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1. 发明公开

EP4212824A1 MICROELECTROMECHANICAL GYROSCOPE WITH OUT-OF-PLANE DETECTION MOVEMENT HAVING IMPROVED ELECTRICAL CHARACTERISTICS 审中-实审
公开(公告)号：EP4212824A1
公开(公告)日：2023-07-19
申请号：EP23150057.0
申请日：2023-01-02
申请人： STMicroelectronics S.r.l.
发明人： FEDELI, Patrick , GUERINONI, Luca , CARULLI, Paola , FALORNI, Luca Giuseppe
IPC分类号： G01C19/5712 , B81B7/00 , B81B7/02
摘要： A microelectromechanical gyroscope (10) is provided with a detection structure (11) having: a substrate (14) with a top surface (14a) parallel to a horizontal plane (xy); a mobile mass (12), suspended above the substrate to perform, as a function of a first angular velocity (Ω x ) around a first axis (x) of the horizontal plane (xy), at least a first detection movement of rotation around a second axis (y) of the horizontal plane; and a first and a second stator elements (28a, 28b) integral with the substrate and arranged underneath the mobile mass to define a capacitive coupling, a capacitance value thereof is indicative of the first angular velocity (Ω x ). The detection structure has a single mechanical anchorage structure for anchoring both the mobile mass and the stator elements to the substrate, arranged internally with respect to the mobile mass, which is coupled to this single mechanical anchorage structure by coupling elastic elements (18) yielding to torsion around the second axis; the stator elements are integrally coupled to the single mechanical anchorage structure in an arrangement suspended above the top surface of the substrate.

2. 发明授权

EP3407016B1 PIEZOELECTRIC GYROSCOPE WITH TRANSVERSAL DRIVE TRANSDUCER 有权
公开(公告)号：EP3407016B1
公开(公告)日：2021-07-07
申请号：EP18173764.4
申请日：2018-05-23
发明人： Kuisma, Heikki
IPC分类号： G01C19/5712

3. 发明授权

EP3080618B1 OPTOMECHANICAL INERTIAL SENSOR 有权
公开(公告)号：EP3080618B1
公开(公告)日：2020-11-11
申请号：EP14869807.9
申请日：2014-11-19
申请人： Intel Corporation
发明人： HUTCHISON, David N. , HECK, John
IPC分类号： G01P15/14 , G01P15/02 , G01C19/5656 , B81B7/02 , G01C19/5712 , G01C19/5733 , G01C19/5776 , G01P15/093 , G01P15/08 , G01B9/02

4. 发明公开

EP3671116A1 SYNCHRONIZED MULTI-AXIS GYROSCOPE 有权
公开(公告)号：EP3671116A1
公开(公告)日：2020-06-24
申请号：EP19211120.1
申请日：2019-11-25
申请人： Murata Manufacturing Co., Ltd.
发明人： Kuisma, Heikki , Blomqvist, Anssi , Rytkönen, Ville-Pekka
IPC分类号： G01C19/5684 , G01C19/5712 , G01C19/5733 , G01C19/574
摘要： The disclosure relates to a microelectromechanical gyroscope which comprises first and second proof masses which form a first proof mass pair and third and fourth proof masses which form a second proof mass pair. The oscillation of the first and second proof mass pairs is synchronized by a synchronization element which comprises a ringlike body and torsion bars which extend along the x-axis from the ringlike body to the first, second, third and fourth proof masses.

5. 发明公开

EP3640591A1 MICROELECTROMECHANICAL DEVICE FOR DETECTION OF ROTATIONAL MOTION 有权
公开(公告)号：EP3640591A1
公开(公告)日：2020-04-22
申请号：EP19202973.4
申请日：2019-10-14
申请人： Murata Manufacturing Co., Ltd.
发明人： Blomqvist, Anssi , Rytkönen, Ville-Pekka
IPC分类号： G01C19/5712
摘要： An improved design for a microelectromechanical device that enables multi-axis detection but is also more robust in demanding operating conditions. The device has a balanced structure formed of two oscillating inertial masses, coupled in a way that optimally utilizes inherent stiffnesses of spring structures to increase robustness of the combined device structure.

