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1. 发明授权

EP3313550B1 MEMS DEPOSITION TRAP FOR VACUUM TRANSDUCER PROTECTION 有权转让
公开(公告)号：EP3313550B1
公开(公告)日：2021-12-29
申请号：EP16736410.8
申请日：2016-06-24
发明人： WOJTAS, Nina
IPC分类号： G01L21/00 , G01L19/06

2. 发明公开

EP3904247A1 VACUUM MULTI-SENSING UNIT 审中-公开
公开(公告)号：EP3904247A1
公开(公告)日：2021-11-03
申请号：EP20889723.1
申请日：2020-11-11
申请人： VTEC Co., Ltd.
发明人： CHO, Ho-Young
IPC分类号： B65G47/91 , G01L21/00 , G08B5/36
摘要： The present invention relates to a vacuum multi-sensing unit (10) used for adhesion and transfer of an object (P) together with a vacuum pump (23) in a vacuum transfer system. The multi-sensing unit (10) of the present invention includes a plurality of sensors (13) to perform multi-sensing, wherein individual and collective control of the built-in sensors (13) is possible. Therefore, in particular, when a plurality of vacuum pumps (23) are required for transfer of objects (P), the plurality of vacuum pumps (23) are allowed to correspond to a single unit (10), and thus, compared to a conventional sensing unit individually attached to each vacuum pump, there is superior effect in terms of the efficiency of manufacture, installation, management, operation, and control of the unit (10) .

3. 发明公开

EP3567355A1 VACUUM GAUGE 有权
公开(公告)号：EP3567355A1
公开(公告)日：2019-11-13
申请号：EP17889729.4
申请日：2017-06-30
申请人： Q'Z Corporation
发明人： HOJOH Hisao
IPC分类号： G01L21/00 , G01L9/00
摘要： A vacuum gauge includes an introduction tube 320, a diaphragm 40 displaced by a gas to be measured that is introduced from the introduction tube, a piezoelectric element 50 that has one end coupled to the diaphragm and is displaced along with the diaphragm, an inner structure 310 to which a circumferential edge of the diaphragm and the other end of the piezoelectric element are secured, the inner structure being coupled to the introduction tube, and an airtight container 300 to airtightly enclose the introduction tube and the inner structure. The inner structure, the introduction tube, and the diaphragm airtightly partition a space in the airtight container into a pressure introduction chamber 130 to which the gas to be measured is introduced on one surface side of the diaphragm, and a reference pressure chamber 120 on the other surface side of the diaphragm. The reference pressure chamber is set at a high vacuum that is lower than the pressure lower limit of the gas to be measured.

4. 发明公开

EP3202727A4 GLASS PANEL UNIT AND INSPECTION METHOD THEREOF 有权
公开(公告)号：EP3202727A4
公开(公告)日：2017-10-11
申请号：EP15847988
申请日：2015-09-17
申请人： PANASONIC IP MAN CO LTD
发明人： ISHIBASHI TASUKU , URIU EIICHI , ABE HIROYUKI , HASEGAWA KENJI
IPC分类号： C03C27/06 , G01L21/00 , G01M3/02
CPC分类号： G01M3/02 , C03C27/06 , G01L21/00 , G01N7/04 , G01N21/783
摘要： The glass panel unit 10 includes: a first glass panel 20; a second glass panel 30; a seal 40; an evacuated space 50; and a gas adsorbent 60. The seal 40 with a frame shape hermetically bonds the first glass panel 20 and the second glass panel 30 to each other. The gas adsorbent 60 is placed in the evacuated space 50. The gas adsorbent 60 includes a getter. The gas adsorbent 60 is visible through at least one of the first glass panel 20 and the second glass panel 30. The gas adsorbent 60 has properties of changing its color when adsorbing gas.

5. 发明公开

EP2930488A1 Vorrichtung zur Bestimmung des Drucks in einer Vakuumkammer 审中-公开
标题翻译：装置，用于确定在真空室中的压力
公开(公告)号：EP2930488A1
公开(公告)日：2015-10-14
申请号：EP14305533.3
申请日：2014-04-10
申请人： Nexans
发明人： Soika, Rainer , West, Beate , Frohne, Christian , Charrier, Dimitri , Charmetant, Adrien
IPC分类号： G01L21/00
CPC分类号： G01L21/12 , G01L19/086 , G01L21/16
摘要： Es wird eine Vorrichtung zur Bestimmung des Drucks in einer Vakuumkammer angegeben, welche einen innerhalb der Vakuumkammer angeordneten Vakuumsensor umfaßt. Innerhalb der Vakuumkammer ist ein mit dem Vakuumsensor verbundener Wiedergabesender und außerhalb der Vakuumkammer ist ein mit dem Wiedergabesender drahtlos verbundener Empfänger angeordnet. Der Empfänger ist mit einer außerhalb der Vakuumkammer angeordneten Anzeigeeinheit verbunden. Der Wiedergabesender und der Empfänger sind zu beiden Seiten einer Wand der Vakuumkammer angeordnet, sodaß von dem Vakuumsensor erfaßte Meßwerte von dem Wiedergabesender drahtlos zu dem Empfänger übertragbar und von der Anzeigeeinheit anzeigbar sind.
摘要翻译：提供一种用于确定在一真空腔室包括布置在所述真空传感器内的真空室中的压力提供了一种装置。内的真空室连接至真空传感器再现发射机和外真空室，一个无线地连接到再现收发器被布置。所述接收器被连接到设置在显示单元的外部的真空室。再现发射机和接收机被布置在真空腔室的壁的两侧上，以便通过真空从再现站传感器测量值感测到被无线地传输到接收器，并通过该显示单元显示出来。

