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1. 发明专利

JP2005291807A Flow rate detection device 有权
标题翻译：流量检测装置
公开(公告)号：JP2005291807A
公开(公告)日：2005-10-20
申请号：JP2004104559
申请日：2004-03-31
申请人： Ckd Corp , シーケーディ株式会社
发明人： HARADA RYOICHI , MATSUOKA YUJI , MANO SHIGERU , SAKAI ATSUYUKI
IPC分类号： G01F1/66 , G01F1/684
摘要： PROBLEM TO BE SOLVED: To provide a flow rate detection device capable of forming a smooth curved passage or a bypass passage at low cost, and resultantly miniaturizable and capable of improving placeability. SOLUTION: A U-shaped bent passage 13 is formed inside a passage block 12 constituting a device body. The passage length between a pair of piezoelectric elements 20, 21 is sufficiently longer than the full length of the passage block 12 because the passage 13 is bent, to thereby heighten flow rate detection accuracy. When acquiring a mold of the passage block 12, insert molding of a water-soluble insert die having the same shape as the passage 13 is performed, and the insert die is dissolved and removed by a solvent, and thereby the U-shaped passage 13 can be acquired integrally with the passage block 12, to thereby realize low cost and miniaturization. Since the passage block 12 has a rectangular parallelpiped shape, placeability of this flow rate detection device 11 can be improved. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种流量检测装置，其能够以低成本形成平滑的弯曲通道或旁路通道，从而可小型化并且能够改善可放置性。解决方案：U形弯曲通道13形成在构成装置主体的通道块12的内部。由于通道13弯曲，一对压电元件20,21之间的通道长度比通道块12的全长充分长，从而提高流量检测精度。当获取通道块12的模具时，进行具有与通道13相同形状的水溶性插入模具的插入成型，并且将插入模具通过溶剂溶解并除去，从而形成U形通道13 可以与通道块12一体地获得，从而实现低成本和小型化。由于通道块12具有矩形的平行形状，因此可以提高该流量检测装置11的可放置性。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2000161311A CYLINDER WITH SENSOR 失效
公开(公告)号：JP2000161311A
公开(公告)日：2000-06-13
申请号：JP33181398
申请日：1998-11-24
申请人： CKD CORP
发明人： MATSUOKA YUJI , KONDO YOSHIHIRO , YAMAGUCHI MINORU
IPC分类号： F15B15/28
摘要： PROBLEM TO BE SOLVED: To provide a cylinder with a sensor of a simpler form in handling a detection sensor. SOLUTION: A cylinder with a sensor 20 is used to detect by detection sensors 6a, 6b of which piston strokes are attached externally on the cylinder body. A sensor holding cap 1 is formed in the same shape of the cylinder body side with a notch in corresponding to protruded parts on the cylinder body side so that it can fit around the cylinder body side. On the peripheral part of the sensor holding cap 1, sensor rails are provided on which a detection sensor can be attached in the operating direction of the piston so that it can move freely.

3. 发明专利

JP2001235099A REMOUNTING SYSTEM OF PROCESS GAS SUPPLY UNIT 失效
公开(公告)号：JP2001235099A
公开(公告)日：2001-08-31
申请号：JP2000043090
申请日：2000-02-21
申请人： CKD CORP
发明人： SUDO YOSHIHISA , GOSHIMA KENICHI , NITTA SHINICHI , MATSUOKA YUJI , ITO MINORU
IPC分类号： F16K27/00 , F17D1/04 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a remounting system of a process gas supply unit capable of remounting a module corresponding to each variation, in the process gas supply unit compact and in light weight. SOLUTION: In this process gas supply unit 1, mounting a check valve 11, a purge valve 12, a regulator 13 with interrupting function, a supply valve 15, and either one of a mass flow controller 14 or a sensor pack in a single base block 10 formed with flow paths 21 to 26, the mass flow controller 14 and the sensor pack can be remounted relating to the same base block 10.

