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1. 发明专利

JP2003091322A GAS SUPPLY INTEGRATED VALVE 审中-公开
公开(公告)号：JP2003091322A
公开(公告)日：2003-03-28
申请号：JP2001281756
申请日：2001-09-17
申请人： CKD CORP
发明人： NAGAYA AKINORI , YOSHIDA KAZUHIRO
IPC分类号： F16K27/00 , F17D1/02 , G05D7/06 , H01L21/02 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a gas supply integrated valve capable of decreasing the number of expensive and large mass flow controllers used to lower the cost and reduce the floor occupying area. SOLUTION: This gas supply integrated valve 1 includes a plurality of gas supply parts 17 to 19. Input ports 11A to 11H, inlet opening and closing valves 12A to 14H, mass flow controllers 32 to 34, outlet opening and closing valves 62 to 64 and first purge valves 22 to 24 are connected to the respective gas supply parts 17 to 19. The mass flow controllers 32 to 32 are connected between common input passages 20, 30, 40 to which the respective inlet opening and closing valves 12A to 14A and the first purge valves 22 to 24 are connected and the outlet opening and closing valves 62 to 64. The inlet opening and closing valves 12A to 14H are respectively connected to the inlet opening and closing valves 12A to 14H of the other adjacent gas supply parts 17 to 19.

2. 发明专利

JPH08156901A TABLET FILLING STOP APPARATUS 失效
公开(公告)号：JPH08156901A
公开(公告)日：1996-06-18
申请号：JP32958794
申请日：1994-12-02
申请人： CKD CORP
发明人： YOSHIDA KAZUHIRO , MIZUNO HIROBUMI
IPC分类号： B65B1/30 , B65B57/04
摘要： PURPOSE: To stop the filling of a pocket with a tablet without damaging the tablet by preventing the falling of the tablet to the pocket only by bringing the inclined surface of the leading end of a stopper into contact with the outer peripheral surface of the tablet of the lowermost stage having impinged against a container film obliquely to stop. CONSTITUTION: A large number of guide grooves are vertically carved in the front surface of a tablet storage plate 1 used in the filling of the pockets (d)... of a container film (c) with tablets (b) of a drug and a press plate 3 preventing the falling of the tablets (b) stacked within the guide grooves 2 is provided to the guide groove forming surface of the table storage plate 1 under tension. An operation member 5 reciprocally moving in the direction same to the running direction of the container film (c) is arranged behind the tablet storage plate 1. A large number of stoppers 6 having inclined surfaces 7 formed to the side surface thereof at the same angle as the lower end parts 2a of the guide grooves 2 are provided to the operation member 5 so as to protrude toward the leading end of the operation member 5 and each of the stoppers 6 is allowed to protrude toward the lower end part 2a of each of the guide grooves 2 to stop the filling with the tablets (b).

3. 发明专利

JP2005163952A Block for gas supply unit 有权
标题翻译：气体供应单元块
公开(公告)号：JP2005163952A
公开(公告)日：2005-06-23
申请号：JP2003405615
申请日：2003-12-04
申请人： Ckd Corp , シーケーディ株式会社
发明人： YOSHIDA KAZUHIRO , OGIWARA TATSUNORI , MIWA TOSHIICHI
IPC分类号： F16K27/00
摘要： PROBLEM TO BE SOLVED: To provide a block for a gas supply unit capable of constituting apparatuses, such as an opening and closing valve, in series.
SOLUTION: This block 1 for the gas supply unit has a first port 11, a second port 12, a third port 13 and a forth port 14 formed in a straight line on its upper face, and has a first gas flow channel 21 communicating the first port 11 and the third port 13 and formed on a first division part 31, and a second gas flow channel 22 communicating the second port 12 and the fourth port 14 and formed on a second division part 32. The gas supply unit can be serialized by mounting the apparatuses such as the opening and closing valve in series, and a space for a semiconductor manufacturing process by integration of a plurality of units can be saved.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够构成诸如开合阀等装置的气体供应单元的块。解决方案：用于气体供应单元的块1具有在其上表面上以直线形成的第一端口11，第二端口12，第三端口13和第四端口14，并且具有第一气体流动通道 21连接第一端口11和第三端口13并形成在第一分隔部分31上，以及连通第二端口12和第四端口14并形成在第二分隔部分32上的第二气体流动通道22.气体供应单元可以通过串联安装诸如开关阀等装置来串联，并且可以节省通过集成多个单元的半导体制造工艺的空间。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2001082621A PROCESS GAS SUPPLY UNIT 失效
公开(公告)号：JP2001082621A
公开(公告)日：2001-03-30
申请号：JP25519899
申请日：1999-09-09
申请人： CKD CORP
发明人： YOSHIDA KAZUHIRO , KOBAYASHI HIDEO , KOIKE KAZUHIKO
IPC分类号： F16K27/00 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a process gas supply unit reducing a space of a manifold block and miniaturizing the whole of unit. SOLUTION: A manifold block 2 is molded to be rectangular parallelepiped by forming a process gas input port 3, a purge gas input port 4 and a process gas output port 5 formed on a lower surface of the manifold block 2 on the same straight line by forming a purge gas input passage to communicate the purge gas input port 4 and an input port of a check valve to each other in a V shape.

