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    • 1. 发明公开
    • HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES
    • EP4235735A1
    • 2023-08-30
    • EP22461511.2
    • 2022-02-28
    • TRUMPF Huettinger Sp. Z o. o.
    • The designation of the inventor has not yet been filed
    • H01J37/32H01J37/34C23C14/34C23C16/515H03K3/00H03K4/00
    • High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising:
      - several low-power- (LP-) generators (14, 16 ,18),
      o each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component,
      o each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18),

      - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18),
      - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20),
      - wherein a damping circuit (50) is positioned between several, in particular all of the LP-generators (14, 16, 18) in an open chain configuration, where in particular the damping circuit (50) comprises a resistor (R) and/or an inductivity (L).
    • 2. 发明公开
    • HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES
    • EP4235733A1
    • 2023-08-30
    • EP22461509.6
    • 2022-02-28
    • TRUMPF Huettinger Sp. Z o. o.
    • The designation of the inventor has not yet been filed
    • H01J37/32H01J37/34H03K3/00H03K4/00C23C14/34
    • High-power- (HP-) generator (10) and a method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising:
      - several low-power- (LP-) generators (14, 16 ,18),
      ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component,
      ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18),

      - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18),
      - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20),
      - wherein a control unit (22) is further configured to select the contribution of LP-generators (14, 16, 18) in a way that one or a combination of the following features are accomplished:
      the output of the coupling (20) and/or the output of the HP-generator (10) is a step-function, in particular at the rising and/or falling edge of a pulse and/or during the pulse.
    • 4. 发明公开
    • Slope generator
    • Schaltung zur Erzeugung von Signalen mit einstellbarer Flankensteilheit
    • EP0959561A1
    • 1999-11-24
    • EP98124629.1
    • 1998-12-23
    • Hewlett-Packard Company
    • Koffmane, GerdLazar, Alexander
    • H03K4/00H03K4/94
    • H03K17/04113H03K4/94
    • A slope generator (100) generates, in response to an input signal (V_in), a slope between a first (V_l) and a second (V_h) voltage level of an output voltage (V_out) at an output node (25). The slope generator (100) comprises a capacitor (C_ramp) coupled to the output node (25), a first current source (20) for providing a first current (I_up) to the output node (25), and a second current source (30) for providing a second current (I_dn) to the output node (25) controlled by a first current switch (40). A control electrode of a first current path of the first current switch (40) is coupled to and controlled by the input signal (V_in), a second current path is coupled to the output node (25), and the first current switch (40) provides the first (V_l) and the second (V_h) voltage levels, or corresponding voltage levels derived therefrom, to the output node (25).
    • 斜率发生器(100)响应于输入信号(V_in)产生在输出节点(25)处的输出电压(V_out)的第一(V_l)和第二(V_h)电压电平之间的斜率。 斜坡发生器(100)包括耦合到输出节点(25)的电容器(C_ramp),用于向输出节点(25)提供第一电流(I_up)的第一电流源(20)和第二电流源 30),用于向由第一电流开关(40)控制的输出节点(25)提供第二电流(I_dn)。 第一电流开关(40)的第一电流路径的控制电极被耦合到输入信号(V_in)并由其控制,第二电流路径耦合到输出节点(25),第一电流开关(40) )向输出节点(25)提供第一(V_l)和第二(V_h)电压电平或从其导出的相应电压电平。
    • 6. 发明公开
    • Sawtooth oscillator
    • Sägezahnoszillator。
    • EP0574979A1
    • 1993-12-22
    • EP93201629.8
    • 1993-06-08
    • Philips Electronics N.V.
    • Schoofs, Franciscus Adrianus Cornelis MariaDijkmans, Eise Carel
    • H03K4/50H03K4/00
    • H03K4/00H03K4/502
    • Sawtooth oscillator comprising: a first capacitor (14), a current source (12) having an output (10) coupled to the first capacitor (14) for supplying a charge current (I) to the first capacitor (14), discharging means (20, 22) for discharging the first capacitor (14) during a discharge period (TDS) in response to a voltage (UC) on the first capacitor (14), a second capacitor (30) coupled to the output (10) of the current source (12), interrupting means (26) for interrupting the supply of the charge current (I) to the first capacitor (14) during an interrupt period (TIS) part of which charge current occurring during the discharge period (TDS), supply means (24, 26, 40, 46, 34) for supplying subsequent to the interrupt period (TIS) the first capacitor (14) with a charge surplus built up by the charge current (I) in the second capacitor (30). The current supply to the first capacitor (14) is temporarily interrupted by the interrupting means (48) at least during part of the discharge period. The second capacitor (30) operates as an auxiliary capacitor in which the charge is stored which would otherwise have been supplied to the first capacitor (14). After the interrupt period the charge stored in the second capacitor (30) is supplied back to the first capacitor (14) by the supply means (50). In this manner there is achieved that substantially no charge current is lost during a total period of time of a charge and discharge cycle. In the total period of time the whole charge current of the current source ends up in the first capacitor, so that tolerances in the discharge period no longer affect the oscillation frequency of the sawtooth oscillator.
    • 锯齿振荡器包括:第一电容器(14),具有耦合到第一电容器(14)的输出(10)的电流源(12),用于向第一电容器(14)提供充电电流(I),放电装置 20),用于响应于所述第一电容器(14)上的电压(UC)在放电期间(TDS)期间对所述第一电容器(14)进行放电;第二电容器(30),耦合到所述第一电容器 电流源(12),用于在放电期间(TDS)期间发生的充电电流的中断周期(TIS)部分期间中止向第一电容器(14)供应充电电流(I)的中断装置(26) 供给装置(24,26,40,46,34),用于在第一电容器(14)的中断周期(TIS)之后提供由第二电容器(30)中的充电电流(I)构成的电荷剩余。 至少在放电期间的部分期间,通过中断装置(48)暂时中止向第一电容器(14)供电的电流。 第二电容器(30)作为辅助电容器工作,其中存储电荷,否则该电荷将被提供给第一电容器(14)。 在中断周期之后,存储在第二电容器(30)中的电荷由供给装置(50)提供给第一电容器(14)。 以这种方式,实现了充电和放电循环的总时间段内基本上不会损耗充电电流。 在整个时间段内,电流源的整个充电电流在第一个电容器中结束,因此放电周期的公差不再影响锯齿波振荡器的振荡频率。