4. 发明专利

JP2003166660A FLUID CONTROL VALVE 审中-公开
公开(公告)号：JP2003166660A
公开(公告)日：2003-06-13
申请号：JP2001365933
申请日：2001-11-30
申请人： CKD CORP
发明人： MORI YOJI , ISAYAMA SATORU , MATSUOKA YUJI , SUZUKI SHIGEHARU
IPC分类号： F16K25/04 , F16K27/00 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To prevent corrosion and permeation of gas in an gas contact part and to suppress enlargement in dimensions and an increase of cost. SOLUTION: In this fluid control valve, the gas contact part 16 made of metal is fluororesin-coated by performing electrostatic powder coating with fluororesin powders 15 by using an electrostatic gun. Thereby, the entire gas contact part 16 are coated with the fluororesin powders 15, that is, a layer of the fluororesin powders 15 with excellent thin film formability, uniformity, and adhesiveness is formed on the entire surface of the gas contact part 16 made of metal. COPYRIGHT: (C)2003,JPO

5. 发明专利

JP2001227657A PROCESS GAS SUPPLY UNIT 失效
公开(公告)号：JP2001227657A
公开(公告)日：2001-08-24
申请号：JP2000034947
申请日：2000-02-14
申请人： CKD CORP
发明人： SUDO YOSHIHISA , GOSHIMA KENICHI , NITTA SHINICHI , MATSUOKA YUJI , ITO MINORU
IPC分类号： F16K27/00 , F16K11/00
摘要： PROBLEM TO BE SOLVED: To provide a compact and lightweight gas supply unit. SOLUTION: This process gas supply unit 1 constituted by mounting a check valve 3, a purge valve 4, regulator 5 with a cut-off function, a mass flow controller 6 and a gas supply valve 7 on one base block 2 formed with a passage.

6. 发明专利

JPH10160021A OPENING/CLOSING VALE WITH SMALL FLOW EXHAUST VALVE 失效
公开(公告)号：JPH10160021A
公开(公告)日：1998-06-16
申请号：JP32125296
申请日：1996-12-02
申请人： CKD CORP
发明人： FURUICHI YOSHISATO , MATSUOKA YUJI , MORI YOJI , KONDO YOSHIHIRO
IPC分类号： F16K24/04 , F16K1/44 , F16K31/122
摘要： PROBLEM TO BE SOLVED: To prevent the change of the flow of a second valve to exhaust a small flow, keep a constant flow for a long time, and adjust the flow, by arranging an exchangeable orifice member in a bypass channel which is communicated or disconnected by the second valve when a first valve is closed. SOLUTION: A first valve element 27 is energized by a spring 28 and is brought into contact with a first valve seat 26, so that a main channel 25 is disconnected. Also, a second valve element 34 is also energized by a spring 29 and is brought into contact with a second valve seat 37, so that a bypass channel 36 is disconnected. Here, when a small flow is exhausted, a first port 15 is pressurized, thereby pressure of a first pressure chamber 13 is increased, and a valve piston chamber 32a is also boosted. Then, a valve piston 32 is downwardly moved against the energization force of a spring 42. The second valve element 34 is separated from the second valve seat 37 against the energization force of the spring 29 through a diaphragm 40 and a valve button 38. Then, the small flow is exhausted through a bypass passage 36 and an orifice member 4. The flow is determined by orifice diameter, and can be exchanged. Even through valve opening/closing action is increased, a constant flow can be continuously maintained.

7. 发明专利

JP2002095954A CONTROLLING SYSTEM FOR VACUUM PRESSURE 失效
公开(公告)号：JP2002095954A
公开(公告)日：2002-04-02
申请号：JP2000289753
申请日：2000-09-25
申请人： CKD CORP
发明人： MATSUOKA YUJI , NITTA SHINICHI , ISHIHARA TETSUYA , ITO MINORU
IPC分类号： B05C9/12 , B01J3/00 , H01L21/027 , H01L21/316
摘要： PROBLEM TO BE SOLVED: To provide a controlling system for vacuum pressure, in which a liquid material film formed on a wafer is dried and solidified without performing temperature control and also uniformity of thickness of the liquid material film can be secured. SOLUTION: In the controlling system 1 for vacuum pressure, when a wafer 16 applied with a liquid material film 17 is disposed in the inside of a vacuum vessel 11, the opening degree of a vacuum proportional stop valve 14 positioned on a pipeline 13 connecting both the vacuum vessel 11 and a vacuum pump 12 is controlled on the basis of output of a vacuum pressure sensor 15 measuring vacuum pressure of the inside of the vacuum vessel 11. Thereby, the vacuum pressure in the inside of the vacuum vessel 11 is reached to a target vacuum pressure from the atmospheric pressure at the change velocity of the target vacuum pressure. At this time, the target vacuum pressure is established to a value within the range from the atmospheric pressure to the saturated vapor pressure of an organic solvent contained in the liquid material film 17 formed on the wafer 16.