5. 发明专利

JP2005273868A Integrated valve unit 审中-公开
标题翻译：集成阀组
公开(公告)号：JP2005273868A
公开(公告)日：2005-10-06
申请号：JP2004092153
申请日：2004-03-26
申请人： Ckd Corp , シーケーディ株式会社
发明人： TAKECHI AKIHIRO , KOBAYASHI HIDEO , MIWA TOSHIICHI , YOSHIDA KAZUHIRO
IPC分类号： F16K27/00
摘要： PROBLEM TO BE SOLVED: To make uniform the rate of gas flow between a plurality of manually operated valves laid in line and compact the whole construction.
SOLUTION: The integrated valve unit 1 is structured so that the gas in the same sort is supplied a plurality of manually operated valves 2A-2F laid in line and the supplied gas is emitted from the valves 2A-2F. The integrated valve valve unit 1 has a flow passage block 3 where the valves 2A-2F 2A-2F are to be mounted rigidly. The flow passage block 3 is configured with a main passage 4 to allow the gas to flow through, branch passages 5 branching from the main passage 4 and leading to the inlet holes 2a and 2b of the valves 2A-2F, and a bypass passage 6 branching on the upstream of the main passage 4 and leading to the inlet hole 2b of the valve 2F positioned downstream of the main passage 4. Each branch passage 5 puts the inlet holes 2a and 2b of the adjoining valves 2A-2F in communication to each other.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：使多个手动操作的阀门之间的气体流动速率一致，并将整个结构紧凑化。解决方案：集成阀单元1被构造成使得相同类型的气体被供给多个并排放置的手动操作的阀2A-2F，并且供应的气体从阀2A-2F发射。集成阀阀单元1具有流路3，其中阀2A-2F 2A-2F将被刚性地安装。流路块3由主通路4构成，使气体流过，从主通路4分支并通向阀2A-2F的入口孔2a，2b的分支通路5和旁通通路6 在主通道4的上游分支并通向位于主通道4下游的阀2F的入口孔2b。每个分支通道5将邻接的阀2A-2F的入口孔2a和2b与每个其他。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JPS63110108A METHOD AND DEVICE FOR MANUFACTURING EASILY UNSEALABLE PACKAGE 失效
公开(公告)号：JPS63110108A
公开(公告)日：1988-05-14
申请号：JP24334986
申请日：1986-10-14
申请人： CKD CORP
发明人： YOSHIDA KAZUHIRO , TOMITA ISAMU , MATSUOKA HIROAKI
IPC分类号： B65B11/50 , B65D77/38

7. 发明专利

JP2003065462A Integrated valve 有权
标题翻译：集成阀
公开(公告)号：JP2003065462A
公开(公告)日：2003-03-05
申请号：JP2001257804
申请日：2001-08-28
申请人： Ckd Corp , シーケーディ株式会社
发明人： YOSHIDA KAZUHIRO , KARIYA MORIMICHI , MIYAMOTO SHINOBU
IPC分类号： F16K27/00 , C23C16/455 , F16K49/00 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a compact integrated valve shortening installation intervals of gas supplying devices.
SOLUTION: An attaching plate heating member 22 is fixed to a rear face of an attaching plate 21. At this point, the attaching plate heating member 22 is closely fixed to attaching plate 21 so that heat generated by the attaching plate heating member 22 is directly transmitted to the attaching plate 21. A plurality of the gas supplying devices 2 are attached to a surface of the attaching plate 21 so that heat of the attaching plate 21 heated by the attaching plate heating member 22 is transmitted to bottom bases of the gas supplying devices 2.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供紧凑的集成阀，缩短供气装置的安装间隔。解决方案：安装板加热构件22固定到安装板21的后表面。此时，安装板加热构件22紧密地固定到安装板21，使得由安装板加热构件22产生的热直接传送到安装板21.多个气体供给装置2附接到安装板21的表面，使得由安装板加热构件22加热的安装板21的热量传递到供气的底部设备2。

8. 发明专利

JP2000154878A GATE TYPE VACUUM SHUT-OFF VALVE 失效
公开(公告)号：JP2000154878A
公开(公告)日：2000-06-06
申请号：JP864199
申请日：1999-01-18
申请人： CKD CORP
发明人： MORI YOJI , YOSHIDA KAZUHIRO , MATSUOKA YUJI
IPC分类号： F16K3/18
摘要： PROBLEM TO BE SOLVED: To provide a gate type vacuum shut-off valve capable of preventing the occurrence of a particle. SOLUTION: This gate type vacuum shut-off valve 6 is operated in two steps composed of a first drive for moving a partition plate 36 in the vertical direction and a second drive for moving it in the horizontal direction. It has a drive means 42 which brings about the reciprocal movement in the vertical direction, a first action member 46 which moves vertically over the whole region of a movement output region by the drive means 42, a second action member 47 which moves vertically in a predetermined region of the movement output region by the drive means 42, a slide member 52 which is slidably engaged and provided in the horizontal direction for the second action member 47 and is connected to the partition plate 36, and an output transmission means 53, 51 which convert the movement in the vertical direction of the first action member 46 in the movement output region of the drive means 42 in which the second action member 47 stops into the movement in the horizontal direction of the slide member 52 and transmit it.

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