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    • 1. 发明公开
    • Examination apparatus for biological sample and chemical sample
    • Probe und chemische Probe生物物理学
    • EP1557884A2
    • 2005-07-27
    • EP04021003.1
    • 2004-09-03
    • Hitachi, Ltd.
    • Yazawa, YoshiakiWatanabe, KazukiKamahori, MsaoKunimoto, Yukinori
    • H01L27/12
    • G01N27/414G01N27/4148H01L27/1203H01L51/0098
    • A wireless sensor chip suitable for the compact, high-sensitive, and low-cost examination apparatus for easily examining a biological material such as gene at low cost is provided. A sensor chip is formed on an SOI substrate, and an n type semiconductor layer on which a pMOS transistor is formed and a p type semiconductor layer on which an nMOS transistor is formed are isolated by a pn junction. Therefore, the p type semiconductor layer at the outermost portion (chip edge portion to be in contact with solution) is set to floating, and the maximum potential and the minimum potential of the chip are supplied to an n type semiconductor layer and a p type semiconductor layer inside the outermost portion, respectively. Also, the chip is covered with an ion impermeable insulating film for reducing the penetration of positive ions through the oxide layer.
    • 提供了一种适用于以低成本易于检测诸如基因等生物材料的小型,高灵敏度,低成本的检查装置的无线传感器芯片。 传感器芯片形成在SOI衬底上,并且其上形成有pMOS晶体管的n型半导体层和其上形成有nMOS晶体管的p型半导体层被pn结隔离。 因此,将最外侧部分(与溶液接触的芯片边缘部分)的p型半导体层设置为浮置,并且将芯片的最大电位和最小电位提供给n型半导体层和p型半导体 分别在最外部分内。 此外,芯片被不透水的绝缘膜覆盖,用于减少正离子穿过氧化物层的穿透。