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1. 发明授权

EP3507607B1 METHOD FOR MEASURING DAMAGE OF A SUBSTRATE CAUSED BY AN ELECTRON BEAM 有权
公开(公告)号：EP3507607B1
公开(公告)日：2023-08-02
申请号：EP17762237.0
申请日：2017-08-30
发明人： SADEGHIAN MARNANI, Hamed
IPC分类号： G01Q30/02 , G01Q60/32 , G01N23/225 , G01N23/2251 , G01N29/04 , G01N29/06 , G01N29/12 , G01N33/00

2. 发明公开

EP3704494A1 METHOD OF PERFORMING ATOMIC FORCE MICROSCOPY 有权
公开(公告)号：EP3704494A1
公开(公告)日：2020-09-09
申请号：EP18812390.5
申请日：2018-11-02
申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
发明人： VAN RIEL, Martinus Cornelius Johannes Maria , VAN NEER, Paul Louis Maria Joseph , SADEGHIAN MARNANI, Hamed , VAN ES, Maarten Hubertus
IPC分类号： G01Q60/32 , G01N29/06 , G01Q30/14

3. 发明公开

EP3602081A1 VERFAHREN ZUM KALIBRIEREN EINER SPITZE EINES RASTERKRAFTMIKROSKOPS 有权转让
公开(公告)号：EP3602081A1
公开(公告)日：2020-02-05
申请号：EP18714195.7
申请日：2018-03-22
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： GLUCH, Jürgen , KOPYCINSKA-MÜLLER, Malgorzata , KÖHLER, Bernd , RABE, Ute
IPC分类号： G01Q40/00 , G01Q60/32 , G01Q60/36

4. 发明授权

EP2325657B1 SCANNING TYPE PROBE MICROSCOPE 有权
公开(公告)号：EP2325657B1
公开(公告)日：2020-01-22
申请号：EP09809469.1
申请日：2009-07-16
申请人： National University Corporation Kanazawa University
发明人： FUKUMA, Takeshi , MITANI, Yuji
IPC分类号： G01Q10/06 , G01Q60/32

5. 发明公开

EP3491396A1 DISPOSITIF D'ANALYSE VOLUMETRIQUE D'UN ECHANTILLON ORGANIQUE OU INORGANIQUE 有权
公开(公告)号：EP3491396A1
公开(公告)日：2019-06-05
申请号：EP17758587.4
申请日：2017-07-25
申请人： Université de Bourgogne
发明人： BOURILLOT, Eric , LESNIEWSKA, Eric , VITRY, Pauline
IPC分类号： G01Q60/32 , G01N29/06

6. 发明公开

EP3349019A1 METHOD OF AND SYSTEM FOR PERFORMING DETECTION ON OR CHARACTERIZATION OF A SAMPLE 审中-公开
公开(公告)号：EP3349019A1
公开(公告)日：2018-07-18
申请号：EP17151429.2
申请日：2017-01-13
申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人： Sadeghian Marnani, Hamed , Kramer, Lukas , van Es, Maarten Hubertus
IPC分类号： G01Q60/32 , G01N29/06
CPC分类号： G01Q60/32 , G01N29/041 , G01N29/0681 , G01N29/2418 , G01N2291/263
摘要： The present document relates to a an atomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.

7. 发明授权

EP2416164B1 Band excitation method applicable to scanning probe microscopy 有权
标题翻译：带激发法适用于扫描探针显微镜
公开(公告)号：EP2416164B1
公开(公告)日：2017-11-08
申请号：EP11187699.1
申请日：2007-09-04
申请人： UT-Battelle, LLC
发明人： Jesse, Stephen , Kalinin, Sergei V
IPC分类号： G01Q10/06 , G01Q30/04 , G01Q60/32
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q30/04 , G01Q60/32

