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    • 8. 发明公开
    • Compound for resist and radiation-sensitive composition
    • Verbindungfürresist- und strahlungsempfindlic Zusammensetzung
    • EP2808736A2
    • 2014-12-03
    • EP14182240.3
    • 2005-12-26
    • MITSUBISHI GAS CHEMICAL COMPANY, INC.
    • Echigo, MasatoshiOguro, Dai
    • G03F7/039C07C39/15C07C43/205C07C43/23G03F7/004H01L21/027
    • G03F7/0045C07C39/15C07C43/164C07C43/18C07C43/196C07C43/2055C07C43/225C07C43/315C07C49/747C07C69/96C07C2601/14C07C2603/74G03F7/0392Y10S430/106
    • A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a compound selected from the group consisting of compounds such as for instance diformylbenzene, diacetylbenzene and diformyltoluene; or a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 12 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
    • 一种辐射敏感性组合物,其包含1至80重量%的固体组分和20至99重量%的溶剂。 该固体成分含有化合物B,该化合物B具有(a)由多酚化合物A衍生的结构,通过在多酚化合物A的至少一个酚羟基上引入酸解离基团,所述酚羟基通过选自 由诸如二甲酰基苯,二乙酰基苯和二甲酰甲苯的化合物组成的组; 或具有12至36个碳原子的二至四官能芳族酮或芳族醛与具有1至3个酚羟基和6至15个碳原子的化合物,和(b)分子量为400至2000的组合物。包含 化合物B可用作酸扩增的非聚合抗蚀剂材料,因为它对诸如KrF准分子激光器,极紫外线,电子束和X射线的辐射高度敏感,并且提供具有高分辨率的抗蚀剂图案 ,耐热性高,耐蚀刻性高。