6. 发明授权

EP2153190B1 PRESSURE GAUGE 有权
标题翻译：压力测量装置
公开(公告)号：EP2153190B1
公开(公告)日：2014-02-12
申请号：EP08763188.3
申请日：2008-06-04
申请人： NXP B.V.
发明人： PHAN LE, Kim , VAN BEEK, Jozef, T., M.
IPC分类号： G01L9/00 , G01L21/00 , G01D5/00 , H03H3/00
CPC分类号： G01L21/22 , G01L9/0022 , H03H9/02259 , H03H9/2452 , H03H2009/02496

7. 发明授权

EP2347556B1 UPSTREAM SIGNAL PROCESSING FOR CLIENT DEVICES IN A SMALL-CELL WIRELESS NETWORK 有权
标题翻译：上游信号处理客户端设备在无线小小区网络
公开(公告)号：EP2347556B1
公开(公告)日：2012-04-04
申请号：EP09792211.6
申请日：2009-09-03
申请人： Dolby Laboratories Licensing Corporation
发明人： BAUER, Claus , CROCKETT, Brett G. , ROBINSON, Charles Q.
IPC分类号： H04L29/06 , G01L21/00
CPC分类号： H04L65/605 , G10L21/0208 , H04N21/214
摘要： Methods, apparatuses and program logic in storage media to process media data for quality enhancement. The media data is for rendering at a wireless device. Environmental quantities are accepted from one or more sensors located remote from the wireless device but sufficiently close to be indicative of similar quantities in the device's environment. The sensors at in or connected to a network node. At the network node, the method includes processing the media data using the environmental quantities to generate processed data, and wirelessly sending the processed output to the resource constrained device for rendering, such that the processed output is usable by the resource constrained device to render or to process and render the media data.

8. 发明授权

EP1979730B1 VAKUUMMESSZELLE MIT MEMBRAN 有权转让
标题翻译：与脂膜真空测量计
公开(公告)号：EP1979730B1
公开(公告)日：2011-06-01
申请号：EP06804883.4
申请日：2006-11-23
申请人： Inficon GmbH
发明人： WÜEST, Martin
IPC分类号： G01L9/00 , G01L21/00
CPC分类号： G01L19/0636 , G01L9/0047 , G01L9/0075 , G01L21/00
摘要： The invention relates to a vacuum measuring cell having a membrane (2, 41) which is arranged between two flat housing parts (1, 4), wherein the first housing part (1) forms a reference vacuum space (10) and the second housing part (4) forms a measuring vacuum space (9) having connection means (5) for connection to the medium to be measured, and means are provided for the purpose of measuring the displacement of the membrane, wherein the membrane surface (41a) which is exposed to the medium to be measured is in the form of a patterned surface in such a manner that stress bending caused by material from the measurement medium, which is deposited on the membrane, is considerably reduced.

9. 发明公开

EP1794565A1 PRESSURE TRANSDUCER WITH IMPROVED PROCESS ADAPTER 有权
标题翻译：可改善制程ADAPTER压力转换
公开(公告)号：EP1794565A1
公开(公告)日：2007-06-13
申请号：EP05799913.8
申请日：2005-09-29
申请人： Rosemount, Inc.
发明人： ERIKSEN, Christopher, L. , SITTLER, Fred, C.
IPC分类号： G01L19/06 , G01L21/00 , G01L9/00 , G01L9/12
CPC分类号： G01L19/0636 , G01L9/006 , G01L19/0038 , G01L19/0609 , G01L19/147
摘要： A pressure transducer (10) for clean environments is disclosed. The pressure transducer (10) includes a process coupler (16), a sensor module (14), a shield (30) and electronics. The process coupler (16) is configured to couple to a source of process media at a process inlet (32). The sensor module (14) is coupled to the process coupler (16) and has a pressure sensor (15) therein. The pressure sensor (15) has an electrical characteristic that varies in response to pressure within the sensor module (14). The shield (30) is disposed adjacent to the process coupler (16) and configured to obstruct substantially all lines of sight between the process inlet (32) and the pressure sensor (15). Electronics within the transducer (10) are coupled to the pressure sensor (15) to measure the electrical characteristic and provide an indication thereof. A method of sensing a pressure in a clean environment is also provided.

10. 发明公开

EP0396843A3 GAS PARTIAL PRESSURE SENSOR FOR VACUUM CHAMBER 失效
标题翻译：用于真空室的气体部分压力传感器
公开(公告)号：EP0396843A3
公开(公告)日：1991-08-07
申请号：EP89420314
申请日：1989-08-25
申请人： LEYBOLD INFICON INC.
发明人： GOGOL, CARL A.
IPC分类号： G01N21/62 , G01L21/00 , G01N23/225 , G01Q30/02 , G01Q30/12 , G01Q30/16 , G01N23/22
CPC分类号： G01L21/00 , G01N23/2251
摘要： A sensor for measuring the relative amount of a specific gas within a vacuum chamber, comprising :
- electron beam generator (20) providing an electron beam to excite within an interaction volume the atoms and molecules of said gas, whereby said atoms and molecules emit photons characteristic of said gas ;
- means in communication with said chamber for conducting said gas to said electron beam ;
- photodetector means (38) for viewing photons emitted by said atoms and molecules, including discrimi nating means (40) for selecting the photons of said wavelength and excluding others, and means for detecting the intensity of said photons and converting said inten sity to a proportional electric signal ;
- a thermal isolation barrier (33) of a low thermal conductivity, low thermal inertia material disposed over said electron beam generator (20) and interaction volume to facilitate rapid thermal stabilization of the sur roundings of the interaction volume.

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