8. 发明公开

EP3232204A1 METHOD OF TUNING PARAMETER SETTINGS FOR PERFORMING ACOUSTIC SCANNING PROBE MICROSCOPY FOR SUBSURFACE IMAGING, SCANNING PROBE MICROSCOPY SYSTEM, AND COMPUTER PROGRAM PRODUCT 审中-公开
标题翻译：调整参数设置的方法，以执行用于地下成像，扫描探针显微系统和计算机程序产品的声学扫描探针显微镜
公开(公告)号：EP3232204A1
公开(公告)日：2017-10-18
申请号：EP16165256.5
申请日：2016-04-14
申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人： Sadeghian Marnani, Hamed , Meijer Timmerman Thijssen, Rutger , van Es, Maarten Hubertus
IPC分类号： G01Q40/00 , G01Q60/32 , G01N29/06
CPC分类号： G01Q60/32 , G01N29/0681 , G01N29/22 , G01Q40/00
摘要： This document relates to a method of tuning a scanning probe microscopy system and system therefore. The system comprising a sample carrier and a probe with a probe tip, and is configured for positioning the probe tip relative to a sample. The system further includes a transducer, a sensor for sensing probe tip vibrations, and a controller. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to the sample; b) at a first position of the probe tip, controlling the transducer to sweep the first frequency across a first frequency range, and obtaining a first probe tip sensor signal; c) at a second position of the probe tip, controlling the transducer to sweep the first frequency across at least said first frequency range, and obtaining a second probe tip sensor signal; d) analyzing the first and second sensor signal to obtain a difference characteristic dependent on the first frequency, and selecting a first frequency value for which the difference characteristic exceeds a threshold for tuning the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.
摘要翻译：因此，本文涉及一种调整扫描探针显微镜系统和系统的方法。该系统包括样本载体和具有探针尖端的探针，并且被配置用于相对于样本定位探针尖端。该系统还包括换能器，用于感测探针尖端振动的传感器，以及控制器。该方法包括：a）向样本施加包括第一频率和第二频率的声振信号; b）在所述探针尖端的第一位置处，控制所述换能器在第一频率范围上扫描所述第一频率，并且获得第一探针尖端传感器信号; c）在所述探针尖端的第二位置处，控制所述换能器在至少所述第一频率范围上扫描所述第一频率，并且获得第二探针尖端传感器信号; d）分析第一和第二传感器信号以获得取决于第一频率的差异特性，并且选择差异特性超过用于调谐第一频率的阈值的第一频率值。选择第一和第二位置使得样品在第一和第二位置处的表面下结构不同。

9. 发明授权

EP2092292B1 SCANNING PROBE MICROSCOPE WITH PERIODICALLY PHASE-SHIFTED AC EXCITATION 有权
标题翻译：周期相移交流激励的扫描探针显微镜
公开(公告)号：EP2092292B1
公开(公告)日：2017-09-20
申请号：EP06817755.9
申请日：2006-12-15
申请人： SPECS Zurich GmbH
发明人： RYCHEN, Jörg
IPC分类号： G01Q10/06 , G01Q60/30 , G01Q60/32
CPC分类号： G01Q60/30 , G01Q10/065 , G01Q60/32

10. 发明公开

EP3204779A1 SCANNING PROBE MICROSCOPE WITH A REDUCED Q-FACTOR 有权
标题翻译：具有减少的Q因子的扫描探针显微镜
公开(公告)号：EP3204779A1
公开(公告)日：2017-08-16
申请号：EP15813595.4
申请日：2015-10-05
申请人： Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek (TNO)
发明人： TABAK, Femke Chantal , SADEGHIAN MARNANI, Hamed , VAN ES, Maarten Hubertus
IPC分类号： G01Q30/12 , G01Q70/04 , G01Q70/08 , G01Q60/32
CPC分类号： G01Q70/04 , G01Q30/12 , G01Q30/18 , G01Q60/32
摘要： A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.
摘要翻译：提供一种扫描探针显微镜，其包括扫描探针（10），用于在没有液体的环境中保持样本（SMP）的保持器（5）。其中提供扫描布置（20），用于引起扫描探针（10）相对于所述样本（SMP）沿样本表面（SMP）的相对运动。驱动器（30）产生驱动信号（Sd）以引起扫描探针（10）相对于待扫描样本的表面的振荡运动。测量单元（40）测量扫描探头（10）的偏转，并提供指示所述偏转的偏转信号（Sδ）。振幅检测器（50）检测偏转信号（Sδ）所指示的振荡运动的振幅，并提供指示该振幅的振幅信号（Sa）。扫描探针（10）至少部分地设置在液体（L）中以抑制所述扫描探针的运动，并且因此具有小于或等于5的品质因数Q.扫描探针（10）容纳在包括所述液体（L）的壳体（90），所述扫描探针（10）包括柔性载体（11），所述柔性载体具有设置有尖端（12）的活动部分，所述尖端（12）延伸穿过开口（91）在所述壳体中。

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