6. 发明授权

EP2963387B1 MICRO-ELECTRO-MECHANICAL DEVICE WITH COMPENSATION OF ERRORS DUE TO DISTURBANCE FORCES, SUCH AS QUADRATURE COMPONENTS 有权
公开(公告)号：EP2963387B1
公开(公告)日：2019-07-31
申请号：EP15172600.7
申请日：2015-06-17
申请人： STMicroelectronics Srl
发明人： FALORNI, Luca Giuseppe , VALZASINA, Carlo , CARMINATI, Roberto , TOCCHIO, Alessandro
IPC分类号： G01C19/5733 , B81B3/00 , G01C19/5747 , G01C19/5712

7. 发明授权

EP2425206B1 VERFAHREN ZUM PRÄZISEN MESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS 有权转让
公开(公告)号：EP2425206B1
公开(公告)日：2019-01-09
申请号：EP10718943.3
申请日：2010-04-28
申请人： Continental Teves AG & Co. OHG , Murata Electronics Oy
发明人： SIVARAMAN, Ramnath , SCHMID, Bernhard , HILSER, Roland , GÜNTHNER, Stefan , KLEMETTI, Petri
IPC分类号： G01C19/56 , G01C19/5712 , G01C19/5755

8. 发明授权

EP2984449B1 DREHRATENSENSOR 有权
公开(公告)号：EP2984449B1
公开(公告)日：2018-06-13
申请号：EP14717717.4
申请日：2014-04-07
申请人： Robert Bosch GmbH
发明人： REINMUTH, Jochen
IPC分类号： G01C19/5719 , G01C19/5712 , G01C19/574
CPC分类号： G01C19/5712 , G01C19/5719 , G01C19/574

9. 发明公开

EP3296691A1 MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE 审中-公开
标题翻译： MEMS陀螺仪具有2自由度的感应模式
公开(公告)号：EP3296691A1
公开(公告)日：2018-03-21
申请号：EP16792949.6
申请日：2016-05-10
申请人： Shin Sung C&T Co., Ltd.
发明人： SONG, Ci Moo , YOUN, Keun Jung , KANG, Jeong Sik , KIM, Yong Kook , HAN, Seung Ho , SONG, Hyun Ju
IPC分类号： G01C19/5712 , B81B7/02
CPC分类号： G01C19/5712 , B81B3/0062 , B81B7/02 , B81B2201/0242 , B81B2203/0163 , G01C19/5719 , G01C19/5747
摘要： Provided is an MEMS gyroscope, which is resistant against external environmental changes such as a microfabrication process error, a vacuum package process error and a temperature change. The MEMS gyroscope comprises: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by Cori-olis force in a sensing mode when an external an-gular velocity is inputted into the frame; and at least two sensing electrodes for sensing the dis-placement of the sensor mass body, the displace-ment being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body encompassing the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.
摘要翻译：本发明提供一种能够抵抗微加工工艺误差，真空封装工艺误差和温度变化等外部环境变化的MEMS陀螺仪。 MEMS陀螺仪包括：平行于底部晶圆衬底布置的框架; 在激励模式下以一个自由度激励的传感器质量体，并且当外部转动速度输入到所述框架中时，在感测模式下通过科里奥利力以两个自由度感测所述位移; 以及至少两个感测电极，用于感测所述传感器质量体的位移，所述位移在所述两个自由度处被感测，其中所述传感器质量体包括内部质量体和包围所述内部质量体的外部质量体，所述外部质量体和所述框架通过第一支撑弹簧连接，并且所述外部质量体和所述内部质量体通过第二支撑弹簧连接。

10. 发明公开

EP3080618A4 OPTOMECHANICAL INERTIAL SENSOR 有权
公开(公告)号：EP3080618A4
公开(公告)日：2017-11-01
申请号：EP14869807
申请日：2014-11-19
申请人： INTEL CORP
发明人： HUTCHISON DAVID N , HECK JOHN
IPC分类号： G01P15/14 , B81B7/02 , G01B9/02 , G01C19/5656 , G01C19/5712 , G01C19/5733 , G01C19/5776 , G01P15/02 , G01P15/08 , G01P15/093
CPC分类号： G01P15/093 , G01B9/02023 , G01C19/56 , G01C19/5712 , G01C19/5733 , G01C19/5776 , G01P2015/0848
摘要： Embodiments of the present disclosure are directed towards techniques and configurations for MEMS sensing device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam, and a waveguide configured to split the light beam into two portions. The waveguide may include two arms through which the respective portions of the light beam may respectively pass, and disposed substantially parallel with each other and joined together around their respective ends to recombine the portions into a light beam. One of the arms may be deformable. A deformation of the arm may result in a change of an optical path length of a portion of the light beam traveling through the arm, causing a detectable change in light intensity of the recombined light beam outputted by the waveguide. Other embodiments may be described and/or claimed.

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