8. 发明专利

JP2000154878A GATE TYPE VACUUM SHUT-OFF VALVE 失效
公开(公告)号：JP2000154878A
公开(公告)日：2000-06-06
申请号：JP864199
申请日：1999-01-18
申请人： CKD CORP
发明人： MORI YOJI , YOSHIDA KAZUHIRO , MATSUOKA YUJI
IPC分类号： F16K3/18
摘要： PROBLEM TO BE SOLVED: To provide a gate type vacuum shut-off valve capable of preventing the occurrence of a particle. SOLUTION: This gate type vacuum shut-off valve 6 is operated in two steps composed of a first drive for moving a partition plate 36 in the vertical direction and a second drive for moving it in the horizontal direction. It has a drive means 42 which brings about the reciprocal movement in the vertical direction, a first action member 46 which moves vertically over the whole region of a movement output region by the drive means 42, a second action member 47 which moves vertically in a predetermined region of the movement output region by the drive means 42, a slide member 52 which is slidably engaged and provided in the horizontal direction for the second action member 47 and is connected to the partition plate 36, and an output transmission means 53, 51 which convert the movement in the vertical direction of the first action member 46 in the movement output region of the drive means 42 in which the second action member 47 stops into the movement in the horizontal direction of the slide member 52 and transmit it.

9. 发明专利

JP2000028013A GATE TYPE VACUUM SHUT-OFF VALVE 失效
公开(公告)号：JP2000028013A
公开(公告)日：2000-01-25
申请号：JP19690598
申请日：1998-07-13
申请人： CKD CORP
发明人： MORI YOJI , MATSUOKA YUJI
IPC分类号： F16K3/18 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a gate type vacuum shut-off valve preventing generation of particle. SOLUTION: This gate type vacuum shut-off valve is operated by two stages of a first driving moving a valve element 14 between an interruption location at the front surface of an opening part 13 and a retreating location retreated from the interruption location and a second driving making the valve element 14 be perpendicularly abutted/away on/from a valve seat surface 15 formed on the opening part 13 at the interruption location. The valve has a first driving means 51 for first driving which is disposed at the outside of a valve main body 10, passes through the valve main body 10 via a seal means and is connected with the valve element 14. The valve element 14 is the one in which a partition plate 23 holding a valve sheet 27 is slid and supported on a fixing part 21 connected with the first driving means 51 and is formed integrally with a diaphragm 25 movable in a sliding direction within air tight pressurizing chambers 31, 32 partitioned and provided at the fixing part 21, and the valve element 14 performs a second driving by pressurizing the diaphragm 25 on operating fluid supplied within the pressurizing chambers 31, 32.

10. 发明专利

JPH11315939A GATE TYPE VACUUM CUTOFF VALVE 失效
公开(公告)号：JPH11315939A
公开(公告)日：1999-11-16
申请号：JP12579898
申请日：1998-05-08
申请人： CKD CORP
发明人： MORI YOJI , MATSUOKA YUJI
IPC分类号： F16K3/18 , F16K51/02
摘要： PROBLEM TO BE SOLVED: To provide a gate type vacuum cutoff valve capable of preventing the generation of particles. SOLUTION: A gate type vacuum cutoff valve 6 operates a valve body 14 in the two stages of up and down/left and right. The valve body 14 is provided with a partition plate 21 holding a valve seat, the plate 21 being attached to a fixed part 22 in a direction vertical to a valve seat surface 15 so as to be freely slid and connected by a connecting member for plotting the sliding part thereof in an air tight state, a valve body driving means provided in a plotted part for pressing the partition plate 21 by the deformation of a direction vertical to the valve seat surface 15 and bringing the valve seat into contact with the valve seat surface 15, and an elastic member for separating the partition plate 21 from the valve seat surface 15. The valve body 14 is further provided with first and second driving means 42 and 51 arranged outside a valve main body 10, first transmitting means 44 and 54 connected to the fixed part 22 to transmit the output of the first driving means 42 to the valve body, and second transmitting means 53 and 54 connected to a valve body driving means to transmit the output of the second driving means as a force for deforming the valve body driving means.

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