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    • 9. 发明专利
    • VIBRATOR
    • JPH01217217A
    • 1989-08-30
    • JP4198588
    • 1988-02-26
    • HITACHI LTD
    • KAWAMURA YOSHIOSATO KAZUOKATO SHIGEOKOIDE AKIRAUENO SADAYASU
    • G01L1/10G01H11/06G01P15/12G01P15/13
    • PURPOSE:To obtain a small and high-performance vibration sensor, by a method wherein two vertically flexible beams are arranged in parallel between a rigid- structure support section and a mass section and cantilevered with the support section to allow vertical vibration of the mass section. CONSTITUTION:Two vertically flexible beams 2 and 3 are arranged in parallel between a rigid-structure support section 1 and a mass section 4. The support section 1 is fixed with an anchor body 5 to form a cantilever wedge. When a force F is applied on the mass section 4 from above, the beams 2 and 3 are displaced downward by (h) as in parallel; when the force is released, they returns to the original shape. The same pattern is etched on the surface and back of one sheet of a silicon single crystal so that the thickness of the support section 1 and the mass section 4 attains about 400mum, the area of the mass section about 2X2mm, the thickness of the beams 2 and 3 about 20mum each and the length thereof about 200mum. This enables the production of a sensor small with a high performance vibrator.