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2. 发明公开

EP3204779A1 SCANNING PROBE MICROSCOPE WITH A REDUCED Q-FACTOR 有权
标题翻译：具有减少的Q因子的扫描探针显微镜
公开(公告)号：EP3204779A1
公开(公告)日：2017-08-16
申请号：EP15813595.4
申请日：2015-10-05
申请人： Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek (TNO)
发明人： TABAK, Femke Chantal , SADEGHIAN MARNANI, Hamed , VAN ES, Maarten Hubertus
IPC分类号： G01Q30/12 , G01Q70/04 , G01Q70/08 , G01Q60/32
CPC分类号： G01Q70/04 , G01Q30/12 , G01Q30/18 , G01Q60/32
摘要： A scanning probe microscope is provided comprising a scanning probe (10), a holder (5) for holding a sample (SMP) in an environment free from liquid. A scanning arrangement (20) is provided therein for inducing a relative motion of the scanning probe (10) with respect to said sample (SMP) along a surface of the sample (SMP). A driver (30) generates a drive signal (Sd) to induce an oscillating motion of the scanning probe (10) relative to the surface of the sample to be scanned. A measuring unit (40) measure a deflection of the scanning probe (10), and provides a deflection signal (Sδ) indicative for said deflection. An amplitude detector (50) detects an amplitude of the oscillating motion as indicated by the deflection signal (Sδ) and provides an amplitude signal (Sa) indicative for the amplitude. The scanning probe (10) is at least partly arranged in a liquid (L) to dampen motion of said scanning probe, and therewith has a quality factor Q which is less than or equal than 5. The scanning probe (10) is accommodated in a casing (90) comprising said liquid (L), the scanning probe (10) comprising a flexible carrier (11), the flexible carrier having a movable part provided with a tip (12), which tip (12) extends through an opening (91) in said casing.
摘要翻译：提供一种扫描探针显微镜，其包括扫描探针（10），用于在没有液体的环境中保持样本（SMP）的保持器（5）。其中提供扫描布置（20），用于引起扫描探针（10）相对于所述样本（SMP）沿样本表面（SMP）的相对运动。驱动器（30）产生驱动信号（Sd）以引起扫描探针（10）相对于待扫描样本的表面的振荡运动。测量单元（40）测量扫描探头（10）的偏转，并提供指示所述偏转的偏转信号（Sδ）。振幅检测器（50）检测偏转信号（Sδ）所指示的振荡运动的振幅，并提供指示该振幅的振幅信号（Sa）。扫描探针（10）至少部分地设置在液体（L）中以抑制所述扫描探针的运动，并且因此具有小于或等于5的品质因数Q.扫描探针（10）容纳在包括所述液体（L）的壳体（90），所述扫描探针（10）包括柔性载体（11），所述柔性载体具有设置有尖端（12）的活动部分，所述尖端（12）延伸穿过开口（91）在所述壳体中。

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