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1. 发明公开

EP3296692A1 SYMMETRICAL Z-AXIS MEMS GYROSCOPE 审中-公开
标题翻译：对称Z轴MEMS陀螺仪
公开(公告)号：EP3296692A1
公开(公告)日：2018-03-21
申请号：EP16792952.0
申请日：2016-05-10
申请人： Shin Sung C&T Co., Ltd.
发明人： SONG, Ci Moo , YOUN, Keun Jung , KANG, Jeong Sik , KIM, Yong Kook , HAN, Seung Ho , SONG, Hyun Ju
IPC分类号： G01C19/5712 , G01C19/574 , B81B7/02
CPC分类号： G01C19/574 , B81B7/02 , G01C19/5712 , G01C19/5747 , G01C19/5769
摘要： A novel symmetrical Z-axis MEMS gyro-scope is provided. The MEMS gyroscope comprises: a sensor frame arranged parallel to a bottom wafer substrate; a sensor mass body moving relative to the sensor frame and excited at one degree of freedom in an excitation mode; and at least one sensing electrode for sensing the displacement of the sensor mass body at one degree of freedom in a sensing mode by Coriolis force when an external angular velocity is inputted into the sensor mass body, wherein the sensor mass body comprises two mass units, the two mass units are arranged in an axisymmetric form to each other, and the antiphase movements of the two mass units are maintained by an antiphase link device directly or indirectly connected between the two mass units.
摘要翻译：提供了一种新型的对称Z轴MEMS陀螺仪。 MEMS陀螺仪包括：平行于底部晶片衬底布置的传感器框架; 传感器质量体，所述传感器质量体相对于所述传感器框架移动并且在激励模式下以一个自由度激励; 以及至少一个感测电极，用于当外部角速度输入到所述传感器质量体中时在感测模式下通过科里奥利力以一个自由度感测所述传感器质量体的位移，其中所述传感器质量体包括两个质量单元，两个质量单元彼此以轴对称的形式布置，并且两个质量单元的反相运动通过直接或间接连接在两个质量单元之间的反相连接装置来维持。

2. 发明公开

EP3296691A1 MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE 审中-公开
标题翻译： MEMS陀螺仪具有2自由度的感应模式
公开(公告)号：EP3296691A1
公开(公告)日：2018-03-21
申请号：EP16792949.6
申请日：2016-05-10
申请人： Shin Sung C&T Co., Ltd.
发明人： SONG, Ci Moo , YOUN, Keun Jung , KANG, Jeong Sik , KIM, Yong Kook , HAN, Seung Ho , SONG, Hyun Ju
IPC分类号： G01C19/5712 , B81B7/02
CPC分类号： G01C19/5712 , B81B3/0062 , B81B7/02 , B81B2201/0242 , B81B2203/0163 , G01C19/5719 , G01C19/5747
摘要： Provided is an MEMS gyroscope, which is resistant against external environmental changes such as a microfabrication process error, a vacuum package process error and a temperature change. The MEMS gyroscope comprises: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by Cori-olis force in a sensing mode when an external an-gular velocity is inputted into the frame; and at least two sensing electrodes for sensing the dis-placement of the sensor mass body, the displace-ment being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body encompassing the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.
摘要翻译：本发明提供一种能够抵抗微加工工艺误差，真空封装工艺误差和温度变化等外部环境变化的MEMS陀螺仪。 MEMS陀螺仪包括：平行于底部晶圆衬底布置的框架; 在激励模式下以一个自由度激励的传感器质量体，并且当外部转动速度输入到所述框架中时，在感测模式下通过科里奥利力以两个自由度感测所述位移; 以及至少两个感测电极，用于感测所述传感器质量体的位移，所述位移在所述两个自由度处被感测，其中所述传感器质量体包括内部质量体和包围所述内部质量体的外部质量体，所述外部质量体和所述框架通过第一支撑弹簧连接，并且所述外部质量体和所述内部质量体通过第二支撑弹簧连接。

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