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1. 发明专利

JP2003065462A Integrated valve 有权
标题翻译：集成阀
公开(公告)号：JP2003065462A
公开(公告)日：2003-03-05
申请号：JP2001257804
申请日：2001-08-28
申请人： Ckd Corp , シーケーディ株式会社
发明人： YOSHIDA KAZUHIRO , KARIYA MORIMICHI , MIYAMOTO SHINOBU
IPC分类号： F16K27/00 , C23C16/455 , F16K49/00 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a compact integrated valve shortening installation intervals of gas supplying devices.
SOLUTION: An attaching plate heating member 22 is fixed to a rear face of an attaching plate 21. At this point, the attaching plate heating member 22 is closely fixed to attaching plate 21 so that heat generated by the attaching plate heating member 22 is directly transmitted to the attaching plate 21. A plurality of the gas supplying devices 2 are attached to a surface of the attaching plate 21 so that heat of the attaching plate 21 heated by the attaching plate heating member 22 is transmitted to bottom bases of the gas supplying devices 2.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供紧凑的集成阀，缩短供气装置的安装间隔。解决方案：安装板加热构件22固定到安装板21的后表面。此时，安装板加热构件22紧密地固定到安装板21，使得由安装板加热构件22产生的热直接传送到安装板21.多个气体供给装置2附接到安装板21的表面，使得由安装板加热构件22加热的安装板21的热量传递到供气的底部设备2。

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