元素的价数为3,4和5,其含量为 以金属元素含量表示,控制为≥0.005摩尔%,并且将总含量控制为以金属元素含量表示的≤6摩尔%。 版权所有(C)2006,JPO&NCIPI